Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Pattern comparator with substage illumination and polygonal data representation










Image Number 19 for United States Patent #5018210.

A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.








 
 
  Recently Added Patents
Enhancement of semiconducting photovoltaic absorbers by the addition of alkali salts through solution coating techniques
Input device with photodetector pairs
Integrated monitoring in problem management in service desk
Crystalline form of (R)-7-chloro-N-(quinuclidin-3-yl)benzo[b]thiophene-2-carboxamide hydrochloride monohydrate
Lens system
Advertising apparatus
Sensing device and electronic apparatus
  Randomly Featured Patents
Tie rod puller
Non-linear dual mode regulator circuit
Communicating system
Blade, structural components of a blade, and method for manufacturing a blade and the structural components of a blade
Thin film field effect transistor with gate dielectric made of organic material and method for fabricating the same
Phosphonium salt-containing corrosion inhibitors for high density brines
Thrust reverser configuration for a short fan duct
Method of treating acetaminophen overdose
Needlenose pliers
Meta-configuration of profiles