Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Bichannel radiation detection method










Image Number 4 for United States Patent #5114242.

The system and method for pyrometrically determining the temperature of a semiconductor wafer within a processing chamber accurately determines the actual emissivity of the semiconductor wafer at a reference temperature using multiple pyrometers operating at different wavelengths. The pyrometers are calibrated for radiation received from the processing chamber and their responses are then corrected to provide the proper temperature indication for a master wafer at a known reference temperature to yield emissivity of the master wafer. Other similar wafers exhibiting extreme values of emissivity are sensed at the reference temperature to provide pyrometer responses that are corrected in accordance with the master emissivity, and such corrected responses are used to establish a correlation between emissivities and the corrected pyrometer responses. The corrected pyrometer responses on other wafers operating near the reference temperature can then be used with the emissivities to determine the true temperature of each such other wafer. The processing temperature of the wafer is then determined and controlled in accordance with the actual emissivity of the wafer for more precise thermal processing.








 
 
  Recently Added Patents
Alterable account number
Method and system for Bluetooth low power link layer connection setup
(4932
Hybrid asynchronous transmission process
Antenna array system
Methods and kits for predicting the responsiveness of hepatocellular carcinoma patients to 5-fluorouracil-based combination chemotherapy
Launch cable case
  Randomly Featured Patents
Paper product
Kalanchoe plant named Pioneer
Optical deflector
Technique for sharing a physical port among a plurality of virtual bridges on a switch in a computer network
Computer with component installation handle
Game apparatus
Clutch control system for automobiles
Brassiere pad system
Window well
Apparatus for reducing power supply noise in an integrated circuit