Resources Contact Us Home
Method for fabricating a thin film capacitor

Image Number 7 for United States Patent #5366920.

A thin film capacitor which comprises a lower electrode, a dielectric film and an upper electrode is fabricated on a substrate. The lower electrode is not provided by etching process using a photoresist mask, but it is provided by providing an aperture thorough an insulating layer deposited on the substrate, and depositing a conductive film on the bottom of the aperture and connected to a lower interconnection provided on the bottom of the aperture. Consequently, no convex protrusion is found at the processed edge of the lower electrode.

  Recently Added Patents
Method of controlling an indentation depth of an electrode into a metal substrate during welding
Therapeutic rinse in a self-heating package
Cell transport system comprising a homogeneous mixture of agarose and agarase
Moving picture decoding device and moving picture decoding method
Data processing circuit with arbitration between a plurality of queues
Round carrying case
Method and apparatus for variable accuracy inter-picture timing specification for digital video encoding
  Randomly Featured Patents
Integrated circuit memory devices including active load circuits and related methods
Optical recording medium
Optical recording medium, information recording method, and information reproducing method
Electrical connector with insert member retaining means
Key matrix of a telephone handset
Adhesives and sealants
Trench fet with self aligned source and contact
Moderate depth underwater surveillance system
Steam generator for liquid metal fast breeder reactor
Bus window release mechanism