Resources Contact Us Home
Method for interconnecting layers in a semiconductor device using two etching gases

Image Number 2 for United States Patent #5234864.

A method for interconnecting layers in a semiconductor device is disclosed. The device includes a lower conductive layer formed by capping a second conductive layer on a first conductive layer, a contact window formed in an inter-insulating layer on the lower conductive layer, and an upper conductive layer connected to the lower conductive layer through the contact window. The contact window is formed by removing a portion of the inter-insulating layer where the contact will be formed using a first etching gas, and removing a portion of the second conductive layer where the contact will be formed using a second etching gas. The contact resistance becomes uniform by preventing the formation of a non-volatile mixture in the contact window, and the reliability of the device is improved by planarizing the surface of the lower conductive layer.

  Recently Added Patents
Cryptographically generated addresses using backward key chain for secure route optimization in mobile internet protocol
System for determining movement properties of a guided vehicle
Scoring records for sorting by user-specific weights based on relative importance
Monitoring apparatus for monitoring communication configurations of client devices
Method and apparatus for a battery docking connector having reserve power for hot battery swap
Apparatus and method for efficient transmission of acknowledgements
Method and apparatus for managing network traffic
  Randomly Featured Patents
Data communication apparatus
Motor vehicle door lock or the like
Cooled gas turbine blade
Sensor system
Missile fire-control system and method
Method for using antibodies for inhibiting blood coagulation
Arrangement for transferring sheet metal parts in a press installation
Preserving agent, method and container for preserving fresh marine product
Methods and materials for conducting heat from electronic components and the like
Cabinet handle