Resources Contact Us Home
Substrate processing system

Image Number 10 for United States Patent #5745946.

An improved substrate processing system. The system may be used for double sided scrubbing of a semiconductor substrate. The wet stations of the system has covers which prevent accumulated liquid from dripping outside of the station and which minimize dripping on the substrates. Transport tunnels are provided between modules to prevent leakage between the modules. A substrate transport mechanism which is moveable along a rail is provided with the stabilizer to provide for stable substrate transfer. The processing system has two brush stations which are placed within a single enclosure. The sensors located throughout the system, which sense the presence of a wafer, are fixedly mounted in a frame so that they are self-aligned to one another. In the sender station, two sensors are used, with the system requiring both sensors to sense the presence of a wafer to increase the reliability. In the dry station, the heating lamp is shielded from the substrate to reduce particulate contamination. Various flow meters are mounted on a transparent panel to provide easy and convenient hook-up. The system is provided with an airflow control bulkhead between the clean and dirty side of the system to prevent intermixing to thereby provide for lower contamination levels in the clean side of the system.

  Recently Added Patents
Di and tri- substituted oxathiazine derivatives, method for the production, method for the production thereof, use thereof as medicine and drug containing said derivatives and use thereof
Bio-stimulant for improved plant growth and development
Photovoltaic system with integrated photovoltaic panel and battery
Color image forming apparatus with contact control of process units
Battery terminal with current sensor
Method for production of fermentable sugars from biomass
Signal routing dependent on a loading indicator of a mobile node
  Randomly Featured Patents
Image scanning format converter suitable for a high definition television system
Single layer papermakers forming fabric
Triazino(2,1-a)isoquinoline derivatives, compositions and their use as medicaments
Developing device usable with image forming apparatus
HDMI connector
Multipoint receiving and data processing apparatus
Optically active alcohols
Relay transmission method and apparatus
Semiconductor device sealed with mold resin
Sealing assembly for use with an optical fiber holder