Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Process for producing a pressure transducer using silicon-on-insulator technology










Image Number 3 for United States Patent #5510276.

A process for producing a pressure transducer or sensor using the silicon-on-insulator method is provided. The process includes the following steps: (a) producing a monocrystalline silicon film (44) on a silicon substrate (6) at least locally separated from the latter by an insulating layer (42), (b) producing an opening (24) in the silicon film down to the insulating layer, (c) partially eliminating the insulating layer via the opening in order to form the diaphragm in the silicon film, and (d) resealing the opening (26).








 
 
  Recently Added Patents
Stain-blocking aqueous coating composition
Wireless communication system, wireless communication device, wireless communication method, and program
Rose plant named `Esm R068`
Light emitting diode package and method of fabricating the same
Optimizing federated and ETL'd databases with considerations of specialized data structures within an environment having multidimensional constraint
Pharmaceutical compositions of paclitaxel, paclitaxel analogs or paclitaxel conjugates and related methods of preparation and use
Systems and methods for providing power and data to lighting devices
  Randomly Featured Patents
(1H-imidazol-1-ylmethyl) substituted benzimidazole derivatives and use thereof in treating androgen dependent disorders
Endoluminal cardiac and venous valve prostheses and methods of manufacture and delivery thereof
Fuel cell systems
Instrument for measuring blood pressure and temperature
Solar powered lamp having a cover containing a fresnel lens structure
Process for making silicone emulsions
Bi-directional motor control incorporating a defroster element
Heat transfer tubes and methods of fabrication thereof
Plastic molded pieces having the appearance of a solid metallic piece
Methods of processing and inspecting semiconductor substrates