Resources Contact Us Home
Method for interconnecting layers in a semiconductor device using two etching gases

Image Number 2 for United States Patent #5234864.

A method for interconnecting layers in a semiconductor device is disclosed. The device includes a lower conductive layer formed by capping a second conductive layer on a first conductive layer, a contact window formed in an inter-insulating layer on the lower conductive layer, and an upper conductive layer connected to the lower conductive layer through the contact window. The contact window is formed by removing a portion of the inter-insulating layer where the contact will be formed using a first etching gas, and removing a portion of the second conductive layer where the contact will be formed using a second etching gas. The contact resistance becomes uniform by preventing the formation of a non-volatile mixture in the contact window, and the reliability of the device is improved by planarizing the surface of the lower conductive layer.

  Recently Added Patents
Signal processing apparatus and methods
Controlling a video window position relative to a video camera position
Antimicrobial flush solutions
Wound dressings
System and method for interactive image-based modeling of curved surfaces using single-view and multi-view feature curves
Hydrostatic pad pressure modulation in a simultaneous double side wafer grinder
Real ear measurement system using thin tube
  Randomly Featured Patents
Well drilling method and drilling fluid
Arrangement for controlling an injection process of a die casting machine
Agent system, information providing method , information providing apparatus , and data recording medium
Gastric retained gabapentin dosage form
Adjustable assembly line and shipping container for electronic board components
Polymerization process using metallocene complexes in the catalyst system
System for and method of taking image based on objective body in a taken image
Dispensing cap
Multiplayer peer-to-peer connection across firewalls and network address translators using a single local port on the local host
Imaging self-referencing tracker and associated methodology