Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for improving planarity of chemical-mechanical planarization operations










Image Number 3 for United States Patent #5232875.

A method and apparatus for improving planarity of chemical mechanical planarization of semiconductor wafers. The wafer is affixed to the planar surface of a wafer carrier. A planar platen, on which is mounted a polishing pad, is moved about in a plane parallel to the pad surface with either an orbital, fixed-direction vibratory, or random-direction vibratory motion. In one embodiment of the invention, pressure between the surface of the wafer to be polished and the moving polishing pad is generated by the force of gravity acting on at least the wafer and the carrier; in another it is provided by a mechanical force applied normal to the wafer surface. The polishing pad is wetted with a slurry having abrasive particles suspended in a liquid which may be chemically reactive with respect to at least one material on the wafer.








 
 
  Recently Added Patents
Trimming circuit and semiconductor device
System and method for enhanced artificial bandwidth expansion
Assigning runtime artifacts to software components
Reception method and reception apparatus
Topical antibiotic composition for the prevention of Lyme disease
Semiconductor fin device and method for forming the same using high tilt angle implant
Reducing energy and increasing speed by an instruction substituting subsequent instructions with specific function instruction
  Randomly Featured Patents
Correlation device and method for different modulated signals
Smoke detectors
Collector with fastening devices for fastening mirror shells
Process and an apparatus for dressing seed
Combination tubing cutter and releasing overshot
Washing apparatus for walls and other non-horizontal surfaces
Porous material and production process thereof
System and method for dynamic flexible marketing based on system utilization
Data cartridge holder operable with a data cartridge library system
Single-site catalysts containing chelating N-oxide ligands