Resources Contact Us Home
Process for producing a pressure transducer using silicon-on-insulator technology

Image Number 3 for United States Patent #5510276.

A process for producing a pressure transducer or sensor using the silicon-on-insulator method is provided. The process includes the following steps: (a) producing a monocrystalline silicon film (44) on a silicon substrate (6) at least locally separated from the latter by an insulating layer (42), (b) producing an opening (24) in the silicon film down to the insulating layer, (c) partially eliminating the insulating layer via the opening in order to form the diaphragm in the silicon film, and (d) resealing the opening (26).

  Recently Added Patents
Output queued switch with a parallel shared memory, and method of operating same
Monitoring activity of a user in locomotion on foot
Method for isomerisation of hop alpha-acids using heterogeneous alkaline earth metal based catalysts
Techniques for image segment accumulation in document rendering
Routing of data including multimedia between electronic devices
Apparatus and method for weighing an item of mail during transport through a sorting installation and having an anti-vibration device
Apparatus for focus beam analysis of high power lasers
  Randomly Featured Patents
Impression coping platform and related methods
"Don't care" pixel interpolation
Light source, manufacturing method of light source, lighting apparatus, and display apparatus
Blade retention feature for saddle fir tree root blades of turbo machines and method of using same
Fan holder including cable channels
Projection display
Mirror protective composition comprising 2-mercaptothiazoline
Display apparatus for vehicle
Method for detecting hemolysis
Liquid crystal display and method for manufacturing the same