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Process for producing superconducting thin film

Image Number 3 for United States Patent #4861750.

A process for producing a superconducting thin film of the present invention comprises: supplying onto a substrate a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof; and irradiating the substrate with an oxygen neutral beam, to thereby form a thin film of IIa-IIIa-Cu oxide.

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