Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Target cooling and support for magnetron sputter coating apparatus










Image Number 5 for United States Patent #5409590.

A target of a thickness, which varies across its radius according to the amount of material required to be sputtered, is supported in a nest in a chamber of a sputter coating apparatus. Positioned behind the nest is a rotating magnet carrier having arranged thereon in a closed loop a permanant or electro magnetic strip, but preferably a flexible permanently magnetic material, with portions near the rim of the target and portions near, but not on, the target center about which the magnet rotates. The magnetic loop is transversely polarized with one pole toward the target rim and one toward the target center so that its field will enclose the rim of the target within a magnetic tunnel that traps a plasma over the target. Lumped magnets across the center from the strip support the plasma near the center so as to cause some sputtering at the target center. Other lumped magnets adjacent the strip help sharpen the field so that a desired distribution of sputtering can be achieved. Enclosed in a sealed space behind and in thermal contact with the target nest is the carrier from which the magnets project to facilitate the flow of cooling fluid across the back surface of the nest to cool the target as the carrier rotates.








 
 
  Recently Added Patents
Physiological measuring system comprising a garment in the form of a sleeve or glove and sensing apparatus incorporated in the garment
Semiconductor device and method of manufacturing the same
Moulded tie strips
Process for producing a plasma protein-containing medicament with reduced concentration of citrate and metals
End to end email monitor
Audio signal clip detection
Image forming apparatus
  Randomly Featured Patents
Production of aminophenols
Fluid sample apparatus featuring integral construction with a motor driven sampling system
Rotor for rotating electrical machine
Human IGM monoclonal antibody capable of inducing apoptosis in HIV-infected cells
Biphenyl derivative useful in the treatment of liver diseases
Dispersant in non-polar solvent
Nozzle cleaning system including coating spray gun cover for can coating system
System and method for identifying documents matching a document metaprint
Method and apparatus for composing images during video communications
Apparatus for sulfatizing roasting of a finely-divided selenium-bearing raw material