Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for improving planarity of chemical-mechanical planarization operations










Image Number 3 for United States Patent #5232875.

A method and apparatus for improving planarity of chemical mechanical planarization of semiconductor wafers. The wafer is affixed to the planar surface of a wafer carrier. A planar platen, on which is mounted a polishing pad, is moved about in a plane parallel to the pad surface with either an orbital, fixed-direction vibratory, or random-direction vibratory motion. In one embodiment of the invention, pressure between the surface of the wafer to be polished and the moving polishing pad is generated by the force of gravity acting on at least the wafer and the carrier; in another it is provided by a mechanical force applied normal to the wafer surface. The polishing pad is wetted with a slurry having abrasive particles suspended in a liquid which may be chemically reactive with respect to at least one material on the wafer.








 
 
  Recently Added Patents
Fishing apparatus
Vanadium, cobalt and strontium additives for use in aluminum back solar cell contacts
Nonvolatile semiconductor storage device having conductive and insulative charge storage films
Real-time application of filters based on image attributes
Control system for shifting an automatic transmission
Method and system for reduction of quantization-induced block-discontinuities and general purpose audio codec
Modulators of cystic fibrosis transmembrane conductance regulator
  Randomly Featured Patents
Single-ended optical fiber strain sensor for measuring maximum strain
Monitor/television receiver
Ceiling fan blade iron
Electronic article security system for store which uses intelligent security tags and transaction data
Chassis skirt system of a truck vehicle
Face mask strap system
Bioactive composite material for repair of hard and soft tissues
Back focused anti-scatter grid
Bearing spring plate pedestal
Data-mismatch resolving apparatus, data-mismatch resolving method, and computer product