Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Micro-miniature structures and method of fabrication thereof










Image Number 5 for United States Patent #5364742.

In the fabrication of a free-standing miniaturized structure in a range of about 10 to 20 .mu.m thick, a method based on a sacrificial system includes the steps of selecting a substrate material, depositing on the substrate material a sacrificial layer of material and patterning the sacrificial layer to define a shape. A photoresist layer of material is deposited on the sacrificial layer and patterned by contrast-enhanced photolithography to form a photoresist mold. Upon the mold there is plated a metallic layer of material. The electroplated structure conforms to the resist profile and can have a thickness many times that of conventional polysilicon microstructures. The photoresist mold and the sacrificial layer are thereafter dissolved using etchants to form a free standing metallic structure in a range of about 10 to 20 .mu.m thick, with vertical to lateral aspect ratios of 9:1 to 10:1 or more.








 
 
  Recently Added Patents
Formwork release composition and use thereof
Dehumidifier
Deadline-driven parallel execution of queries
Nuclear reactor building and construction method thereof
Bezel-less electronic display
Engineered magnetic layer with improved perpendicular anisotropy using glassing agents for spintronic applications
Electronic system auto-mute control circuit and control method thereof
  Randomly Featured Patents
Semiconductor device and method for fabricating same
Noise pulse suppressing system
Phenyl-[1,2,4]-oxadiazol-5-one derivatives, pharmaceutical compositions and therapeutic use thereof
Biaxially stretched polyparaphenylene sulfide film
Systems and methods for person's verification using portrait photographs taken by a verifier-controlled digital camera
Method and composition for antiviral therapy
Methods and compositions relating to CD39-like polypeptides and nucleic acids
Expanded metal filter support structure
Suspended hot air balloon oil lamp
Method for secure device discovery and introduction