Resources Contact Us Home
Substrate processing system

Image Number 10 for United States Patent #5745946.

An improved substrate processing system. The system may be used for double sided scrubbing of a semiconductor substrate. The wet stations of the system has covers which prevent accumulated liquid from dripping outside of the station and which minimize dripping on the substrates. Transport tunnels are provided between modules to prevent leakage between the modules. A substrate transport mechanism which is moveable along a rail is provided with the stabilizer to provide for stable substrate transfer. The processing system has two brush stations which are placed within a single enclosure. The sensors located throughout the system, which sense the presence of a wafer, are fixedly mounted in a frame so that they are self-aligned to one another. In the sender station, two sensors are used, with the system requiring both sensors to sense the presence of a wafer to increase the reliability. In the dry station, the heating lamp is shielded from the substrate to reduce particulate contamination. Various flow meters are mounted on a transparent panel to provide easy and convenient hook-up. The system is provided with an airflow control bulkhead between the clean and dirty side of the system to prevent intermixing to thereby provide for lower contamination levels in the clean side of the system.

  Recently Added Patents
Modular microscope construction
Measuring current and resistance using combined diodes/resistor structure to monitor integrated circuit manufacturing process variations
Device for data routing in networks
Detection and use of low molecular-weight modulators of the cold-menthol receptor TRPM8
Noise suppression in speech signals
Resistive random access memory cell and resistive random access memory module
Image forming apparatus and method of translating virtual memory address into physical memory address
  Randomly Featured Patents
Adaptive user feedback window
System and method for improving the accuracy of a speech recognition program
Method of forming an integrated circuit module
Method for monitoring the functioning of a control unit
Coating composition with stable viscosity
Scanning electron microscope
Stripping and developing process and device therefor
Pulse comparison system
Labelled nucleotides
Traveling wave heat engine