Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for improving planarity of chemical-mechanical planarization operations










Image Number 3 for United States Patent #5232875.

A method and apparatus for improving planarity of chemical mechanical planarization of semiconductor wafers. The wafer is affixed to the planar surface of a wafer carrier. A planar platen, on which is mounted a polishing pad, is moved about in a plane parallel to the pad surface with either an orbital, fixed-direction vibratory, or random-direction vibratory motion. In one embodiment of the invention, pressure between the surface of the wafer to be polished and the moving polishing pad is generated by the force of gravity acting on at least the wafer and the carrier; in another it is provided by a mechanical force applied normal to the wafer surface. The polishing pad is wetted with a slurry having abrasive particles suspended in a liquid which may be chemically reactive with respect to at least one material on the wafer.








 
 
  Recently Added Patents
Arbitration circuit to arbitrate conflict between read/write command and scan command and display driver integrated circuit having the same
Methods and systems for delivering customized advertisements
Power transmission control device for vehicle
Gaming machine certificate creation and management
Image processing apparatus and image processing method
Systems and methods for economic retirement analysis
Side portion of a circular saw blade
  Randomly Featured Patents
Memory device which comprises a multi-layer capacitor
Testing set up and hold input timing parameters of high speed integrated circuit devices
Easily sievable powder coating composition
Athermal optical bench
Cargo strap
Vapor deposition method for simultaneously growing an epitaxial silicon layer and a polycrystalline silicone layer over a selectively oxidized silicon substrate
Method for extracting data from a relational database using a reduced query
Lint remover
Communication apparatus
Methods and apparatus for service and network management event correlation