Resources Contact Us Home
R.F. plasma reactor with larger-than-wafer pedestal conductor

Image Number 5 for United States Patent #5688358.

A pedestal for supporting a semiconductor substrate in an R.F. plasma reactor chamber includes a conductive disk platen having a diameter exceeding the diameter of the substrate so that an outer annular portion of the conductive disk platen provides a direct path of R.F. power from the plasma while a remaining inner portion of the conductive disk provides a path of R.F. power from the plasma through the substrate, an etch-resistant cover shielding the conductive platen from the plasma, a portion of the etch-resistant layer underlying the substrate, the etch-resistant cover including a raised disk overlying a central portion of the conductive disk platen and underlying the substrate and having a diameter less than the diameter of the substrate so that a peripheral portion of the substrate extends beyond the circumference of the raised disk, a recessed ring annulus overlying an outer portion of the conductive disk platen and having a top surface which is depressed below a top surface of the raised disk, an inner portion of the recessed ring annulus underlying the peripheral portion of the substrate, leaving a top portion of a side wall of the raised disk exposed to the plasma.

  Recently Added Patents
Cosmetic composition based on a supramolecular polymer and a hyperbranched functional polymer
Reconstruction of deforming surfaces by canceling ambient occlusion and refining 3-D shape
Digital processing method and system for determination of optical flow
Lamp body with integrally molded heat sink
Image processing apparatus and method having defective pixel detection and correction ability
Systems and/or methods for determining item serial number structure and intelligence
  Randomly Featured Patents
Ball-firing cartridge and method
Consumable product package
Integrated process for producing xylenes and high purity benzene
Operating method for ROM array which minimizes band-to-band tunneling
Multiple alloy bushing assembly
System and method for generating line pressure of continuously variable transmission in hybrid vehicle
Nectarine tree named `Fire Time`
Truck roof fairing
Effective ophthalmic irrigation solution
Method of inhibiting growth or survival of a cell by providing an anti-108P5H8 antibody