Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for rinsing wafers adhered with chemical liquid by use of purified water










Image Number 6 for United States Patent #5651836.

A method for rinsing wafers having residual chemical liquid adhering thereto with purified water is disclosed which is characterized by the steps of preparing a rinsing tank provided in the upper part thereof with an overflow discharge part for spent rinsing liquid and a head tank disposed above the rinsing tank, storing purified water for rinse in the head tank, setting in place in the rinsing tank a basket having a plurality of wafers stowed therein parallelly as suitably spaced in such a manner that the surfaces of the wafers may lie substantially vertically, feeding the purified water from the headtank to the rinsing tank by virtue of head, causing the purified water to flow upward from below the basket, and enabling the spent rinsing liquid to be discharged through the overflow discharge part in an amount equivalent to part or the whole of the purified water fed from the head tank.








 
 
  Recently Added Patents
Systems, methods, and apparatus to prepare a mobile device for provisioning
Engineered nucleic acids encoding a modified erythropoietin and their expression
Beverage container lid
Highly specialized application protocol for email and SMS and message notification handling and display
Method and apparatus for optimizing paging in a communication network
Demand based power allocation
Wireless control system for a patient support apparatus
  Randomly Featured Patents
Bicycle frame
Sandsled
Regenerative afterburner
Nonvolatile semiconductor memory device has source-line-side diode formed in a contact for connecting source line and memory cell string in direction perpendicular to substrate
Exercise apparatus
Motorcycle
Methods of treating psychosis
Hollow cathode discharge device with front shield
Programmable pressure control system
Method and apparatus to generate orifice disk entry geometry