Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
R.F. plasma reactor with larger-than-wafer pedestal conductor










Image Number 5 for United States Patent #5688358.

A pedestal for supporting a semiconductor substrate in an R.F. plasma reactor chamber includes a conductive disk platen having a diameter exceeding the diameter of the substrate so that an outer annular portion of the conductive disk platen provides a direct path of R.F. power from the plasma while a remaining inner portion of the conductive disk provides a path of R.F. power from the plasma through the substrate, an etch-resistant cover shielding the conductive platen from the plasma, a portion of the etch-resistant layer underlying the substrate, the etch-resistant cover including a raised disk overlying a central portion of the conductive disk platen and underlying the substrate and having a diameter less than the diameter of the substrate so that a peripheral portion of the substrate extends beyond the circumference of the raised disk, a recessed ring annulus overlying an outer portion of the conductive disk platen and having a top surface which is depressed below a top surface of the raised disk, an inner portion of the recessed ring annulus underlying the peripheral portion of the substrate, leaving a top portion of a side wall of the raised disk exposed to the plasma.








 
 
  Recently Added Patents
Variants of a family 44 xyloglucanase
Apparatus, electronic component and method for generating reference voltage
Keypad assembly for electronic devices
Method for manufacturing light emitting diodes
High-resolution, active reflector radio frequency ranging system
Modular authoring and visualization of rules using trees
Combined imaging and radiation therapy
  Randomly Featured Patents
TV remote control unit
Combined saliva ejector and tooth isolator
Haworthia plant named `NEW YORK`
Container having fluid-tight seal
Switching networks with expansive and/or dispersive logical clusters for message routing
Multi-layered printed circuit board, and grid array package adopting the same
Apparatus for compressive shrinkage of tubular knitted fabrics and the like
Dynamoelectric machine assemblies operable with serial communication signals and PWM control signals
Determining whether e-mail messages originate from recognized domains
Magnetic head having a laminated structure