Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Target cooling and support for magnetron sputter coating apparatus










Image Number 5 for United States Patent #5409590.

A target of a thickness, which varies across its radius according to the amount of material required to be sputtered, is supported in a nest in a chamber of a sputter coating apparatus. Positioned behind the nest is a rotating magnet carrier having arranged thereon in a closed loop a permanant or electro magnetic strip, but preferably a flexible permanently magnetic material, with portions near the rim of the target and portions near, but not on, the target center about which the magnet rotates. The magnetic loop is transversely polarized with one pole toward the target rim and one toward the target center so that its field will enclose the rim of the target within a magnetic tunnel that traps a plasma over the target. Lumped magnets across the center from the strip support the plasma near the center so as to cause some sputtering at the target center. Other lumped magnets adjacent the strip help sharpen the field so that a desired distribution of sputtering can be achieved. Enclosed in a sealed space behind and in thermal contact with the target nest is the carrier from which the magnets project to facilitate the flow of cooling fluid across the back surface of the nest to cool the target as the carrier rotates.








 
 
  Recently Added Patents
Nanogap device for field enhancement and a system for nanoparticle detection using the same
Method for making an abrasion-resistant steel plate and plate obtained
Local access to data while roaming with a mobile telephony device
Erasing a non-volatile memory (NVM) system having error correction code (ECC)
Network-based dynamic encoding
Wireless device and communication control method
Halogen-free flame retardants for epoxy resin systems
  Randomly Featured Patents
2'-Benzothiazolyl-and 2'-benzoxazolyl-2-benzimidazoles
Method and apparatus for controlling active front steering
Method and system for regulation and/or control of an automobile chassis
Picture data printing apparatus and print picture data generating apparatus
Media device
Fluorescent image obtaining apparatus
Optical apparatus for an optoelectronic sensor
Electrical connector having thick film layers
Printed circuit board suppressing ringing in signal waveforms
Communication node, and token issuing method and token-ring communication method in ring communication system