Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Measurement of the mobile ion concentration in the oxide layer of a semiconductor wafer










Image Number 4 for United States Patent #5773989.

A method and apparatus for measuring the concentration of mobile ions in the oxide layer of a semiconductor wafer from the contact potential shift caused by ion drift across the oxide that includes depositing charge (e.g., using a corona discharge device) on the surface of the oxide and heating the wafer to allow mobile ions in the oxide (especially Na.sup.+) to drift. The difference in the contact potential measured before and after heating provides an indication of the mobile ion concentration in the oxide layer.








 
 
  Recently Added Patents
System for controlled release of an active principle and method for preparation
Method for generating codewords
Wind energy system having a connection protection device
Novelty snacks and method of manufacture of same
Systems, methods, and media for firewall control via remote system information
Factor IXa crystals, related complexes and methods
System and method for providing restrictions on the location of peer subnet manager (SM) instances in an infiniband (IB) network
  Randomly Featured Patents
Creation of local usage rights voucher
Printing apparatus and print system
Selective call receiver having an optional display mode
Compositions and processes for improving phosphatation clarification of sugar liquors and syrups
Accessory protocol for touch screen device accessibility
Vacuum cleaner
Storage container that isolates and contains contaminated medical equipment including a rack for carrying medical instruments into and out of the operating room
Method and system for determining relative duct sizes by zone in an HVAC system
Method and system for cleaning well casing
Coated magnetic recording medium, paint for coated magnetic medium and method for producing coated magnetic medium