Resources Contact Us Home
Substrate processing system

Image Number 10 for United States Patent #5745946.

An improved substrate processing system. The system may be used for double sided scrubbing of a semiconductor substrate. The wet stations of the system has covers which prevent accumulated liquid from dripping outside of the station and which minimize dripping on the substrates. Transport tunnels are provided between modules to prevent leakage between the modules. A substrate transport mechanism which is moveable along a rail is provided with the stabilizer to provide for stable substrate transfer. The processing system has two brush stations which are placed within a single enclosure. The sensors located throughout the system, which sense the presence of a wafer, are fixedly mounted in a frame so that they are self-aligned to one another. In the sender station, two sensors are used, with the system requiring both sensors to sense the presence of a wafer to increase the reliability. In the dry station, the heating lamp is shielded from the substrate to reduce particulate contamination. Various flow meters are mounted on a transparent panel to provide easy and convenient hook-up. The system is provided with an airflow control bulkhead between the clean and dirty side of the system to prevent intermixing to thereby provide for lower contamination levels in the clean side of the system.

  Recently Added Patents
Semiconductor device
Plants and seeds of corn variety CV778791
Upper surface of a skateboard deck
Information processing apparatus, method for controlling information processing apparatus, and storage medium
Control device for radiation imaging apparatus and control method therefor
Apparatus and method for exerting force on a subject tissue
Push button
  Randomly Featured Patents
Mechanism to control the allocation of an N-source shared buffer
Shoelace tying system
Hitch for one-wheel cycle trailers
Trimmer with adjustable handle
Toothbrush holder
Mechanically assisted hydraulic filter
Motor vehicle battery discharge load current control
Electronic connector with quickly fastening latches