Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Contact manufacturing method of a multi-layered metal line structure










Image Number 4 for United States Patent #5354713.

The present invention relates to a manufacturing method of a contact of a multi-layered metal line of a highly integrated semiconductor device.The insulating layer between the metal lines is flattened and step coverage is improved by using a SOG layer or polyimide.








 
 
  Recently Added Patents
Organic light emitting diode display
Paper comprising PIPD floc and process for making the same
Apparatus, and associated method, for facilitating control of control signaling performed by a mobile node operable in a radio communication system
Dental treatment instrument
Presenting and controlling wagering game marketing information
.alpha.-Aminoamide derivatives useful in the treatment of restless legs syndrome
Discharge apparatus comprising rotating device
  Randomly Featured Patents
Framing for a window of a motor vehicle passenger compartment, and a motor vehicle door including such framing
Optical shock sensor
Apparatus and method for multimedia communication
Pneumatic door-closer having a closable passage and a regulatable passage
Method and apparatus for selectively sealing and pouring liquid from a container
Liquid crystal display device
Vacuum material conveying apparatus
Creping adhesive utilizing polymer-polymer complex formation
Correcting defective pixels in digital color images
Apparatus for heat treating substrates