Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for rinsing wafers adhered with chemical liquid by use of purified water










Image Number 6 for United States Patent #5651836.

A method for rinsing wafers having residual chemical liquid adhering thereto with purified water is disclosed which is characterized by the steps of preparing a rinsing tank provided in the upper part thereof with an overflow discharge part for spent rinsing liquid and a head tank disposed above the rinsing tank, storing purified water for rinse in the head tank, setting in place in the rinsing tank a basket having a plurality of wafers stowed therein parallelly as suitably spaced in such a manner that the surfaces of the wafers may lie substantially vertically, feeding the purified water from the headtank to the rinsing tank by virtue of head, causing the purified water to flow upward from below the basket, and enabling the spent rinsing liquid to be discharged through the overflow discharge part in an amount equivalent to part or the whole of the purified water fed from the head tank.








 
 
  Recently Added Patents
Pipette device
System and method for access of user accounts on remote servers
Apparatus and method for manufacturing microneedles
Chair
Quaternary chalcogenide wafers
Digital broadcast receiver and method for processing caption thereof
Systems and/or methods for using air/wind power to charge/re-charge vehicle batteries
  Randomly Featured Patents
Secure and scalable detection of preselected data embedded in electronically transmitted messages
Electrical surgical instrument with optimized power supply and drive
Copy controller and method thereof
Hydrogels and articles made therefrom
Calcium aluminate cement compositions and mixes and method for preparing them
Method for improved cable modem ranging in a data-over-cable system
Valve mechanism, in particular for internal combustion engines of motor vehicles
Process for monitoring time-temperature histories of perishables utilizing inactive form of diacetylene
Ceiling fan
Coextruded structures