Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Position detecting system and exposure apparatus having the same










Image Number 9 for United States Patent #5745242.

A position detecting system, for detecting a position of an object, includes a light detecting device having arrayed light detecting elements, a moving mechanism for producing relative movement between the object and the light detecting device, and a control device for causing the moving mechanism to produce relative movement between the object and the light detecting dvice of a predetermined unit amount and in a predetermined position detecting direction, and also to cause the light detecting device to detect, at respective positions, light from a mark formed on the object, wherein the control device calculates mark positions from signals obtained at the respective positions, and also determines the position of the object on the basis of the calculated mark positions.








 
 
  Recently Added Patents
Transmission apparatus and network protection method
Battery pack with interchangeable circuit substrates
Stable file system
Systems, methods, and apparatus to prepare a mobile device for provisioning
High voltage fast recovery trench diode
Conductive polymer and a solid electrolytic capacitor using the same as a solid electrolyte
Sabatier process and apparatus for controlling exothermic reaction
  Randomly Featured Patents
Audio amplifier
Reconfigurable cache controller utilizing multiple ASIC SRAMS
Car control device electronics
Apparatus for reducing magnetic field-induced bias errors in a fiber optic gyroscope
Connectorized fiber optic cabling and methods for forming the same
Automatic localization of the left ventricle in cardiac cine magnetic resonance imaging
Vehicle context awareness by detecting engine RPM using a motion sensor
Weight driven neck traction unit and method
Rotation sensor
Positive grid alloys