Resources Contact Us Home
Process for producing a pressure transducer using silicon-on-insulator technology

Image Number 3 for United States Patent #5510276.

A process for producing a pressure transducer or sensor using the silicon-on-insulator method is provided. The process includes the following steps: (a) producing a monocrystalline silicon film (44) on a silicon substrate (6) at least locally separated from the latter by an insulating layer (42), (b) producing an opening (24) in the silicon film down to the insulating layer, (c) partially eliminating the insulating layer via the opening in order to form the diaphragm in the silicon film, and (d) resealing the opening (26).

  Recently Added Patents
Synchronization processing circuit and synchronization processing method in wireless communication system
Battery loading and unloading mechanism
Control device for radiation imaging apparatus and control method therefor
Authenticating and off-loading IPTV operations from mobile devices to fixed rendering viewing devices
Light-emitting device
Connector with shielding device and method for manufacturing connector
Tie down strap hook
  Randomly Featured Patents
Start control system for internal combustion engine
Sheet processing apparatus and image forming apparatus having this
Mascara brush
Mechanical fruit picker
Method, system, graphical user interface, and data structure for creating electronic calendar entries from email messages
Electric motor having electrical connecting elements for connection to winding leads
Liquid-liquid contacting apparatus
Axle driving apparatus
Inter-ply adhesion between saran and linear ethylene copolymers
Monoazo red reactive dye compound having a vinylsulfone type fiber reactive group and a substituted triazinyl group