Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Process for producing a pressure transducer using silicon-on-insulator technology










Image Number 3 for United States Patent #5510276.

A process for producing a pressure transducer or sensor using the silicon-on-insulator method is provided. The process includes the following steps: (a) producing a monocrystalline silicon film (44) on a silicon substrate (6) at least locally separated from the latter by an insulating layer (42), (b) producing an opening (24) in the silicon film down to the insulating layer, (c) partially eliminating the insulating layer via the opening in order to form the diaphragm in the silicon film, and (d) resealing the opening (26).








 
 
  Recently Added Patents
Method and system for generating and displaying an interactive dynamic graph view of multiply connected objects
Monitoring apparatus for monitoring communication configurations of client devices
System and method for storing redundant information
Dynamic allocation of access channels based on access channel occupancy in a cellular wireless communication system
Transmitter and receiver for streaming media including packet padding
Focusing apparatus that effectively sets a focus area of an image when a focusing mode is changed
Method for driving bistable display device
  Randomly Featured Patents
Integrated control for navigation, authentication, power on and rotation
Soybean cultivar 943183632865
Vinylidene fluoride and trifluoroethylene containing polymers
Time out stool
Lens-barrel and camera system having the lens-barrel
Square tissue box cover with dimpled edges
Memory stream buffer with variable-size prefetch depending on memory interleaving configuration
Vortex flow sensor with a drag body
Digital output MEMS pressure sensor and method
Information notification sample processing system and methods of biological slide processing