Resources Contact Us Home
Method for fabricating a thin film capacitor

Image Number 7 for United States Patent #5366920.

A thin film capacitor which comprises a lower electrode, a dielectric film and an upper electrode is fabricated on a substrate. The lower electrode is not provided by etching process using a photoresist mask, but it is provided by providing an aperture thorough an insulating layer deposited on the substrate, and depositing a conductive film on the bottom of the aperture and connected to a lower interconnection provided on the bottom of the aperture. Consequently, no convex protrusion is found at the processed edge of the lower electrode.

  Recently Added Patents
Avoiding conflict in update in distributed environment employing multiple clients
Print control server, print controlling method, and print control program
Memory system with data line switching scheme
Compounds, compositions and methods for reducing lipid levels
Floor relief for dot improvement
Surface-emitting laser light source using two-dimensional photonic crystal
Toothbrush holder
  Randomly Featured Patents
Latch assembly
Cosmetic compositions containing block copolymers, tackifiers and a selective solvent for soft blocks
Tool deployment apparatus
Microcode-driven programmable receive power levels in an optical transceiver
Apparatus and method of switching a voice codec of mobile terminal
Printing device with patterned recording surface
Fluid containers
Insert for a shoe sole
Precision lid fit filling machine
Method and apparatus for document matching