Resources Contact Us Home
Substrate processing system

Image Number 10 for United States Patent #5745946.

An improved substrate processing system. The system may be used for double sided scrubbing of a semiconductor substrate. The wet stations of the system has covers which prevent accumulated liquid from dripping outside of the station and which minimize dripping on the substrates. Transport tunnels are provided between modules to prevent leakage between the modules. A substrate transport mechanism which is moveable along a rail is provided with the stabilizer to provide for stable substrate transfer. The processing system has two brush stations which are placed within a single enclosure. The sensors located throughout the system, which sense the presence of a wafer, are fixedly mounted in a frame so that they are self-aligned to one another. In the sender station, two sensors are used, with the system requiring both sensors to sense the presence of a wafer to increase the reliability. In the dry station, the heating lamp is shielded from the substrate to reduce particulate contamination. Various flow meters are mounted on a transparent panel to provide easy and convenient hook-up. The system is provided with an airflow control bulkhead between the clean and dirty side of the system to prevent intermixing to thereby provide for lower contamination levels in the clean side of the system.

  Recently Added Patents
Flying vehicle and/or toy replica thereof
Electronic mirror
Mucosal formulation
Perfume bottle
Package for a card game using individual scoring boards and a storage container for pegs, place flags, and cards
Process for the preparation of aryl substituted olefinic amines
Semiconductor device
  Randomly Featured Patents
Project estimator
Method and apparatus to provide diagnostic index and therapy regulated by subject's autonomic nervous system
Color measurement method
Projection display apparatus for reducing optical elements
Process for producing toner for electrophotography
Gutter hammer
Oscillating skateboard
Therapeutic sleeve for implantable medical device
System for locating and describing
Optical scanning apparatus and an image forming apparatus