Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Apparatus and method for uniform ion dose control










Image Number 5 for United States Patent #4816693.

A uniform ion implantation dose control apparatus controls the implantation of ion particles onto at least one wafer mounted on a rotating disk in the pathway of the ion particle beam. A grounded scanning wire is repeatedly moved across the beam to produce an emission of secondary electrons which is linearly proportional to the beam particle current. The secondary electrons emitted are collected and formed into a current I.sub.s by a collector electrode. Portions of the current I.sub.s on the collector electrode are sampled. While the vacuum conditions within the beamline are good, the beams electrical current I.sub.FC is measured and the collector current I.sub.s sample is calibrated therewith so that when the beamline vacuum becomes a high pressure vacuum, additional collector current I.sub.s samples may be utilized to determine a theoretical beam current I which is a function of the beam particle current I.sub.p =I/q. This theoretical beam current I is utilized to move the rotating disk along a radial pathway perpendicular to the beam pathway at a velocity V which is proportional to the theoretical beam current I.








 
 
  Recently Added Patents
Semiconductor device
Reoccuring keying system
Apparatus, system, and method for non-interruptively updating firmware on a redundant hardware controller
Method of forming micropattern, method of forming damascene metallization, and semiconductor device and semiconductor memory device fabricated using the same
Method of and apparatus for evaluating an optimal irradiation amount of an electron beam for drawing a pattern onto a sample
Methods and compositions for inhibiting progression to chronic cardiac failure
Motor device and method of manufacturing the same
  Randomly Featured Patents
Modular construction assembly for wall of court
Linear flux switch alternator
Mechanical devices for chemical treatment of fluids
Portable bicyle padded seat cover
Process for producing aromatic hydroxy compound
Electro-optical device and electronic apparatus
Endless track for high speed multi-terrain vehicles
Transporting arrangement
Scrolling of ordered series with item highlighting indicating relevance
Safety hook