Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Bichannel radiation detection method










Image Number 4 for United States Patent #5114242.

The system and method for pyrometrically determining the temperature of a semiconductor wafer within a processing chamber accurately determines the actual emissivity of the semiconductor wafer at a reference temperature using multiple pyrometers operating at different wavelengths. The pyrometers are calibrated for radiation received from the processing chamber and their responses are then corrected to provide the proper temperature indication for a master wafer at a known reference temperature to yield emissivity of the master wafer. Other similar wafers exhibiting extreme values of emissivity are sensed at the reference temperature to provide pyrometer responses that are corrected in accordance with the master emissivity, and such corrected responses are used to establish a correlation between emissivities and the corrected pyrometer responses. The corrected pyrometer responses on other wafers operating near the reference temperature can then be used with the emissivities to determine the true temperature of each such other wafer. The processing temperature of the wafer is then determined and controlled in accordance with the actual emissivity of the wafer for more precise thermal processing.








 
 
  Recently Added Patents
Neurostimulation system
Method for the hydrolysis of substituted formylamines into substituted amines
Polarization-coupled ferroelectric unipolar junction memory and energy storage device
Image forming apparatus having exhaust fan
Touch-sensitive device and communication device
System for implementing dynamic pseudorandom keyboard remapping
Multi-band dipole antenna
  Randomly Featured Patents
Exercise device with adjustable stride
Use of the cathelicidin LL-37 and derivatives therof for wound healing
High definition television acoustic charge transport filter bank
Managing state information in a computing environment
Space holder in particular for a vertebra or an intervertebral disk
Apparatus for and method of controlling a feedforward filter of an equalizer
Method of cleaning scope end of endoscope and endoscope with scope end cleaning mechanism
Stapling device
Method of broadcasting multimedia content via distribution network
Angular contact ball bearing with an out-of-round rim and method for assembling same