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Class Information
Number: 977/887
Name: Nanotechnology > Manufacture, treatment, or detection of nanostructure > Nanoimprint lithography (i.e., nanostamp)
Description: Subject matter wherein manufacturing of the nanostructure includes a mold or stamp used to transfer pattern of nanometer dimensions onto a substrate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7625513 |
Hot embossing lithography method |
Dec. 1, 2009 |
| 7617769 |
System, method, and apparatus for membrane, pad, and stamper architecture for uniform base layer and nanoimprinting pressure |
Nov. 17, 2009 |
| 7597813 |
Element substrate and method of manufacturing the same |
Oct. 6, 2009 |
| 7596420 |
Device manufacturing method and computer program product |
Sep. 29, 2009 |
| 7592269 |
Method and apparatus for depositing charge and/or nanoparticles |
Sep. 22, 2009 |
| 7575705 |
Method for manufacturing a magnetic recording medium utilizing first and second imprint stampers |
Aug. 18, 2009 |
| 7520742 |
Nanoprint equipment and method of making fine structure |
Apr. 21, 2009 |
| 7500431 |
System, method, and apparatus for membrane, pad, and stamper architecture for uniform base layer and nanoimprinting pressure |
Mar. 10, 2009 |
| 7491423 |
Directed spatial organization of zinc oxide nanostructures |
Feb. 17, 2009 |
| 7445742 |
Imprinting nanoscale patterns for catalysis and fuel cells |
Nov. 4, 2008 |
| 7445971 |
Thin film transistor and method for manufacturing the same |
Nov. 4, 2008 |
| 7410901 |
Submicron device fabrication |
Aug. 12, 2008 |
| 7407890 |
Patterning sub-lithographic features with variable widths |
Aug. 5, 2008 |
| 7399422 |
System and method for forming nanodisks used in imprint lithography and nanodisk and memory disk formed thereby |
Jul. 15, 2008 |
| 7387508 |
Compliant device for nano-scale manufacturing |
Jun. 17, 2008 |
| 7341441 |
Nanoprint equipment and method of making fine structure |
Mar. 11, 2008 |
| 7335579 |
Nanometer-scale memory device utilizing self-aligned rectifying elements and method of making |
Feb. 26, 2008 |
| 7335520 |
Method and apparatus for fabricating flat panel display |
Feb. 26, 2008 |
| 7329568 |
Method of forming active device on substrate that includes embossing insulating resin layer with metal mold |
Feb. 12, 2008 |
| 7320283 |
Nanoprinting method |
Jan. 22, 2008 |
| 7303703 |
Nano-imprint system with mold deformation detector and method of monitoring the same |
Dec. 4, 2007 |
| 7229273 |
Imprint lithography template having a feature size under 250 nm |
Jun. 12, 2007 |
| 7080596 |
Micro-casted silicon carbide nano-imprinting stamp |
Jul. 25, 2006 |
| 7074380 |
Method for manufacturing carbon fibers and electron emitting device using the same |
Jul. 11, 2006 |
| 6955767 |
Scanning probe based lithographic alignment |
Oct. 18, 2005 |
| 6949199 |
Heat-transfer-stamp process for thermal imprint lithography |
Sep. 27, 2005 |
| 6943117 |
UV nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurization |
Sep. 13, 2005 |
| 6923930 |
Mold for nano imprinting |
Aug. 2, 2005 |
| 6909998 |
In-situ monitoring method and system for mold deformation in nanoimprint |
Jun. 21, 2005 |
| 6866801 |
Process for making aligned carbon nanotubes |
Mar. 15, 2005 |
| 6833162 |
Colored nanolithography on glass and plastic substrates |
Dec. 21, 2004 |
| 6831017 |
Catalyst patterning for nanowire devices |
Dec. 14, 2004 |
| 6829988 |
Nanoimprinting apparatus and method |
Dec. 14, 2004 |
| 6811957 |
Patterned carbon nanotube films |
Nov. 2, 2004 |
| 6762094 |
Nanometer-scale semiconductor devices and method of making |
Jul. 13, 2004 |
| 6755984 |
Micro-casted silicon carbide nano-imprinting stamp |
Jun. 29, 2004 |
| 6748865 |
Nano-imprinting method, magnetic printing method and recording medium |
Jun. 15, 2004 |
| 6696220 |
Template for room temperature, low pressure micro-and nano-imprint lithography |
Feb. 24, 2004 |
| 6672702 |
Method and apparatus for printing, cleaning, and calibrating |
Jan. 6, 2004 |
| 6674121 |
Method and system for molecular charge storage field effect transistor |
Jan. 6, 2004 |
| 6672739 |
Laser beam homogenizer |
Jan. 6, 2004 |
| 6670981 |
Laser printing with rewritable media |
Dec. 30, 2003 |
| 6666548 |
Method and apparatus for continuous marking |
Dec. 23, 2003 |
| 6647088 |
Production of a dense mist of micrometric droplets in particular for extreme UV lithography |
Nov. 11, 2003 |
| 6638823 |
Ultra small size vertical MOSFET device and method for the manufacture thereof |
Oct. 28, 2003 |
| 6617012 |
Styrene-acrylonitrile as a resist for making patterned media |
Sep. 9, 2003 |
| 6593065 |
Method of fabricating nanometer-scale flowchannels and trenches with self-aligned electrodes and the structures formed by the same |
Jul. 15, 2003 |
| 6579742 |
Fabrication of molecular electronic circuit by imprinting |
Jun. 17, 2003 |
| 6578188 |
Method and apparatus for a network-based mask defect printability analysis system |
Jun. 10, 2003 |
| 6573986 |
Method and apparatus for self-referenced projection lens distortion mapping |
Jun. 3, 2003 |
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