Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Process for producing a pressure transducer using silicon-on-insulator technology










Image Number 3 for United States Patent #5510276.

A process for producing a pressure transducer or sensor using the silicon-on-insulator method is provided. The process includes the following steps: (a) producing a monocrystalline silicon film (44) on a silicon substrate (6) at least locally separated from the latter by an insulating layer (42), (b) producing an opening (24) in the silicon film down to the insulating layer, (c) partially eliminating the insulating layer via the opening in order to form the diaphragm in the silicon film, and (d) resealing the opening (26).








 
 
  Recently Added Patents
Tuning peg for a stringed instrument
Method for transmitting an electronic short message to multiple receivers
Method for manufacturing thin film transistor and method for manufacturing display device
Method for detecting motion of an electrical device or apparatus
Method and apparatus for accessing and downloading information from the internet
Systems and methods for providing a collaboration place interface including data that is persistent after a client is longer in the collaboration place among a plurality of clients
Circuitry for measuring and compensating phase and amplitude differences in NDT/NDI operation
  Randomly Featured Patents
Top-gate thin-film transistors using nanoparticles and method of manufacturing the same
Measurement of cardiac output and blood volume by non-invasive detection of indicator dilution
Image processing apparatus, image processing method, program, and computer-readable medium
Self-aligned fabrication method for ridge-waveguide semiconductor laser
Method of producing a cis-oxazoline
Column clamp
Teleconferencing bridge with EdgePoint mixing
Pushable golf cart
Method and system for instant biopsy specimen analysis
Electrical switching apparatus