Resources Contact Us Home
Process for producing a pressure transducer using silicon-on-insulator technology

Image Number 3 for United States Patent #5510276.

A process for producing a pressure transducer or sensor using the silicon-on-insulator method is provided. The process includes the following steps: (a) producing a monocrystalline silicon film (44) on a silicon substrate (6) at least locally separated from the latter by an insulating layer (42), (b) producing an opening (24) in the silicon film down to the insulating layer, (c) partially eliminating the insulating layer via the opening in order to form the diaphragm in the silicon film, and (d) resealing the opening (26).

  Recently Added Patents
Products for animal use including humans having a certificate verifying at least one of efficacy or safety, and methods of providing such certificates
System and method for improving text input in a shorthand-on-keyboard interface
Wafer level packaging structure with large contact area and preparation method thereof
Multi-user remote health monitoring system with biometrics support
Method of analyzing cell structures and their components
Storage device having clock adjustment circuitry with firmware-based predictive correction
Method and a channel estimating arrangement for performing channel estimation
  Randomly Featured Patents
Neural network noise anomaly recognition system and method
Pair of wheeled skate-skis with brakes usable on most terrains
Catheters permitting controlled diffusion
Patch-like infusion device
Data processing system capable of dynamically changing the definition parameters of software in response to changes in the number of connected terminals
Methods and devices for providing access through tissue to a surgical site
Conveyor unit for conveying flat objects
System and method for improving head positioning
Banknote store with a rotatable structure having banknote-storing regions
Tool box