Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Process for producing a pressure transducer using silicon-on-insulator technology










Image Number 3 for United States Patent #5510276.

A process for producing a pressure transducer or sensor using the silicon-on-insulator method is provided. The process includes the following steps: (a) producing a monocrystalline silicon film (44) on a silicon substrate (6) at least locally separated from the latter by an insulating layer (42), (b) producing an opening (24) in the silicon film down to the insulating layer, (c) partially eliminating the insulating layer via the opening in order to form the diaphragm in the silicon film, and (d) resealing the opening (26).








 
 
  Recently Added Patents
Network fault detection
Stable aqueous composite compositions
Crosslinked core/shell polymer particles
Carbon blacks having low PAH amounts and methods of making same
System and method for providing definitions
Xylitol-based anti-mucosal compositions and related methods and compositions
Positive electrode for secondary battery, and secondary battery
  Randomly Featured Patents
Fluoroscopy apparatus and fluorescence image processing method
Heat exchangers and method of making same
Anti-jack-knifing apparatus
Pair of ergonomic router handles
Interchangeable detachable decorative applique
Pen
Zodiacal betting cloth
Television frequency converter with automatic gain control and output terminal isolation
Controlled information processing apparatus
Alcoholic beverage dispenser