Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Bichannel radiation detection method










Image Number 4 for United States Patent #5114242.

The system and method for pyrometrically determining the temperature of a semiconductor wafer within a processing chamber accurately determines the actual emissivity of the semiconductor wafer at a reference temperature using multiple pyrometers operating at different wavelengths. The pyrometers are calibrated for radiation received from the processing chamber and their responses are then corrected to provide the proper temperature indication for a master wafer at a known reference temperature to yield emissivity of the master wafer. Other similar wafers exhibiting extreme values of emissivity are sensed at the reference temperature to provide pyrometer responses that are corrected in accordance with the master emissivity, and such corrected responses are used to establish a correlation between emissivities and the corrected pyrometer responses. The corrected pyrometer responses on other wafers operating near the reference temperature can then be used with the emissivities to determine the true temperature of each such other wafer. The processing temperature of the wafer is then determined and controlled in accordance with the actual emissivity of the wafer for more precise thermal processing.








 
 
  Recently Added Patents
Imaging lens
Communication terminal device, communication system, and communication control method
Combined high and low frequency stimulation therapy
Efficient relay automatic repeat request procedure in broadband wireless access system
Digital broadcasting transmission and reception system, and a signal processing method using turbo processing and turbo decoding
Treatment devices with deliver-activated inflatable members, and associated systems and methods for treating the spinal cord and other tissues
Heteroleptic iridium complexes as dopants
  Randomly Featured Patents
Photoconductor of cadmium selenide and aluminum oxide
Techniques for managing data in a storage controller
Process and device for the production of plastic films
Apparatus for interlocking reverser handle on a control stand of a railway locomotive
Detection and removal system for reducing cycle time of an injection molding apparatus
Clothing storage apparatus
Articles molding apparatus
Gate driver ASIC for an automotive starter/alternator
Camera film process film locating feed and cutter
Glow-in-the-dark material for fishing accessories