Resources Contact Us Home
R.F. plasma reactor with larger-than-wafer pedestal conductor

Image Number 5 for United States Patent #5688358.

A pedestal for supporting a semiconductor substrate in an R.F. plasma reactor chamber includes a conductive disk platen having a diameter exceeding the diameter of the substrate so that an outer annular portion of the conductive disk platen provides a direct path of R.F. power from the plasma while a remaining inner portion of the conductive disk provides a path of R.F. power from the plasma through the substrate, an etch-resistant cover shielding the conductive platen from the plasma, a portion of the etch-resistant layer underlying the substrate, the etch-resistant cover including a raised disk overlying a central portion of the conductive disk platen and underlying the substrate and having a diameter less than the diameter of the substrate so that a peripheral portion of the substrate extends beyond the circumference of the raised disk, a recessed ring annulus overlying an outer portion of the conductive disk platen and having a top surface which is depressed below a top surface of the raised disk, an inner portion of the recessed ring annulus underlying the peripheral portion of the substrate, leaving a top portion of a side wall of the raised disk exposed to the plasma.

  Recently Added Patents
High order continuous time filter
Recording apparatus, recording method, reproducing apparatus, reproducing method, program, and recording/producing apparatus
Can seam inspection
Method of fabricating semiconductor light emitting device
Semiconductor memory device and manufacturing method thereof
Handheld electronic communication device having sliding display
System for presenting media services
  Randomly Featured Patents
Apparatus and method for eliminating stop marks in carpets on tufting machines
Method and device for orienting a tubular knitted articles, such as a sock, angularly around an axis
Spheroid toy
Spa jet assembly
Production of baked snack chips with irregular shape having notched edges
Vertical light-emitting diode device structure with Si.sub.xN.sub.y layer
Bottle stopper
Motion estimation and inter-mode prediction
Cooking apparatus
Maize variety inbred PHWJH