Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Bichannel radiation detection method










Image Number 4 for United States Patent #5114242.

The system and method for pyrometrically determining the temperature of a semiconductor wafer within a processing chamber accurately determines the actual emissivity of the semiconductor wafer at a reference temperature using multiple pyrometers operating at different wavelengths. The pyrometers are calibrated for radiation received from the processing chamber and their responses are then corrected to provide the proper temperature indication for a master wafer at a known reference temperature to yield emissivity of the master wafer. Other similar wafers exhibiting extreme values of emissivity are sensed at the reference temperature to provide pyrometer responses that are corrected in accordance with the master emissivity, and such corrected responses are used to establish a correlation between emissivities and the corrected pyrometer responses. The corrected pyrometer responses on other wafers operating near the reference temperature can then be used with the emissivities to determine the true temperature of each such other wafer. The processing temperature of the wafer is then determined and controlled in accordance with the actual emissivity of the wafer for more precise thermal processing.








 
 
  Recently Added Patents
Low powered activation arrangement and method thereof
Manipulation of an alternative respiratory pathway in photo-autotrophs
Driving support device, method, and program
Asynchronous line interface rate adaptation to the physical layer with synchronous lines at the connection layer
Electric separator, method for the production and use thereof
Dielectric insulation medium
Block polymers and their process of preparation
  Randomly Featured Patents
Vehicular cornering lamp system
Electron microscope backscattered electron detectors
Method and apparatus for gasketing a fuel cell
Method and apparatus for generating alerts based upon content of messages received by a radio receiver
Compensator with photochemically cured barrier layer and process
Automatic anti-surge control for dual centrifugal compressor system
Infrared analyzer, especially for foodstuffs such as flour
Modular wiring system
Spray drying process with spinning atomizer
Internal combustion engine having a sound-damping casing