Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Position detecting system and exposure apparatus having the same










Image Number 9 for United States Patent #5745242.

A position detecting system, for detecting a position of an object, includes a light detecting device having arrayed light detecting elements, a moving mechanism for producing relative movement between the object and the light detecting device, and a control device for causing the moving mechanism to produce relative movement between the object and the light detecting dvice of a predetermined unit amount and in a predetermined position detecting direction, and also to cause the light detecting device to detect, at respective positions, light from a mark formed on the object, wherein the control device calculates mark positions from signals obtained at the respective positions, and also determines the position of the object on the basis of the calculated mark positions.








 
 
  Recently Added Patents
Combination of a microorganism and a phytosphingosine derivative, composition, methods of use
Method and system for reduction of decoding complexity in a communication system
Method and apparatus for accessing and downloading information from the internet
LED light
System and method for dynamic quality-of-service-based billing in a peer-to-peer network
Cooking brush
System and method for deposition in high aspect ratio magnetic writer heads
  Randomly Featured Patents
Low-temperature curing, favorable feel coating composition
Mother board, system and method for controlling the work of the mother board
Training footwear
MOS integrated circuit and electronic equipment including the same
Method of forming resin film of desired pattern on semiconductor substrate, semiconductor chip, semiconductor package
Fluid containment structure
Heat-shrinkable hollow article
Method for molding fiber-reinforced composite material
Method of preventing schileren formation in a glass melt with same
Fabrication of CMOS integrated devices with reduced gate length and lightly doped drain