Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Micro-miniature structures and method of fabrication thereof










Image Number 5 for United States Patent #5364742.

In the fabrication of a free-standing miniaturized structure in a range of about 10 to 20 .mu.m thick, a method based on a sacrificial system includes the steps of selecting a substrate material, depositing on the substrate material a sacrificial layer of material and patterning the sacrificial layer to define a shape. A photoresist layer of material is deposited on the sacrificial layer and patterned by contrast-enhanced photolithography to form a photoresist mold. Upon the mold there is plated a metallic layer of material. The electroplated structure conforms to the resist profile and can have a thickness many times that of conventional polysilicon microstructures. The photoresist mold and the sacrificial layer are thereafter dissolved using etchants to form a free standing metallic structure in a range of about 10 to 20 .mu.m thick, with vertical to lateral aspect ratios of 9:1 to 10:1 or more.








 
 
  Recently Added Patents
Fuel injector provided with a metering servovalve of a balanced type for an internal-combustion engine
Boot attachment for motorcycle shifting
Downstream interface ports for connecting to USB capable devices
Stenciled layer peeling graphics processing
Digital watermarks
Gamut clipping with preprocessing
Methods to characterize sag in fluids
  Randomly Featured Patents
Reclining angle adjustment device
Printed wiring board
Cord lock
Tire cord
Electron microscope with electron spectrometer
Molybdenum powder mixture for TZM
Bikini woman on a bottle
Bipod for firearms
Sleeve valve for a pulsed gas generator
Method for the pneumatic injection of metered quantities of powdered substances into a chamber at a variable pressure