Resources Contact Us Home
Method for fabricating a thin film capacitor

Image Number 7 for United States Patent #5366920.

A thin film capacitor which comprises a lower electrode, a dielectric film and an upper electrode is fabricated on a substrate. The lower electrode is not provided by etching process using a photoresist mask, but it is provided by providing an aperture thorough an insulating layer deposited on the substrate, and depositing a conductive film on the bottom of the aperture and connected to a lower interconnection provided on the bottom of the aperture. Consequently, no convex protrusion is found at the processed edge of the lower electrode.

  Recently Added Patents
Data distribution unit for vehicle entertainment system
Antenna tuning on an impedance trajectory
Fluorescent dyes, fluorescent dye kits, and methods of preparing labeled molecules
Compounds and compositions for treating chemical warfare agent-induced injuries
Motor with power-generation coil module
Substituted thiophene pentamers
  Randomly Featured Patents
Apparatus for denaturing food products not intended for human consumption
Optical waveguide module having a waveguide affixed thereto at a first bonding strength and optical fibers affixed thereto at a second bonding strength
Mold oscillator for continuous casting apparatus
Molten glass dropping nozzle, molded glass product manufacturing method and molded glass product manufacturing apparatus
Two wheel lapping machine
Method for the electro-optical reproduction of half-tone pictures
Filter for purifying hydrogen and method for manufacture thereof
Swashplate assembly for a swashplate type hydraulic pressure device
Perfected hinge
Butenolide synthesis via carbonylation of vinylmercurials in the presence of inorganic salts