Resources Contact Us Home
Process for producing a pressure transducer using silicon-on-insulator technology

Image Number 3 for United States Patent #5510276.

A process for producing a pressure transducer or sensor using the silicon-on-insulator method is provided. The process includes the following steps: (a) producing a monocrystalline silicon film (44) on a silicon substrate (6) at least locally separated from the latter by an insulating layer (42), (b) producing an opening (24) in the silicon film down to the insulating layer, (c) partially eliminating the insulating layer via the opening in order to form the diaphragm in the silicon film, and (d) resealing the opening (26).

  Recently Added Patents
Wound dressings
Apparatus and method for encoding/decoding signal
Image forming apparatus
Electronic multiparty accounts receivable and accounts payable system
Apparatus and method for scrolling a screen of a portable terminal having a touch screen
Optical scanner and image-forming device
Compositions substantially free of sodium chloride and methods for the storage of red blood cells
  Randomly Featured Patents
Bearing and method of assembling the bearing
Authenticating messages sent between a vehicle and a central facility
Ceramic refractory setter
Process for producing polyether polymer composition, polyether polymer composition, and solid electrolyte film
Memory circuit enchancement to stablize the signal lines with additional capacitance
Non-resealable wet wipe package
Method for locating a geometric detail for determining the spatial position of a wheel rim relative to a measuring instrument and method and device for determining the spatial position of a wh
Drill jig for locating holes to be drilled in a workpiece
Rotary broom
Continuity switch for parts grippers