Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for improving planarity of chemical-mechanical planarization operations










Image Number 3 for United States Patent #5232875.

A method and apparatus for improving planarity of chemical mechanical planarization of semiconductor wafers. The wafer is affixed to the planar surface of a wafer carrier. A planar platen, on which is mounted a polishing pad, is moved about in a plane parallel to the pad surface with either an orbital, fixed-direction vibratory, or random-direction vibratory motion. In one embodiment of the invention, pressure between the surface of the wafer to be polished and the moving polishing pad is generated by the force of gravity acting on at least the wafer and the carrier; in another it is provided by a mechanical force applied normal to the wafer surface. The polishing pad is wetted with a slurry having abrasive particles suspended in a liquid which may be chemically reactive with respect to at least one material on the wafer.








 
 
  Recently Added Patents
Method for automatically estimating inertia in a mechanical system
Electronic device
Undercabinet plug-in mount
Warm air generating apparatus, sheet feeding apparatus, and image forming apparatus including warm air generating apparatus and sheet feeding apparatus
LED lamp including heat dissipator
Method of manufacturing nitride semiconductor and nitride semiconductor element
Audio conversation apparatus
  Randomly Featured Patents
Display apparatus, layout method for a display apparatus and an electronic apparatus
Inducing hypothermia and rewarming using a helium-oxygen mixture
Packaging for multiple media discs and methods for making same
Method for manufacturing semiconductor devices having dual damascene structure
Apparatus for reducing electronic wave by using electronic wave as energy source
Method and apparatus for detecting photoacoustic signal to detect surface and subsurface information of the specimen
Rapid thermal heating apparatus and method utilizing plurality of light pipes
System for partitioning a massively parallel computer
Topical therapy for migraine
Tamper-resistant food container package