Resources Contact Us Home
R.F. plasma reactor with larger-than-wafer pedestal conductor

Image Number 5 for United States Patent #5688358.

A pedestal for supporting a semiconductor substrate in an R.F. plasma reactor chamber includes a conductive disk platen having a diameter exceeding the diameter of the substrate so that an outer annular portion of the conductive disk platen provides a direct path of R.F. power from the plasma while a remaining inner portion of the conductive disk provides a path of R.F. power from the plasma through the substrate, an etch-resistant cover shielding the conductive platen from the plasma, a portion of the etch-resistant layer underlying the substrate, the etch-resistant cover including a raised disk overlying a central portion of the conductive disk platen and underlying the substrate and having a diameter less than the diameter of the substrate so that a peripheral portion of the substrate extends beyond the circumference of the raised disk, a recessed ring annulus overlying an outer portion of the conductive disk platen and having a top surface which is depressed below a top surface of the raised disk, an inner portion of the recessed ring annulus underlying the peripheral portion of the substrate, leaving a top portion of a side wall of the raised disk exposed to the plasma.

  Recently Added Patents
Quinazoline compounds and their use in perfume compositions
Power generating apparatus of renewable energy type and method of attaching and detaching blade
Horizontal card holder
Particle-loaded membrane for solid-phase-extraction and method for performing SALDI-MS analysis of an analyte
Touch screen guitar
Color stable manganese-doped phosphors
Image enhancement based on multiple frames and motion estimation
  Randomly Featured Patents
Selective gas detection and measurement system
Fuel injection system for an internal combustion engine
Floor lamp
Single serving pizza cooker
Driveway gate system
Heater for hot tubs and storage tanks
Network communication device
Derivatives of triterpenoid acids and uses thereof
Tying device for body parts
Reaction mechanism for brake booster