Resources Contact Us Home
Process for producing a pressure transducer using silicon-on-insulator technology

Image Number 3 for United States Patent #5510276.

A process for producing a pressure transducer or sensor using the silicon-on-insulator method is provided. The process includes the following steps: (a) producing a monocrystalline silicon film (44) on a silicon substrate (6) at least locally separated from the latter by an insulating layer (42), (b) producing an opening (24) in the silicon film down to the insulating layer, (c) partially eliminating the insulating layer via the opening in order to form the diaphragm in the silicon film, and (d) resealing the opening (26).

  Recently Added Patents
Data storage device with surface ornamentation
Profile and template based dynamic portable user workflow
Piperazinyl methyl phenyl cyclohexane compound
Soybean cultivar CL1013665
Selective thermal treatment of medical instrument portions with thermal treatment system instrument holder
Device and method for generating soft tissue contrast images
Display screen with an animated graphical user interface
  Randomly Featured Patents
Process for preparing 2-aminobenzothiazoles
Sledge with tiltable runners
Aerosol dispensing device and method
Door mat having an alternating block pattern
Liposomal nanoparticles and other formulations of fenretinide for use in therapy and drug delivery
Pigment system for paper
Apparatus and method for modulating the firing rate of furnace burners
Preparation of ethylene polymers using a Ziegler catalyst system, and ethylene polymers prepared in this manner and having less odor
Multi-beam scanning apparatus
Photomask and method for manufacturing semiconductor device using photomask