Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Diffusion barrier for copper features










Image Number 3 for United States Patent #5164332.

A diffusion barrier which reduces the diffusion of a copper feature into an oxygen containing polymer is provided by a copper metal alloy. The diffusion barrier is fabricated by coating a metal on a copper feature, heating the metal and copper feature to form an alloy of the copper feature and the metal, etching the non-alloyed metal which covers the alloy, and depositing an oxygen containing polymer on the alloy. Preferably the metal is aluminum and a copper aluminum alloy diffusion barrier is at least 300 angstroms thick and contains at least 8 percent aluminum on the surface in contact with the polymer.








 
 
  Recently Added Patents
Antenna for an automobile
Medicament container
Gate timing for short servo wedge in disk memory systems
Synergistic preparations based on mixtures of glycerol ether with aromatic alcohol for controlling mycobacteria
Mode detection for DVB receiver
Scalable header extension
Formwork release composition and use thereof
  Randomly Featured Patents
Buoy releasable from a submarine
Spectral volume microprobe arrays
Cyanate esters having flame resistant properties
Pyrrolotriazine derivatives having spla2-inhibitory activities
Transmission belt
Virtualized data storage vaults on a dispersed data storage network
Safety device for a nuclear reactor and especially a fast reactor
Multi-node encryption and key delivery
Method and system for scheduling users based on user-determined ranks in a MIMO system
Transportation planning with drop trailer arrangements