Resources Contact Us Home
Method for rinsing wafers adhered with chemical liquid by use of purified water

Image Number 6 for United States Patent #5651836.

A method for rinsing wafers having residual chemical liquid adhering thereto with purified water is disclosed which is characterized by the steps of preparing a rinsing tank provided in the upper part thereof with an overflow discharge part for spent rinsing liquid and a head tank disposed above the rinsing tank, storing purified water for rinse in the head tank, setting in place in the rinsing tank a basket having a plurality of wafers stowed therein parallelly as suitably spaced in such a manner that the surfaces of the wafers may lie substantially vertically, feeding the purified water from the headtank to the rinsing tank by virtue of head, causing the purified water to flow upward from below the basket, and enabling the spent rinsing liquid to be discharged through the overflow discharge part in an amount equivalent to part or the whole of the purified water fed from the head tank.

  Recently Added Patents
Anti-fake battery pack and identification system thereof
Multi-domain dynamic group virtual private networks
Multi charged particle beam writing apparatus and multi charged particle beam writing method
Method for conductivity control of (Al,In,Ga,B)N
Disc shaped high density recording medium
Performance apparatus and electronic musical instrument
Method for designing sunlight-reflection and heat-radiation multilayer film
  Randomly Featured Patents
Nuclear reactor primary system chemical decontamination clean-up system component arrangement
Liquid crystal display controller and liquid crystal display device
Systems and methods for reducing splice loss in optical fibers
Soil solution sampler
Method and apparatus for securing a list of passwords and personal identification numbers
Electroacoustic transducer
Process for producing a solid catalyst component for olefin polymerization and a process for producing an olefin polymer
Solid woven tubular prosthesis methods
Efficient method for fabricating P-wells and N-wells
Deployable and retrievable shape memory stent/tube and method