Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Micro-miniature structures and method of fabrication thereof










Image Number 5 for United States Patent #5364742.

In the fabrication of a free-standing miniaturized structure in a range of about 10 to 20 .mu.m thick, a method based on a sacrificial system includes the steps of selecting a substrate material, depositing on the substrate material a sacrificial layer of material and patterning the sacrificial layer to define a shape. A photoresist layer of material is deposited on the sacrificial layer and patterned by contrast-enhanced photolithography to form a photoresist mold. Upon the mold there is plated a metallic layer of material. The electroplated structure conforms to the resist profile and can have a thickness many times that of conventional polysilicon microstructures. The photoresist mold and the sacrificial layer are thereafter dissolved using etchants to form a free standing metallic structure in a range of about 10 to 20 .mu.m thick, with vertical to lateral aspect ratios of 9:1 to 10:1 or more.








 
 
  Recently Added Patents
Method and apparatus for disease diagnosis and screening using extremely low frequency electromagnetic fields
Automated hotfix handling model
Method for controlling a motor
Battery terminal with current sensor
System and method of creating and providing SMS http tagging
Universal handle extension for unloading butterfly valve for tank trailer or other vehicle
Method for producing a flexible composite elastomeric polyurethane skin
  Randomly Featured Patents
Display device
Methods for remote characterization of an odor
Subscription broadcast security system
Front derailleur for bicycles or similar vehicles
Apparatus for performing a Hadamard transformation
Apparatus and method for the positive and convenient correlation of the identity of the donor of a gift with the gift
Vibrator
Methods and apparatuses for endoscopic retrograde cholangiopancreatography
Highly active supported catalyst compositions
Flameproofed impact-strength-modified poly(ester)carbonate compositions