Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Process for producing a pressure transducer using silicon-on-insulator technology










Image Number 3 for United States Patent #5510276.

A process for producing a pressure transducer or sensor using the silicon-on-insulator method is provided. The process includes the following steps: (a) producing a monocrystalline silicon film (44) on a silicon substrate (6) at least locally separated from the latter by an insulating layer (42), (b) producing an opening (24) in the silicon film down to the insulating layer, (c) partially eliminating the insulating layer via the opening in order to form the diaphragm in the silicon film, and (d) resealing the opening (26).








 
 
  Recently Added Patents
Apparatus and method for controlling semiconductor die warpage
Nanocatalysts structure, process for the preparation and use thereof
Global alignment for high-dynamic range image generation
Rapid glycopeptide optimization via neoglycosylation
Method of forming micropattern, method of forming damascene metallization, and semiconductor device and semiconductor memory device fabricated using the same
Thermally efficient busway
Systems and methods for optimizing capital structure of a financial institution
  Randomly Featured Patents
Eccentric pawl for chair locking device
Process for manufacturing a multilayer substrate
Aggressive convective drying in a conical screw type mixer/dryer
Shield for a lock or lock box
Press-up slide-out calculator with calendar
Polyamides having a low water absorptivity
Internal pipeline plug for deep subsea pipe-to-pipe pull-in connection operations
Auditing queries using query differentials
Treatment of gases containing sulfur dioxide
Serial access memory with securing of write operations