Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Measurement of the mobile ion concentration in the oxide layer of a semiconductor wafer










Image Number 4 for United States Patent #5773989.

A method and apparatus for measuring the concentration of mobile ions in the oxide layer of a semiconductor wafer from the contact potential shift caused by ion drift across the oxide that includes depositing charge (e.g., using a corona discharge device) on the surface of the oxide and heating the wafer to allow mobile ions in the oxide (especially Na.sup.+) to drift. The difference in the contact potential measured before and after heating provides an indication of the mobile ion concentration in the oxide layer.








 
 
  Recently Added Patents
Solid-state imaging apparatus
Modulators of cystic fibrosis transmembrane conductance regulator
Method and system for presenting live video from video capture devices on a computer monitor
Attribute category enhanced search
Haloalky -substituted amides as insecticides and acaricides
Die seal ring
Case of electronic device having antenna pattern embedded therein and mold and method for manufacturing the same
  Randomly Featured Patents
Champagne flute
Biaxial liquid crystal compound, liquid crystal composition comprising the same, and optical film using the same liquid crystal composition
Dyeing assistant and use thereof for dyeing or printing synthetic polyamide fibre material
Life management system and method for gas turbine thermal barrier coatings
Optical system for non-flexible endoscopes
Measuring device, measuring apparatus and method of measuring
Membrane reactor hollow tube module with ceramic/metal interfacial zone
X-ray collimator comprising light beam localizer with lens system
Systems, processes and products for network storage and retrieval of physical paper documents, electro-optically generated electronic documents, and computer generated electronic documents
Paper transport mechanism