Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Stationary focus ring for plasma reactor










Image Number 6 for United States Patent #5552124.

A stationary focus ring for use in a plasma reactor during wafer processing includes a first slotted opening through which a wafer transfer blade and wafer may pass, and includes a second slotted opening, where the two openings cooperate to provide a balanced gas flow distribution across the wafer surface, such that process uniformity is achieved across the wafer surface, while minimizing the actual size of the openings to provide an increased level of reaction commensurate with that of a solid, movable focus ring. Alternatively, a thick focus ring that displaces chamber volume and thereby stabilizes gas flow within the chamber has a circular, an eccentric, and/or a baffle configuration to provide uniform gas flow distribution across the wafer surface.








 
 
  Recently Added Patents
Efficiently emulating computer architecture condition code settings without executing branch instructions
Cosmetic or pharmaceutical peptides containing uncoded amino acids and their use in the treatment and/or care of the skin, mucous membranes, or scalp
Output device, source apparatus, television set, system, output method, program, and recording medium
Method and apparatus for analysis of histopathology images and its application to cancer diagnosis and grading
Method for producing cathode active material for a lithium secondary battery
Systems and methods for facilitating communication with foundation fieldbus linking devices
Semiconductor apparatus
  Randomly Featured Patents
Method for manufacturing coated short fibers
Synchronized visual/audible alarm system
Outer layer drumhead structure
Fixing station for fixing toner images on a supporting material with a mobile covering device
Coffee brewing apparatus and method
Camera system having a communication system between a camera body and a photographing lens
Tool for use in mounting a joist hanger
Method of evaluating ion-exchange film, method of evaluating organic sample and X-ray measuring apparatus
Twist lock plug
Hermetically sealed vial