Resources Contact Us Home
R.F. plasma reactor with larger-than-wafer pedestal conductor

Image Number 5 for United States Patent #5688358.

A pedestal for supporting a semiconductor substrate in an R.F. plasma reactor chamber includes a conductive disk platen having a diameter exceeding the diameter of the substrate so that an outer annular portion of the conductive disk platen provides a direct path of R.F. power from the plasma while a remaining inner portion of the conductive disk provides a path of R.F. power from the plasma through the substrate, an etch-resistant cover shielding the conductive platen from the plasma, a portion of the etch-resistant layer underlying the substrate, the etch-resistant cover including a raised disk overlying a central portion of the conductive disk platen and underlying the substrate and having a diameter less than the diameter of the substrate so that a peripheral portion of the substrate extends beyond the circumference of the raised disk, a recessed ring annulus overlying an outer portion of the conductive disk platen and having a top surface which is depressed below a top surface of the raised disk, an inner portion of the recessed ring annulus underlying the peripheral portion of the substrate, leaving a top portion of a side wall of the raised disk exposed to the plasma.

  Recently Added Patents
Method and apparatus for networked modems
Monitoring device, monitoring method and non-transitory computer readable medium
MEMS autofocus actuator
System and method for combining different tablets into a pouch
Intraoral camera for dental chairs
Restore software with aggregated view of content databases
Patterned birefringent product
  Randomly Featured Patents
Card ejection mechanism for electrical card connector
Optical system for the display of visual images
Method of forming thin film patterning substrate including formation of banks
AC switch triggered at a predetermined half-period
Method of electric arc welding
Marine outdrive assembly
System and method for generating minimum on-time pulses
Portioning and packing machine
Sheet and light emitting apparatus
Device for spreading objects apart