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Class Information
Number: 977/856
Name: Nanotechnology > Manufacture, treatment, or detection of nanostructure > With scanning probe > For manufacture of nanostructure > Including etching/cutting
Description: Subject matter wherein the scanning probe tip is used for removing material from a substrate, forming grooves or indents in a substrate, or cutting a nanostructure.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7544523 |
Method of fabricating nanodevices |
Jun. 9, 2009 |
| 7524431 |
Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers |
Apr. 28, 2009 |
| 7501069 |
Flexible structures for sensors and electronics |
Mar. 10, 2009 |
| 7452432 |
Apparatus for and method of bonding nano-tip using electrochemical etching |
Nov. 18, 2008 |
| 7435353 |
Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers |
Oct. 14, 2008 |
| 7422696 |
Multicomponent nanorods |
Sep. 9, 2008 |
| 7416993 |
Patterned nanowire articles on a substrate and methods of making the same |
Aug. 26, 2008 |
| 7375324 |
Stylus system for modifying small structures |
May. 20, 2008 |
| 7253442 |
Thermal interface material with carbon nanotubes |
Aug. 7, 2007 |
| 7253119 |
Passivated nanoparticles, method of fabrication thereof, and devices incorporating nanoparticles |
Aug. 7, 2007 |
| 7151209 |
Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices |
Dec. 19, 2006 |
| 6998689 |
Fluid delivery for scanning probe microscopy |
Feb. 14, 2006 |
| 6998358 |
Method for providing nano-structures of uniform length |
Feb. 14, 2006 |
| 6913702 |
Amorphous material processing method and glass substrate |
Jul. 5, 2005 |
| 6869671 |
Enabling nanostructured materials via multilayer thin film precursor and applications to biosensors |
Mar. 22, 2005 |
| 6811457 |
Cathode plate of a carbon nano tube field emission display and its fabrication method |
Nov. 2, 2004 |
| 6777693 |
Lithographic method using ultra-fine probe needle |
Aug. 17, 2004 |
| 6640433 |
Method for forming a micro-pattern |
Nov. 4, 2003 |
| 6635870 |
Method and apparatus for molecular analysis of buried layers |
Oct. 21, 2003 |
| 6620160 |
Method and device for electro microsurgery in a physiological liquid environment |
Sep. 16, 2003 |
| 6531411 |
Surface roughness improvement of SIMOX substrates by controlling orientation of angle of starting material |
Mar. 11, 2003 |
| 6457350 |
Carbon nanotube probe tip grown on a small probe |
Oct. 1, 2002 |
| 6398940 |
Method for fabricating nanoscale patterns on a surface |
Jun. 4, 2002 |
| 6262426 |
Technique and process for the imaging and formation of various devices and surfaces |
Jul. 17, 2001 |
| 6218086 |
Method of forming ultrasmall structures and apparatus therefor |
Apr. 17, 2001 |
| 6197455 |
Lithographic mask repair using a scanning tunneling microscope |
Mar. 6, 2001 |
| 6181097 |
High precision three-dimensional alignment system for lithography, fabrication and inspection |
Jan. 30, 2001 |
| 6084849 |
Shape memory alloy recording medium, storage devices based thereon, and method for using these storage devices |
Jul. 4, 2000 |
| 6053034 |
Method for measuring fracture toughness of thin films |
Apr. 25, 2000 |
| 5922214 |
Nanometer scale fabrication method to produce thin film nanostructures |
Jul. 13, 1999 |
| 5880012 |
Method for making semiconductor nanometer-scale wire using an atomic force microscope |
Mar. 9, 1999 |
| 5866807 |
Method and apparatus for measuring mechanical properties on a small scale |
Feb. 2, 1999 |
| 5858801 |
Patterning antibodies on a surface |
Jan. 12, 1999 |
| 5831181 |
Automated tool for precision machining and imaging |
Nov. 3, 1998 |
| 5740101 |
Time-stable labeling of individual atoms or groups of atoms in the surface of a solid, and the storage of information units in the atomic range |
Apr. 14, 1998 |
| 5666190 |
Method of performing lithography using cantilever array |
Sep. 9, 1997 |
| 5641391 |
Three dimensional microfabrication by localized electrodeposition and etching |
Jun. 24, 1997 |
| 5618760 |
Method of etching a pattern on a substrate using a scanning probe microscope |
Apr. 8, 1997 |
| 5471064 |
Precision machining method, precision machining apparatus and data storage apparatus using the same |
Nov. 28, 1995 |
| 5461907 |
Imaging, cutting, and collecting instrument and method |
Oct. 31, 1995 |
| 5444260 |
Atomic-level imaging, processing and characterization of semiconductor surfaces |
Aug. 22, 1995 |
| 5416331 |
Surface atom fabrication method and apparatus |
May. 16, 1995 |
| 5327625 |
Apparatus for forming nanometric features on surfaces |
Jul. 12, 1994 |
| 5304535 |
Etching of nanoscale structures on high temperature superconductors |
Apr. 19, 1994 |
| 5262981 |
Storage of information units in the nanometer range |
Nov. 16, 1993 |
| 5252835 |
Machining oxide thin-films with an atomic force microscope: pattern and object formation on the nanometer scale |
Oct. 12, 1993 |
| 5210425 |
Etching of nanoscale structures |
May. 11, 1993 |
| 5138174 |
Nanometer-scale structures and lithography |
Aug. 11, 1992 |
| 5116782 |
Method and apparatus for processing a fine pattern |
May. 26, 1992 |
| 5047649 |
Method and apparatus for writing or etching narrow linewidth patterns on insulating materials |
Sep. 10, 1991 |
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