Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Bichannel radiation detection method










Image Number 4 for United States Patent #5114242.

The system and method for pyrometrically determining the temperature of a semiconductor wafer within a processing chamber accurately determines the actual emissivity of the semiconductor wafer at a reference temperature using multiple pyrometers operating at different wavelengths. The pyrometers are calibrated for radiation received from the processing chamber and their responses are then corrected to provide the proper temperature indication for a master wafer at a known reference temperature to yield emissivity of the master wafer. Other similar wafers exhibiting extreme values of emissivity are sensed at the reference temperature to provide pyrometer responses that are corrected in accordance with the master emissivity, and such corrected responses are used to establish a correlation between emissivities and the corrected pyrometer responses. The corrected pyrometer responses on other wafers operating near the reference temperature can then be used with the emissivities to determine the true temperature of each such other wafer. The processing temperature of the wafer is then determined and controlled in accordance with the actual emissivity of the wafer for more precise thermal processing.








 
 
  Recently Added Patents
Control service for relational data management
Mirac proteins
Low drop-out regulator providing constant current and maximum voltage limit
Image processing device, image forming apparatus, and non-transitory computer readable recording medium
Dye sensitised solar cell
Method and apparatus for interactive distribution of digital content
Image forming apparatus detecting color patterns and generating interleaf images at predetermined position
  Randomly Featured Patents
Portable electronic device with fastening mechanism
Solid composition
Spectrometric measuring probe and method for recalibrating the same
Saddle stitching machine for signatures and the like
ATM cell policing method and apparatus
Facial feature evaluation based on eye location
Method and apparatus for stacking and transferring packets
Apparatus and method for continuous retorting of mercury from ores and others mercury contaminated materials
Firearm adapted for use in low light, illuminating rear sight, and method for aligning sights in low light environments
Remote television control