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Class Information
Number: 977/891
Name: Nanotechnology > Manufacture, treatment, or detection of nanostructure > Deposition of materials (e.g., coating, cvd, or ald, etc.) > Vapor phase deposition
Description: Subject matter wherein the coating material is in a gaseous state.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7625469 |
Nanoelectrode array for electrochemical analysis |
Dec. 1, 2009 |
| 7569416 |
Forming closely spaced electrodes |
Aug. 4, 2009 |
| 7528002 |
Formation of nanowhiskers on a substrate of dissimilar material |
May. 5, 2009 |
| 7524431 |
Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers |
Apr. 28, 2009 |
| 7485855 |
On-probe sample cleanup system and method for MALDI analysis |
Feb. 3, 2009 |
| 7465430 |
Apparatus for making metal oxide nanopowder |
Dec. 16, 2008 |
| 7435353 |
Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers |
Oct. 14, 2008 |
| 7410901 |
Submicron device fabrication |
Aug. 12, 2008 |
| 7374731 |
Reaction apparatus for producing vapor-grown carbon fibers and continuous production system thereof |
May. 20, 2008 |
| 7371677 |
Laterally grown nanotubes and method of formation |
May. 13, 2008 |
| 7323218 |
Synthesis of composite nanofibers for applications in lithium batteries |
Jan. 29, 2008 |
| 7258807 |
Controlled growth of gallium nitride nanostructures |
Aug. 21, 2007 |
| 7214361 |
Method for synthesis of carbon nanotubes |
May. 8, 2007 |
| 7169673 |
Atomic layer deposited nanolaminates of HfO.sub.2/ZrO.sub.2 films as gate dielectrics |
Jan. 30, 2007 |
| 6958572 |
Controlled non-normal alignment of catalytically grown nanostructures in a large-scale synthesis process |
Oct. 25, 2005 |
| 6881950 |
Method for producing a three-dimensional macro-molecular structure |
Apr. 19, 2005 |
| 6743481 |
Process for production of ultrathin protective overcoats |
Jun. 1, 2004 |
| 6692324 |
Single self-aligned carbon containing tips |
Feb. 17, 2004 |
| 6689674 |
Method for selective chemical vapor deposition of nanotubes |
Feb. 10, 2004 |
| 6673392 |
Method of vertically aligning carbon nanotubes on substrates at low pressure using thermal chemical vapor deposition with DC bias |
Jan. 6, 2004 |
| 6660660 |
Methods for making a dielectric stack in an integrated circuit |
Dec. 9, 2003 |
| 6641767 |
Methods for replication, replicated articles, and replication tools |
Nov. 4, 2003 |
| 6638818 |
Method of fabricating a dynamic random access memory with increased capacitance |
Oct. 28, 2003 |
| 6629869 |
Method of making flat panel displays having diamond thin film cathode |
Oct. 7, 2003 |
| 6630395 |
Methods for fabricating electrical connections to semiconductor structures incorporating low-k dielectric materials |
Oct. 7, 2003 |
| 6613301 |
Method for producing nanometer-sized ultrafine titanium dioxide |
Sep. 2, 2003 |
| 6597090 |
Method for manufacturing carbon nanotubes as functional elements of MEMS devices |
Jul. 22, 2003 |
| 6596555 |
Forming of quantum dots |
Jul. 22, 2003 |
| 6566243 |
Dielectric layer including silicalite crystals and binder and method for producing same for microelectronic circuits |
May. 20, 2003 |
| 6555813 |
Probes with hydrophobic coatings for gas phase ion spectrometers |
Apr. 29, 2003 |
| 6538798 |
Process for fabricating stiction control bumps on optical membrane via conformal coating of etch holes |
Mar. 25, 2003 |
| 6510672 |
Tubular graphite body capable of storing hydrogen gas and its manufacturing method |
Jan. 28, 2003 |
| 6486597 |
Electrically tunable low secondary electron emission diamond-like coatings and process for depositing coatings |
Nov. 26, 2002 |
| 6472467 |
Inorganic/organic compositions |
Oct. 29, 2002 |
| 6469299 |
Miniature micromachined quadrupole mass spectrometer array and method of making the same |
Oct. 22, 2002 |
| 6465376 |
Method and structure for improving electromigration of chip interconnects |
Oct. 15, 2002 |
| 6451222 |
Ferroelectric composition, ferroelectric vapor deposition target and method of making a ferroelectric vapor deposition target |
Sep. 17, 2002 |
| 6451686 |
Control of semiconductor device isolation properties through incorporation of fluorine in peteos films |
Sep. 17, 2002 |
| 6448165 |
Method for controlling the amount of trim of a gate structure of a field effect transistor |
Sep. 10, 2002 |
| 6444512 |
Dual metal gate transistors for CMOS process |
Sep. 3, 2002 |
| 6420092 |
Low dielectric constant nanotube |
Jul. 16, 2002 |
| 6414307 |
Method and apparatus for enhancing yield of secondary ions |
Jul. 2, 2002 |
| 6359159 |
MOCVD precursors based on organometalloid ligands |
Mar. 19, 2002 |
| 6350488 |
Mass synthesis method of high purity carbon nanotubes vertically aligned over large-size substrate using thermal chemical vapor deposition |
Feb. 26, 2002 |
| 6340768 |
MOCVD precursors based on organometalloid ligands |
Jan. 22, 2002 |
| 6331493 |
Process for making low dielectric constant dielectric films |
Dec. 18, 2001 |
| 6313045 |
Nanoporous silicone resins having low dielectric constants and method for preparation |
Nov. 6, 2001 |
| 6313015 |
Growth method for silicon nanowires and nanoparticle chains from silicon monoxide |
Nov. 6, 2001 |
| 6184403 |
MOCVD precursors based on organometalloid ligands |
Feb. 6, 2001 |
| 6074135 |
Coating or ablation applicator with debris recovery attachment |
Jun. 13, 2000 |
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