Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Target cooling and support for magnetron sputter coating apparatus










Image Number 5 for United States Patent #5409590.

A target of a thickness, which varies across its radius according to the amount of material required to be sputtered, is supported in a nest in a chamber of a sputter coating apparatus. Positioned behind the nest is a rotating magnet carrier having arranged thereon in a closed loop a permanant or electro magnetic strip, but preferably a flexible permanently magnetic material, with portions near the rim of the target and portions near, but not on, the target center about which the magnet rotates. The magnetic loop is transversely polarized with one pole toward the target rim and one toward the target center so that its field will enclose the rim of the target within a magnetic tunnel that traps a plasma over the target. Lumped magnets across the center from the strip support the plasma near the center so as to cause some sputtering at the target center. Other lumped magnets adjacent the strip help sharpen the field so that a desired distribution of sputtering can be achieved. Enclosed in a sealed space behind and in thermal contact with the target nest is the carrier from which the magnets project to facilitate the flow of cooling fluid across the back surface of the nest to cool the target as the carrier rotates.








 
 
  Recently Added Patents
System for encrypting and decrypting a plaintext message with authentication
Disk array apparatus and firmware update method therefor
Display screen of a mobile terminal or portion thereof with a graphical user interface
Technique for manufacturing bit patterned media
Multiplanar image displays and media formatted to provide 3D imagery without 3D glasses
Test framework of visual components in a multitenant database environment
Compositions and methods for producing isoprene
  Randomly Featured Patents
Display device and manufacturing method thereof
Process for the production of polyester silicate resinous products
Recipe cascading in a wafer processing system
Information storage medium and information recording/playback system
Selectively configurable electric motor
Method and apparatus for generating and/or updating an authorization list associated with a telephone subscriber
Process and apparatus for packaging
Dual pendulum display apparatus
Disposable diaper having refastenable tape system
Device for controlling the pressure and delivery of a fuel feed to a servovalve unit