Resources Contact Us Home
Target cooling and support for magnetron sputter coating apparatus

Image Number 5 for United States Patent #5409590.

A target of a thickness, which varies across its radius according to the amount of material required to be sputtered, is supported in a nest in a chamber of a sputter coating apparatus. Positioned behind the nest is a rotating magnet carrier having arranged thereon in a closed loop a permanant or electro magnetic strip, but preferably a flexible permanently magnetic material, with portions near the rim of the target and portions near, but not on, the target center about which the magnet rotates. The magnetic loop is transversely polarized with one pole toward the target rim and one toward the target center so that its field will enclose the rim of the target within a magnetic tunnel that traps a plasma over the target. Lumped magnets across the center from the strip support the plasma near the center so as to cause some sputtering at the target center. Other lumped magnets adjacent the strip help sharpen the field so that a desired distribution of sputtering can be achieved. Enclosed in a sealed space behind and in thermal contact with the target nest is the carrier from which the magnets project to facilitate the flow of cooling fluid across the back surface of the nest to cool the target as the carrier rotates.

  Recently Added Patents
Generator with a segmented stator
Tag-based apparatus and methods for neural networks
Motor control system, motor control device, and brushless motor
Camera with monitor
Address generation unit for accessing a multi-dimensional data structure in a desired pattern
Electronic device assemblies
Polynucleotide capture materials, and methods of using same
  Randomly Featured Patents
Preparation of methylenedi (phenylurethane)
Method and apparatus for environmental sampling
Power equalizer in a multiple wavelength bidirectional lightwave amplifier
Mechanical pencil having a lead detector
Method for auto-ignition operation and computer readable storage device
Quick-connection coupling
Allergy inhibition
System and method for marking sheet materials
Method and device for assistance in piloting an aerodyne by the graphic representation of the vertical flight plan of this aerodyne