Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Pattern comparator with substage illumination and polygonal data representation










Image Number 19 for United States Patent #5018210.

A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.








 
 
  Recently Added Patents
Automated synchronization of design features in disparate code components using type differencing
Difference detecting apparatus, difference output apparatus, and medium
Point-of-sale server and method
Switchable solvents and methods of use thereof
Radiation-curable ink composition, ink jet recording method, and recorded matter
Method and system for utilizing Perovskite material for charge storage and as a dielectric
Method and apparatus for feeding a polyurethane mixture into hollow bodies
  Randomly Featured Patents
Push-type control valve for fluid actuator
Audio coding
Hook drive for sewing machines
Integrator topology for continuous integration
Apparatus for manipulating empty and filled trays for cigarettes and like rod-shaped articles between making and processing machines
Adjustment device for artificial limbs
State validation using bi-directional wireless link
Information processing system using information caching based on user activity
Serial dot printer for office machines
Solid electrolytic capacitor and fabrication method therefor