Resources Contact Us Home
Method for rinsing wafers adhered with chemical liquid by use of purified water

Image Number 6 for United States Patent #5651836.

A method for rinsing wafers having residual chemical liquid adhering thereto with purified water is disclosed which is characterized by the steps of preparing a rinsing tank provided in the upper part thereof with an overflow discharge part for spent rinsing liquid and a head tank disposed above the rinsing tank, storing purified water for rinse in the head tank, setting in place in the rinsing tank a basket having a plurality of wafers stowed therein parallelly as suitably spaced in such a manner that the surfaces of the wafers may lie substantially vertically, feeding the purified water from the headtank to the rinsing tank by virtue of head, causing the purified water to flow upward from below the basket, and enabling the spent rinsing liquid to be discharged through the overflow discharge part in an amount equivalent to part or the whole of the purified water fed from the head tank.

  Recently Added Patents
Flat panel crystal display employing simultaneous charging of main and subsidiary pixel electrodes
Reliable event broadcaster with multiplexing and bandwidth control functions
Remedy for overactive bladder comprising acetic acid anilide derivative as the active ingredient
Method and system for electronic assistance in dispensing pharmaceuticals
Electronic device, information processing method, and storage medium
Tone enhancement bracket
Security authentication method, apparatus, and system
  Randomly Featured Patents
Device for measuring the mass of a flowing medium
Media coding for loss recovery with remotely predicted data units
Process for preparing polysuccinimides from aspartic acid
Integrated circuit buffer device
Methods and apparatus for performing sonomammography and enhanced x-ray imaging
Method of and apparatus for cooling a seal for machinery
Method for fabricating semiconductor devices having dual gate oxide layers
Gold-plated electrosurgical instrument
Protocol for a remote control device to enable control of network attached devices
Parallelized redo-only logging and recovery for highly available main memory database systems