Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Target cooling and support for magnetron sputter coating apparatus










Image Number 5 for United States Patent #5409590.

A target of a thickness, which varies across its radius according to the amount of material required to be sputtered, is supported in a nest in a chamber of a sputter coating apparatus. Positioned behind the nest is a rotating magnet carrier having arranged thereon in a closed loop a permanant or electro magnetic strip, but preferably a flexible permanently magnetic material, with portions near the rim of the target and portions near, but not on, the target center about which the magnet rotates. The magnetic loop is transversely polarized with one pole toward the target rim and one toward the target center so that its field will enclose the rim of the target within a magnetic tunnel that traps a plasma over the target. Lumped magnets across the center from the strip support the plasma near the center so as to cause some sputtering at the target center. Other lumped magnets adjacent the strip help sharpen the field so that a desired distribution of sputtering can be achieved. Enclosed in a sealed space behind and in thermal contact with the target nest is the carrier from which the magnets project to facilitate the flow of cooling fluid across the back surface of the nest to cool the target as the carrier rotates.








 
 
  Recently Added Patents
Programming of DIMM termination resistance values
Method for drug screening and characterization by calcium flux
Fluid conduit with PTC fabric heating
Smooth silicon-containing films
Clock face
Method, device, and system for configuring component carrier in carrier aggregation scenario
Magnetic impedance element and magnetic sensor using the same
  Randomly Featured Patents
Semiconductor flip-chip assembly with pre-applied encapsulating layers
Electronic part utilizing a protective film on a comb-shaped electrode
Brake assembly for skateboard
Seat back air bag deployment system
Square root operation device
Section of a high-voltage system having cooling means and including a conductor
Method for charging data processing apparatus having two separate units
Soybean variety RJS38003
Base handbag with interchangeable handbag cover
Helicopter underside armament mounting apparatus and associated methods