Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
R.F. plasma reactor with larger-than-wafer pedestal conductor










Image Number 5 for United States Patent #5688358.

A pedestal for supporting a semiconductor substrate in an R.F. plasma reactor chamber includes a conductive disk platen having a diameter exceeding the diameter of the substrate so that an outer annular portion of the conductive disk platen provides a direct path of R.F. power from the plasma while a remaining inner portion of the conductive disk provides a path of R.F. power from the plasma through the substrate, an etch-resistant cover shielding the conductive platen from the plasma, a portion of the etch-resistant layer underlying the substrate, the etch-resistant cover including a raised disk overlying a central portion of the conductive disk platen and underlying the substrate and having a diameter less than the diameter of the substrate so that a peripheral portion of the substrate extends beyond the circumference of the raised disk, a recessed ring annulus overlying an outer portion of the conductive disk platen and having a top surface which is depressed below a top surface of the raised disk, an inner portion of the recessed ring annulus underlying the peripheral portion of the substrate, leaving a top portion of a side wall of the raised disk exposed to the plasma.








 
 
  Recently Added Patents
Battery pouch sheet edge insulation
Article based on a composition containing a crosslinked blend of elastomers
Fire detector
Real-time pricing of shipping vendors
Method and apparatus for performing real time anomaly detection
Data consumption framework for semantic objects
Pre-colored methodology of multiple patterning
  Randomly Featured Patents
Multi-container trash and recycle center
Rapid-setting polyurethanes prepared in the presence of a cyclic unsaturated aliphatic hydrocarbon
Lipid analogs for treating viral infections
Method for the preparation of thin layers of tungsten and molybdenum
Method of injection molding
Method and device for renewing a ballast bed
Thermo-optical phase shifter
Hemopoietin receptor protein, NR10
Sample carrying apparatus capable of revolving sample
Connector and a connector assembly