Resources Contact Us Home
Micro-miniature structures and method of fabrication thereof

Image Number 5 for United States Patent #5364742.

In the fabrication of a free-standing miniaturized structure in a range of about 10 to 20 .mu.m thick, a method based on a sacrificial system includes the steps of selecting a substrate material, depositing on the substrate material a sacrificial layer of material and patterning the sacrificial layer to define a shape. A photoresist layer of material is deposited on the sacrificial layer and patterned by contrast-enhanced photolithography to form a photoresist mold. Upon the mold there is plated a metallic layer of material. The electroplated structure conforms to the resist profile and can have a thickness many times that of conventional polysilicon microstructures. The photoresist mold and the sacrificial layer are thereafter dissolved using etchants to form a free standing metallic structure in a range of about 10 to 20 .mu.m thick, with vertical to lateral aspect ratios of 9:1 to 10:1 or more.

  Recently Added Patents
Liquid-filled protein-phosphatidic acid capsule dispersions
Electrical event detection device and method of detecting and classifying electrical power usage
Image reading apparatus and image forming apparatus
Inkjet ink
Apparatus for transmitting and receiving data in a wireless communication system and method thereof
Neurophysiological central auditory processing evaluation system and method
Sampling switch circuit that uses correlated level shifting
  Randomly Featured Patents
Reflection-type overhead projector
System and method for analysis of test pattern image data in an inkjet printer using a template
Method and system for training a text-to-speech synthesis system using a domain-specific speech database
Defect detection system for lumber
Housing for a communication device
Mullion connection system
Nucleoside aryl phosphoramidates and their use as anti-viral agents for the treatment of hepatitis C virus
Transistor structure with thick recessed source/drain structures and fabrication process of same
Combination patellar bandage and knee brace
Silyl-alkyn-en-ylamine derivatives