Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Bichannel radiation detection method










Image Number 4 for United States Patent #5114242.

The system and method for pyrometrically determining the temperature of a semiconductor wafer within a processing chamber accurately determines the actual emissivity of the semiconductor wafer at a reference temperature using multiple pyrometers operating at different wavelengths. The pyrometers are calibrated for radiation received from the processing chamber and their responses are then corrected to provide the proper temperature indication for a master wafer at a known reference temperature to yield emissivity of the master wafer. Other similar wafers exhibiting extreme values of emissivity are sensed at the reference temperature to provide pyrometer responses that are corrected in accordance with the master emissivity, and such corrected responses are used to establish a correlation between emissivities and the corrected pyrometer responses. The corrected pyrometer responses on other wafers operating near the reference temperature can then be used with the emissivities to determine the true temperature of each such other wafer. The processing temperature of the wafer is then determined and controlled in accordance with the actual emissivity of the wafer for more precise thermal processing.








 
 
  Recently Added Patents
Compact semiconductor memory device having reduced number of contacts, methods of operating and methods of making
Weight-balanced polygonal mirror, light scanning unit using the polygonal mirror, and image forming apparatus
Control device for radiation imaging apparatus and control method therefor
Method for dynamic multi-level pricing for wireless communications according to quality of service
Format for providing traffic information and a method and apparatus for using the format
System and method to assess and report the health of landing gear related components
Exposure apparatus, exposure method, and device manufacturing method
  Randomly Featured Patents
Self-stabilizing tree support assemblies
Methods and systems for displaying network information
Apparatus for supporting piston shoes of axial piston type hydraulic pump/motor
Networked basic input output system read only memory
Freeze-resistant baker's yeast strain having sugar resistance
Reducing latency jitter in a store-and-forward buffer for mixed-priority traffic
Gatefold apparatus
Design to improve turbulence in combustion chambers
Weight-on-bit and torque measuring apparatus
Aberration measuring method