Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for fabricating a thin film capacitor










Image Number 7 for United States Patent #5366920.

A thin film capacitor which comprises a lower electrode, a dielectric film and an upper electrode is fabricated on a substrate. The lower electrode is not provided by etching process using a photoresist mask, but it is provided by providing an aperture thorough an insulating layer deposited on the substrate, and depositing a conductive film on the bottom of the aperture and connected to a lower interconnection provided on the bottom of the aperture. Consequently, no convex protrusion is found at the processed edge of the lower electrode.








 
 
  Recently Added Patents
Integrating map-reduce into a distributed relational database
Multi-layer, microporous polyolefin membrane, its production method, battery separator and battery
Products for animal use including humans having a certificate verifying at least one of efficacy or safety, and methods of providing such certificates
Call admission control method and system
Sink
Optical scanner and image-forming device
Image forming apparatus having a primary transfer unit, a secondary transfer unit, and a direct transfer unit
  Randomly Featured Patents
Method of separating sulfuric acid from neutral sodium sulfate in spent chlorine dioxide generator liquor
Semiconductor workpiece carriers and methods for processing semiconductor workpieces
Encoder
Laser rotating and irradiating system
Storage system and storage control device
Valve-regulated lead-acid battery
Rheology-modified polyolefins
Multi clock deciding system
Process of preparing mozzarella cheese for shipment or storage
Low pressure actuator