Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for interconnecting layers in a semiconductor device using two etching gases










Image Number 2 for United States Patent #5234864.

A method for interconnecting layers in a semiconductor device is disclosed. The device includes a lower conductive layer formed by capping a second conductive layer on a first conductive layer, a contact window formed in an inter-insulating layer on the lower conductive layer, and an upper conductive layer connected to the lower conductive layer through the contact window. The contact window is formed by removing a portion of the inter-insulating layer where the contact will be formed using a first etching gas, and removing a portion of the second conductive layer where the contact will be formed using a second etching gas. The contact resistance becomes uniform by preventing the formation of a non-volatile mixture in the contact window, and the reliability of the device is improved by planarizing the surface of the lower conductive layer.








 
 
  Recently Added Patents
Data distribution unit for vehicle entertainment system
Binder for secondary battery providing excellent adhesion strength and cycle property
Processing financial documents
Sericin cationic nanoparticles for application in products for hair and dyed hair
Battery module
Randomly accessible visual information recording medium and recording method, and reproducing device and reproducing method
Bad column management with bit information in non-volatile memory systems
  Randomly Featured Patents
Razor blade and method of manufacture
Electric motor assembly with braking arrangement
Multi-cooker
Method and device to monitor integrated temperature in a heat cycle process
Steering apparatus, automotive vehicle with the same, and steering control method
Die for a press brake and method for producing the same
Method and system for recording transformed images
Gas-fired aluminum melter having recirculating molten salt bath and process
Shower head
Method for a controlled supply of lubricant to an antifriction bearing