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Class Information
Number: 977/854
Name: Nanotechnology > Manufacture, treatment, or detection of nanostructure > With scanning probe > For detection of specific nanostructure sample or nanostructure-related property > Semiconductor sample
Description: Subject matter wherein the sample is a semiconductor material.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7429732 |
Scanning probe microscopy method and apparatus utilizing sample pitch |
Sep. 30, 2008 |
| 7420106 |
Scanning probe characterization of surfaces |
Sep. 2, 2008 |
| 7414250 |
Cryogenic variable temperature vacuum scanning tunneling microscope |
Aug. 19, 2008 |
| 7279046 |
Method and apparatus for aligning patterns on a substrate |
Oct. 9, 2007 |
| 7038299 |
Selective synthesis of semiconducting carbon nanotubes |
May. 2, 2006 |
| 6930502 |
Method using conductive atomic force microscopy to measure contact leakage current |
Aug. 16, 2005 |
| 6924088 |
Method and system for realtime CD microloading control |
Aug. 2, 2005 |
| 6893884 |
Method and apparatus for measuring dopant profile of a semiconductor |
May. 17, 2005 |
| 6891390 |
Circuit analysis using electric field-induced effects |
May. 10, 2005 |
| 6828804 |
Method of measuring electrical capacitance |
Dec. 7, 2004 |
| 6816806 |
Method of characterizing a semiconductor surface |
Nov. 9, 2004 |
| 6745618 |
Scanning probe microscope |
Jun. 8, 2004 |
| 6716578 |
Method for solid state genome analysis |
Apr. 6, 2004 |
| 6620563 |
Lithography method for forming semiconductor devices on a wafer utilizing atomic force microscopy |
Sep. 16, 2003 |
| 6597194 |
Difference frequency imaging and spectroscopy to measure dopants using an alternating current scanning tunneling microscope |
Jul. 22, 2003 |
| 6567770 |
Remote semiconductor microscopy |
May. 20, 2003 |
| 6552556 |
Prober for electrical measurement of potentials in the interior of ultra-fine semiconductor devices, and method of measuring electrical characteristics with said prober |
Apr. 22, 2003 |
| 6548314 |
Method for enabling access to micro-sections of integrated circuits on a wafer |
Apr. 15, 2003 |
| 6516528 |
System and method to determine line edge roughness and/or linewidth |
Feb. 11, 2003 |
| 6455334 |
Probe grid for integrated circuit analysis |
Sep. 24, 2002 |
| 6448096 |
Atomic force microscopy and signal acquisition via buried insulator |
Sep. 10, 2002 |
| 6417673 |
Scanning depletion microscopy for carrier profiling |
Jul. 9, 2002 |
| 6407558 |
Method of determining the doping concentration across a surface of a semiconductor material |
Jun. 18, 2002 |
| 6392229 |
AFM-based lithography metrology tool |
May. 21, 2002 |
| 6320403 |
Method of determining the doping concentration and defect profile across a surface of a processed semiconductor material |
Nov. 20, 2001 |
| 6287880 |
Method and apparatus for high resolution profiling in semiconductor structures |
Sep. 11, 2001 |
| 6210982 |
Method for improving spatial resolution and accuracy in scanning probe microscopy |
Apr. 3, 2001 |
| 6211686 |
Evaluation apparatus and fabrication system for semiconductor |
Apr. 3, 2001 |
| 6211685 |
Surface probe for determining physical properties of a semiconductor device |
Apr. 3, 2001 |
| 6207575 |
Local interconnect etch characterization using AFM |
Mar. 27, 2001 |
| 6201401 |
Method for measuring the electrical potential in a semiconductor element |
Mar. 13, 2001 |
| 6147507 |
System and method of mapping leakage current and a defect profile of a semiconductor dielectric layer |
Nov. 14, 2000 |
| 6091248 |
Method for measuring the electrical potential in a semiconductor element |
Jul. 18, 2000 |
| 6057914 |
Method for detecting and identifying a lens aberration by measurement of sidewall angles by atomic force microscopy |
May. 2, 2000 |
| 6054710 |
Method and apparatus for obtaining two- or three-dimensional information from scanning electron microscopy |
Apr. 25, 2000 |
| 6005400 |
High resolution three-dimensional doping profiler |
Dec. 21, 1999 |
| 6000281 |
Method and apparatus for measuring critical dimensions on a semiconductor surface |
Dec. 14, 1999 |
| 6002131 |
Scanning probe potentiometer |
Dec. 14, 1999 |
| 5956565 |
Analysis apparatus and analysis methods for semiconductor devices |
Sep. 21, 1999 |
| 5846870 |
Method of measuring a semiconductor device and a method of making a semiconductor device |
Dec. 8, 1998 |
| 5741614 |
Atomic force microscope measurement process for dense photoresist patterns |
Apr. 21, 1998 |
| 5723982 |
Apparatus for analyzing thin film property |
Mar. 3, 1998 |
| 5723981 |
Method for measuring the electrical potential in a semiconductor element |
Mar. 3, 1998 |
| 5710052 |
Scanning spreading resistance probe |
Jan. 20, 1998 |
| 5633455 |
Method of detecting particles of semiconductor wafers |
May. 27, 1997 |
| 5621652 |
System and method for verifying process models in integrated circuit process simulators |
Apr. 15, 1997 |
| 5585734 |
Method for determining the resistance and carrier profile of a semiconductor element using a scanning proximity microscope |
Dec. 17, 1996 |
| 5533387 |
Method of evaluating silicon wafers |
Jul. 9, 1996 |
| 5523700 |
Quantitative two-dimensional dopant profile measurement and inverse modeling by scanning capacitance microscopy |
Jun. 4, 1996 |
| 5520769 |
Method for measuring concentration of dopant within a semiconductor substrate |
May. 28, 1996 |
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