Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for improving planarity of chemical-mechanical planarization operations










Image Number 3 for United States Patent #5232875.

A method and apparatus for improving planarity of chemical mechanical planarization of semiconductor wafers. The wafer is affixed to the planar surface of a wafer carrier. A planar platen, on which is mounted a polishing pad, is moved about in a plane parallel to the pad surface with either an orbital, fixed-direction vibratory, or random-direction vibratory motion. In one embodiment of the invention, pressure between the surface of the wafer to be polished and the moving polishing pad is generated by the force of gravity acting on at least the wafer and the carrier; in another it is provided by a mechanical force applied normal to the wafer surface. The polishing pad is wetted with a slurry having abrasive particles suspended in a liquid which may be chemically reactive with respect to at least one material on the wafer.








 
 
  Recently Added Patents
Method and system for automatically measuring and forecasting the demographic characterization of customers to help customize programming contents in a media network
Wireless sensor with analog detector
Adapting one type of encoder to another type of encoder
Electronic mail delay adaptation
Vehicle front fascia
Parallel decoding for scalable video coding
Collimator
  Randomly Featured Patents
Image capture apparatus for encrypting image data using a first encryption method or a second encryption method based on an instruction
Process for bidirectional transmission of data
Apparatus and method for automated inventory tracking and authentication
Method of and device for milking a dairy animal dependent on the lactation periods
Tape winder and method of processing tape
Toy balloon seal with tether
Apparatus for varying the position of a printing operation performed on a web
Heat exchanger package with split radiator and split charge air cooler
Service providing system, information processing apparatus and method, recording medium and program
UV-activated dielectric layer