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Class Information
Number: 977/855
Name: Nanotechnology > Manufacture, treatment, or detection of nanostructure > With scanning probe > For manufacture of nanostructure
Description: Subject matter wherein the scanning probe tip is used in a manufacturing process of nanostructure.


Sub-classes under this class:

Class Number Class Name Patents
977/857 Including coating 54
977/856 Including etching/cutting 56
977/858 Including positioning/mounting nanostructure 24
977/859 Including substrate treatment 25


Patents under this class:
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Patent Number Title Of Patent Date Issued
7618599 Reaction chamber for manufacturing a carbon nanotube, apparatus for manufacturing the carbon nanotube and system for manufacturing the carbon nanotube Nov. 17, 2009
7575933 Modification of selectivity for sensing for nanostructure device arrays Aug. 18, 2009
7541062 Thermal control of deposition in dip pen nanolithography Jun. 2, 2009
7501315 Methods and devices for forming nanostructure monolayers and devices including such monolayers Mar. 10, 2009
7491425 Scanning probe-based lithography method Feb. 17, 2009
7462498 Activation of carbon nanotubes for field emission applications Dec. 9, 2008
7402736 Method of fabricating a probe having a field effect transistor channel structure Jul. 22, 2008
7378654 Processing probe May. 27, 2008
7273636 Patterning of solid state features by direct write nanolithographic printing Sep. 25, 2007
7272511 Molecular memory obtained using DNA strand molecular switches and carbon nanotubes, and method for manufacturing the same Sep. 18, 2007
7253442 Thermal interface material with carbon nanotubes Aug. 7, 2007
7211143 Sacrificial template method of fabricating a nanotube May. 1, 2007
7180107 Method of fabricating a tunneling nanotube field effect transistor Feb. 20, 2007
6926927 Method of preparing ultra fine particle of metal chalcogenide Aug. 9, 2005
6884999 Use of scanning probe microscope for defect detection and repair Apr. 26, 2005
6862924 Augmenting reality system for real-time nanomanipulation using atomic force microscopy Mar. 8, 2005
6847907 Defect detection and repair of micro-electro-mechanical systems (MEMS) devices Jan. 25, 2005
6656662 Method of forming a polymer molecule chain Dec. 2, 2003
6586133 Nano-battery systems Jul. 1, 2003
6528807 Method for applying or removing material Mar. 4, 2003
6465782 Strongly textured atomic ridges and tip arrays Oct. 15, 2002
6437852 Exposure system Aug. 20, 2002
6366340 Electron exposure apparatus Apr. 2, 2002
6337479 Object inspection and/or modification system and method Jan. 8, 2002
6322938 Nanolithography for multi-passband grating filters Nov. 27, 2001
6313905 Apparatus and method for defining a pattern on a substrate Nov. 6, 2001
6308509 Fibrous structures containing nanofibrils and other textile fibers Oct. 30, 2001
6270946 Non-lithographic process for producing nanoscale features on a substrate Aug. 7, 2001
6265235 Method of sectioning of photoresist for shape evaluation Jul. 24, 2001
6262426 Technique and process for the imaging and formation of various devices and surfaces Jul. 17, 2001
6251755 High resolution dopant/impurity incorporation in semiconductors via a scanned atomic force probe Jun. 26, 2001
6252238 Micro-processing method using a probe Jun. 26, 2001
6238830 Active control of temperature in scanning probe lithography and maskless lithograpy May. 29, 2001
6207034 Method of manufacture of polymer transistors with controllable gap Mar. 27, 2001
5925465 Carbon material originating from graphite and method of producing same Jul. 20, 1999
5922214 Nanometer scale fabrication method to produce thin film nanostructures Jul. 13, 1999
5885434 Method and apparatus for performing fine working Mar. 23, 1999
5746826 Method and apparatus for forming microstructure body May. 5, 1998
5710051 Method for manufacturing a single electron transistor by using a scanning tunneling microscopy Jan. 20, 1998
5591312 Process for making fullerene fibers Jan. 7, 1997
5512808 Method and apparatus for forming nanometric features on surfaces Apr. 30, 1996
5510614 Solid surface observation method and apparatus therefor, and electronic apparatus formed of the solid surface observation apparatus and method of forming the electronic apparatus Apr. 23, 1996
5504338 Apparatus and method using low-voltage and/or low-current scanning probe lithography Apr. 2, 1996
5489339 Microelectronic processing machine Feb. 6, 1996
5478698 Direct-write afocal electron-beam semiconductor lithography Dec. 26, 1995
5359199 Specific modification of the surfaces of solids in the nanometer range by local delamination, and the storage of information units Oct. 25, 1994
5343042 Selective modification of individual nanometer and subnamometer structures in the surface of a solid Aug. 30, 1994
5216254 Circuit pattern forming apparatus using MU-STM Jun. 1, 1993
5116782 Method and apparatus for processing a fine pattern May. 26, 1992
5058281 Control system for ruling blazed, aberration corrected diffraction gratings Oct. 22, 1991

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