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Vacuum change neutralization method

Image Number 3 for United States Patent #5492862.

A vacuum processing method including the steps of generating plasma of a charge neutralizing medium by plasma generating means in a vacuum process chamber, and supplying the charge neutralizing medium in the plasma state to an object during transportion in the vacuum process chamber, thereby neutralizing a charge on the object. With this method, the object can be smoothly transported in a vacuum atmosphere after treatment and adhesion of particles to the object is prevented.

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