Resources Contact Us Home
Method for fabricating a thin film capacitor

Image Number 7 for United States Patent #5366920.

A thin film capacitor which comprises a lower electrode, a dielectric film and an upper electrode is fabricated on a substrate. The lower electrode is not provided by etching process using a photoresist mask, but it is provided by providing an aperture thorough an insulating layer deposited on the substrate, and depositing a conductive film on the bottom of the aperture and connected to a lower interconnection provided on the bottom of the aperture. Consequently, no convex protrusion is found at the processed edge of the lower electrode.

  Recently Added Patents
Apparatus for counting particles in a gas
Transmission device
Polymeric structures comprising a siloxane
Image forming apparatus
System and method for providing radio communication in a land mobile radio system
Center spreader adapter tool for toilet paper rolls and paper towel rolls that do not have inner cardboard tubes
Isothermal amplification of DNA
  Randomly Featured Patents
Method for verifying timing of a multi-phase, multi-frequency and multi-cycle circuit
Method of setting region to be subjected to red eye correction and red eye correcting method
Cleaning articles comprising a cellulosic fibrous structure having discrete basis weight regions treated with a high internal phase inverse emulsion
Infant bed and apnea alarm
Polymeric hydrogenation catalysts, the production thereof and their use to promote hydrogenation
Method of identifying inhibitors of Tie-2
Process for the production of liquid hydrocarbons
Solid state lighting apparatus
Preparation of highly based magnesium sulfonate
Polymerization of hexafluoropropene oxide