Resources Contact Us Home
Position detecting system and exposure apparatus having the same

Image Number 9 for United States Patent #5745242.

A position detecting system, for detecting a position of an object, includes a light detecting device having arrayed light detecting elements, a moving mechanism for producing relative movement between the object and the light detecting device, and a control device for causing the moving mechanism to produce relative movement between the object and the light detecting dvice of a predetermined unit amount and in a predetermined position detecting direction, and also to cause the light detecting device to detect, at respective positions, light from a mark formed on the object, wherein the control device calculates mark positions from signals obtained at the respective positions, and also determines the position of the object on the basis of the calculated mark positions.

  Recently Added Patents
Lighting fixture
Control apparatus for autonomous operating vehicle
Method for transferring inventory between virtual universes
Assay for the diagnosis of flaviviral infection using antibodies with high affinity for NS1 protein of flavivirusi in hexameric form
Pyroelectric detector, pyroelectric detection device, and electronic instrument
Radio communication device and sequence length adjusting method
Drive apparatus
  Randomly Featured Patents
Therapeutic whirlpool unit with temperature contrast
Waiting tray for sheet processing tray
Insulated food storage housing assembly
Acaricidal compositions and methods of use thereof
Wagering game with symbol array defined by multi-symbol objects
Data storage management driven by business objectives
Photopheresis treatment of leukocytes
Content optimization for receiving terminals
Multi color display panel
Rewritable recording medium and a method of recording in the same