Resources Contact Us Home
Apparatus and method for uniform ion dose control

Image Number 5 for United States Patent #4816693.

A uniform ion implantation dose control apparatus controls the implantation of ion particles onto at least one wafer mounted on a rotating disk in the pathway of the ion particle beam. A grounded scanning wire is repeatedly moved across the beam to produce an emission of secondary electrons which is linearly proportional to the beam particle current. The secondary electrons emitted are collected and formed into a current I.sub.s by a collector electrode. Portions of the current I.sub.s on the collector electrode are sampled. While the vacuum conditions within the beamline are good, the beams electrical current I.sub.FC is measured and the collector current I.sub.s sample is calibrated therewith so that when the beamline vacuum becomes a high pressure vacuum, additional collector current I.sub.s samples may be utilized to determine a theoretical beam current I which is a function of the beam particle current I.sub.p =I/q. This theoretical beam current I is utilized to move the rotating disk along a radial pathway perpendicular to the beam pathway at a velocity V which is proportional to the theoretical beam current I.

  Recently Added Patents
Imaging apparatus, control method thereof, and program
Fibrous laminate interface for security coatings
System, device and method for transrating file based assets
Laser marking of a card
Electronic component and a system and method for producing an electronic component
Implantable defibrillator systems and methods with mitigations for saturation avoidance and accommodation
Amnion-derived cells, methods of making and uses thereof
  Randomly Featured Patents
Use of 3-position cyclosporin derivatives for hair growth
Three stage implantable pressure relief valve with adjustable valve stem members
Lamp modulating circuitry
System and method for presenting an internet survey to pre-qualified vistors to a website
Tape printing apparatus
Method and system for increasing efficiency in a radio front-end
Double layer forming wire fabric
Heat pipe heat exchanger tubesheet
BiCMOS performance enhancement by mechanical uniaxial strain and methods of manufacture
Control of acute hypertension and cardiotoxicity in patients treated with vascular targeting agents