Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Apparatus and method for uniform ion dose control










Image Number 2 for United States Patent #4816693.

A uniform ion implantation dose control apparatus controls the implantation of ion particles onto at least one wafer mounted on a rotating disk in the pathway of the ion particle beam. A grounded scanning wire is repeatedly moved across the beam to produce an emission of secondary electrons which is linearly proportional to the beam particle current. The secondary electrons emitted are collected and formed into a current I.sub.s by a collector electrode. Portions of the current I.sub.s on the collector electrode are sampled. While the vacuum conditions within the beamline are good, the beams electrical current I.sub.FC is measured and the collector current I.sub.s sample is calibrated therewith so that when the beamline vacuum becomes a high pressure vacuum, additional collector current I.sub.s samples may be utilized to determine a theoretical beam current I which is a function of the beam particle current I.sub.p =I/q. This theoretical beam current I is utilized to move the rotating disk along a radial pathway perpendicular to the beam pathway at a velocity V which is proportional to the theoretical beam current I.








 
 
  Recently Added Patents
Systems and methods for processing supplemental information associated with media programming
Parasitic element compensation circuit and method for compensating for the parasitic element
Tomlinson Harashima precoding with additional receiver processing in a multi-user multiple-input multiple-output wireless transmission system
Method and structure for image local contrast enhancement
Systems and/or methods for using air/wind power to charge/re-charge vehicle batteries
Backside structure and methods for BSI image sensors
Compounds, compositions and methods for reducing lipid levels
  Randomly Featured Patents
Refrigerator and method of making shaved ice
Method for improving the adhesion of organopolysiloxane elastomers
Apparatus for hairstyling by means of steam
Apparatus for marking the surface of articles
Cut stone
Vehicular camera system with plural perspectives
Stiffened balloon apparatus with increased flexibility
Method of manufacturing N-monosubstituted (meth)acrylamides
Copolymeric nonlinear optical media
Optical device for scanning a beam in two axes that are substantially perpendicular to each other