Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for interconnecting layers in a semiconductor device using two etching gases










Image Number 2 for United States Patent #5234864.

A method for interconnecting layers in a semiconductor device is disclosed. The device includes a lower conductive layer formed by capping a second conductive layer on a first conductive layer, a contact window formed in an inter-insulating layer on the lower conductive layer, and an upper conductive layer connected to the lower conductive layer through the contact window. The contact window is formed by removing a portion of the inter-insulating layer where the contact will be formed using a first etching gas, and removing a portion of the second conductive layer where the contact will be formed using a second etching gas. The contact resistance becomes uniform by preventing the formation of a non-volatile mixture in the contact window, and the reliability of the device is improved by planarizing the surface of the lower conductive layer.








 
 
  Recently Added Patents
System and method for handling image data transfer in a display driver
Methods and apparatuses for use in identifying wireless transmitting devices for use in estimating a location of a mobile device
Recording medium, playback device, integrated circuit
System and method for data scrambling to reduce the crest factor in an OFDM waveform
Transaction history with bounded operation sequences
Luminance adjusted face detection
Dynamic playbook: experimentation platform for social networks
  Randomly Featured Patents
Method for controlling a hydrocarbons production well of the gushing type
Semiconductor device having one-chip microcomputer and over-voltage application testing method
Brake system in buggy
Wind chime
Bis mono-and bicyclic aryl and heteroaryl compounds which inhibit EGF and/or PDGF receptor tyrosine kinase
Apparatus for manufacturing management using a wireless device
Clock and data recovery circuits using random edge sampling and recovery method therefor
Alarm collection apparatus of central maintenance operation center
Apparatus for producing disintegrated material, preferably pulp
Surface mounting connector