Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
PE-OX/ozone-TEOS gap filling capability by selective N.sub.2 treatment on PE-OX










Image Number 3 for United States Patent #5536681.

An improved method of gap filling in the dielectric layer by performing selective N.sub.2 treatment on the PE-OX underlayer is described. Semiconductor device structures are provided in and on a semiconductor substrate. A conducting layer is deposited overlying the top surfaces of the semiconductor device structures and patterned to form conducting lines. A first silane-based oxide layer is deposited over the surfaces of the conducting layer wherein a gap is formed between portions of the patterned conducting layer. The first oxide layer is covered with a layer of photoresist which is patterned so that the portions of the first oxide layer overlying the conducting lines are not covered by the photoresist layer. The portions of the first oxide layer not covered by the photoresist layer are treated with N.sub.2 plasma. The photoresist layer is removed. A second O.sub.3 -TEOS oxide layer is deposited over the first oxide layer wherein the gap is filled by the second oxide layer and fabrication of the integrated circuit is completed.








 
 
  Recently Added Patents
Precision geolocation of moving or fixed transmitters using multiple observers
End-of-session authentication
System and method for interactive image-based modeling of curved surfaces using single-view and multi-view feature curves
System for and method of providing single sign-on (SSO) capability in an application publishing environment
Method and apparatus for representing sensory effects and computer readable recording medium storing user sensory preference metadata
Device and method to automatically configure port forwarding
Scanning transmission electron microscope and axial adjustment method thereof
  Randomly Featured Patents
Method of preparation of anticancer taxanes using 3-[(substituted-2-trialkylsilyl)ethoxy-carbonyl]-5-oxazolidine carboxylic acids
Magnetoelectric generator
Water bottle holder
Method for collaborative discrimation between authentic and spurious signals in a wireless cognitive network
Precisely adjusting a local clock
Colour active matrix displays
Developing apparatus, process cartridge and image forming apparatus
Ajuga plant named `Sparkler`
Polyhydroxyl compounds containing ether and ester groups and their use in the production of polyurethane plastics
Bracing assembly for cyclone diplegs in fluidized bed units