Resources Contact Us Home
Micro-miniature structures and method of fabrication thereof

Image Number 5 for United States Patent #5364742.

In the fabrication of a free-standing miniaturized structure in a range of about 10 to 20 .mu.m thick, a method based on a sacrificial system includes the steps of selecting a substrate material, depositing on the substrate material a sacrificial layer of material and patterning the sacrificial layer to define a shape. A photoresist layer of material is deposited on the sacrificial layer and patterned by contrast-enhanced photolithography to form a photoresist mold. Upon the mold there is plated a metallic layer of material. The electroplated structure conforms to the resist profile and can have a thickness many times that of conventional polysilicon microstructures. The photoresist mold and the sacrificial layer are thereafter dissolved using etchants to form a free standing metallic structure in a range of about 10 to 20 .mu.m thick, with vertical to lateral aspect ratios of 9:1 to 10:1 or more.

  Recently Added Patents
Liquid crystal display device
Method and apparatus for monitoring for a radio link failure
Woven mesh substrate with semiconductor elements, and method and device for manufacturing the same
Method of transmitting and receiving a paging message in a mobile communication system
Antenna for an automobile
Method of creating animatable digital clone from multi-view images
Repeating frame battery with joining of cell tabs via welded-on male and female slip-fit connectors
  Randomly Featured Patents
Direct current voltage regulating circuitry
Emulation of single line display with multi-line display driver
Vehicle computer system audio entertainment system
Method for generating modem transmission signals with quadrature amplitude modulation
Laminated metallic plates for supporting core leg in inductive electrical devices to determine magnetic circuit
Lightweight metal joint for concrete surfaces
Hybrid color printing machine
Generating a combined video stream from multiple input video streams
Computational method, system, and apparatus
Anti-ulcer urea compounds