Resources Contact Us Home
Bichannel radiation detection method

Image Number 4 for United States Patent #5114242.

The system and method for pyrometrically determining the temperature of a semiconductor wafer within a processing chamber accurately determines the actual emissivity of the semiconductor wafer at a reference temperature using multiple pyrometers operating at different wavelengths. The pyrometers are calibrated for radiation received from the processing chamber and their responses are then corrected to provide the proper temperature indication for a master wafer at a known reference temperature to yield emissivity of the master wafer. Other similar wafers exhibiting extreme values of emissivity are sensed at the reference temperature to provide pyrometer responses that are corrected in accordance with the master emissivity, and such corrected responses are used to establish a correlation between emissivities and the corrected pyrometer responses. The corrected pyrometer responses on other wafers operating near the reference temperature can then be used with the emissivities to determine the true temperature of each such other wafer. The processing temperature of the wafer is then determined and controlled in accordance with the actual emissivity of the wafer for more precise thermal processing.

  Recently Added Patents
Detection system and method for mobile device application
Client network device and method for adjusting parameters of client traffic windows based on discovery of other network devices
Error detection and recovery tool for logical volume management in a data storage system
Lid for a container
Lighting fixture
Graphical planner
Non-zero rounding and prediction mode selection techniques in video encoding
  Randomly Featured Patents
Device for connecting a sailmast to a sailboard
Reversible flat key for cylinder locks
Mechanical component having at least one fluid transport circuit and method for designing same in strata
Internally generated vectors for burnin system
Processing encoded real-time data
Semiconductor device
Shoe with detachable upper
(Zinc,cadmium,magnesium) aluminate-gallate-containing paints and their use on spacecraft
Rapidly solidified aluminum based, silicon containing alloys for elevated temperature applications
Combustion engine with variable valve actuation