Resources Contact Us Home
Method for fabricating a thin film capacitor

Image Number 7 for United States Patent #5366920.

A thin film capacitor which comprises a lower electrode, a dielectric film and an upper electrode is fabricated on a substrate. The lower electrode is not provided by etching process using a photoresist mask, but it is provided by providing an aperture thorough an insulating layer deposited on the substrate, and depositing a conductive film on the bottom of the aperture and connected to a lower interconnection provided on the bottom of the aperture. Consequently, no convex protrusion is found at the processed edge of the lower electrode.

  Recently Added Patents
Solid-state image capture device and image capture apparatus
Support for a parameterized query/view in complex event processing
Charge pump circuit and power-supply method for dynamically adjusting output voltage
Fabrication method of semiconductor device and fabrication method of dynamic threshold transistor
Transducer displacement protection
Magnetic resonance imaging apparatus
MEMS autofocus actuator
  Randomly Featured Patents
Attachable flashing light band
Fetal lung maturation tester
Rotational switching apparatus with separately driven stitching head
Southern highbush blueberry plant named `Suziblue`
Fastening device
Compounds and methods
Solvent free quaternization of tertiary amines with dimethylsulfate
Vacuum insulated switchgear
Selective aromatics disproportionation process
Toy vehicle