Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of forming a thin film pattern with a trapezoidal cross section










Image Number 8 for United States Patent #5127989.

The present invention provides a method of forming a thin film pattern with a trapezoidal cross section. In this method, a resist pattern with an inverted-trapezoidal cross section is formed on a thin film. Using the resist pattern with the inverted-trapezoidal cross section as a mask, the thin film is dry-etched. A resist pattern is left with the resist pattern used as a mask. The resist pattern has a trapezoidal cross section.








 
 
  Recently Added Patents
Architecture for accelerated computer processing
Method for implementing dynamic pseudorandom keyboard remapping
Method and apparatus for over-the-air activation of neighborhood cordless-type services
System and method for wireless messaging in a wireless communication system
Droplet generation and detection device, and droplet control device
AC/DC converter
Composite materials comprising aggregate and an elastomeric composition
  Randomly Featured Patents
Dryer for drying extrudable materials
Hydrohalogenation of myrcene
Hand grip for a firearm
Repellent coatings for optical surfaces
Method and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
Paper interleaver for food patty molding machine
Segmented smelt spout
Method and apparatus for selecting antenna in a communication system
Method of manufacturing a light source unit
GaN LED for flip-chip bonding and method of fabricating the same