Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Position detecting system and exposure apparatus having the same










Image Number 9 for United States Patent #5745242.

A position detecting system, for detecting a position of an object, includes a light detecting device having arrayed light detecting elements, a moving mechanism for producing relative movement between the object and the light detecting device, and a control device for causing the moving mechanism to produce relative movement between the object and the light detecting dvice of a predetermined unit amount and in a predetermined position detecting direction, and also to cause the light detecting device to detect, at respective positions, light from a mark formed on the object, wherein the control device calculates mark positions from signals obtained at the respective positions, and also determines the position of the object on the basis of the calculated mark positions.








 
 
  Recently Added Patents
Light emitting device
Advanced CAPTCHA using images in sequence
Method and system for providing an intelligent visual scrollbar position indicator
Badge or pin
Memory device and method for dynamic random access memory having serial interface and integral instruction buffer
Data recording apparatus with recording control based on defect block and control method thereof
Eye therapy system
  Randomly Featured Patents
Track design
Knitted fabric having open part and knitting method therefor
Image processing apparatus, information processing apparatus, and method therefor
Multiple-dwelling structure
Method for fabricating MOS transistors
Lifting and transport apparatus for transcontainers
Method of manufacturing silicon carbide semiconductor device
Head-mounted navigation system
Photoelectric coupling assembly and manufacturing method thereof
Bag in box liner container