Resources Contact Us Home
Bichannel radiation detection method

Image Number 4 for United States Patent #5114242.

The system and method for pyrometrically determining the temperature of a semiconductor wafer within a processing chamber accurately determines the actual emissivity of the semiconductor wafer at a reference temperature using multiple pyrometers operating at different wavelengths. The pyrometers are calibrated for radiation received from the processing chamber and their responses are then corrected to provide the proper temperature indication for a master wafer at a known reference temperature to yield emissivity of the master wafer. Other similar wafers exhibiting extreme values of emissivity are sensed at the reference temperature to provide pyrometer responses that are corrected in accordance with the master emissivity, and such corrected responses are used to establish a correlation between emissivities and the corrected pyrometer responses. The corrected pyrometer responses on other wafers operating near the reference temperature can then be used with the emissivities to determine the true temperature of each such other wafer. The processing temperature of the wafer is then determined and controlled in accordance with the actual emissivity of the wafer for more precise thermal processing.

  Recently Added Patents
Electrophotographic photoreceptor, image-forming apparatus, and electrophotographic cartridge
Acoustic measuring instrument
Method and system for electronic distribution of product redemption coupons
Coated article and method for making the same
Mobile application for calendar sharing and scheduling
System and method for oscillator frequency control
Frothable aqueous composition for use in a carpet backing composition
  Randomly Featured Patents
On-chip current sensing methods and systems
Process for producing zirconium oxide thin films
Leveling tool
Micro denier fiber fill insulation
Steam-water separating system for boiling water nuclear reactors
Display system
Column switching procedure
Computer interface
Friction clutch for an internal combustion engine in an automobile
Air-cooled heat pump type refrigerating apparatus