Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Diffusion barrier for copper features










Image Number 2 for United States Patent #5164332.

A diffusion barrier which reduces the diffusion of a copper feature into an oxygen containing polymer is provided by a copper metal alloy. The diffusion barrier is fabricated by coating a metal on a copper feature, heating the metal and copper feature to form an alloy of the copper feature and the metal, etching the non-alloyed metal which covers the alloy, and depositing an oxygen containing polymer on the alloy. Preferably the metal is aluminum and a copper aluminum alloy diffusion barrier is at least 300 angstroms thick and contains at least 8 percent aluminum on the surface in contact with the polymer.








 
 
  Recently Added Patents
Process for producing liquid crystal element, and liquid crystal element
Data distribution apparatus, data distribution method, and distribution control program
Etching composition
Dyes and methods of marking biological material
Blend polymer gas separation membrane
Apparatus for tuning a musical instrument, and a related instrument
Point-of-sale server and method
  Randomly Featured Patents
Method of and device for production of hydrocarbons
Wireless telephone user location capability for enhanced 911 application
High-precision golf club
Methods and apparatuses for calibrating sensors
Prostane derivatives
Vibrator motor
Compact pixel reset circuits using reversed current readout
Automated video imagery database generation using photogrammetry
Asymmetrical femoral condye total knee arthroplasty prosthesis
Image forming apparatus enabling reversible selection of a default mode of operation