Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Target cooling and support for magnetron sputter coating apparatus










Image Number 5 for United States Patent #5409590.

A target of a thickness, which varies across its radius according to the amount of material required to be sputtered, is supported in a nest in a chamber of a sputter coating apparatus. Positioned behind the nest is a rotating magnet carrier having arranged thereon in a closed loop a permanant or electro magnetic strip, but preferably a flexible permanently magnetic material, with portions near the rim of the target and portions near, but not on, the target center about which the magnet rotates. The magnetic loop is transversely polarized with one pole toward the target rim and one toward the target center so that its field will enclose the rim of the target within a magnetic tunnel that traps a plasma over the target. Lumped magnets across the center from the strip support the plasma near the center so as to cause some sputtering at the target center. Other lumped magnets adjacent the strip help sharpen the field so that a desired distribution of sputtering can be achieved. Enclosed in a sealed space behind and in thermal contact with the target nest is the carrier from which the magnets project to facilitate the flow of cooling fluid across the back surface of the nest to cool the target as the carrier rotates.








 
 
  Recently Added Patents
Pressure-sensitive adhesive composition for optical films, pressure-sensitive adhesive optical film and image display
Floribunda rose plant named `KORamflusa`
Location estimation of wireless terminals through pattern matching of deduced signal strengths
Measuring current and resistance using combined diodes/resistor structure to monitor integrated circuit manufacturing process variations
Water bottle warning triangle
System and method for displaying relationships between electronically stored information to provide classification suggestions via inclusion
Continuously variable transmission and control method thereof
  Randomly Featured Patents
3-amidopyrazole derivatives and pharmaceutical compositions containing them
Synchronous replication for system and data security
Method of producing granular metallic soap
Divider with dual modulus prescaler for phase locked loop frequency synthesizer
Ski boot
Surgical scrub brush and cleaner apparatus
Communication receiver with multiplexing of received signal, for receive space diversity
Function liquid filling apparatus, liquid droplet ejection apparatus equipped with the same, method of manufacturing electro-optical device, electro-optical device, and electronic equipment
Mixed vaccine against infections by pseudomonas aeruginosa
Composite aluminum molybdenum sheet