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Class Information
Number: 73/514.38
Name: Measuring and testing > Speed, velocity, or acceleration > Acceleration determination utilizing inertial element > Including an elastic support for an inertial element (e.g., spring)
Description: Subject matter comprising an element which is capable of bearing weight and which tends to return to an initial state or form after deformation and wherein the inertial member is supported by means of the element for bearing weight.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7614301 |
Acceleration sensor chip package and method of producing the same |
Nov. 10, 2009 |
| 7600428 |
Triaxial membrane accelerometer |
Oct. 13, 2009 |
| 7587941 |
Vibration piezoelectric acceleration sensor |
Sep. 15, 2009 |
| 7574914 |
Acceleration sensor |
Aug. 18, 2009 |
| 7562575 |
Impact-resistant acceleration sensor |
Jul. 21, 2009 |
| 7559238 |
MEMS inertial shock bandpass filter |
Jul. 14, 2009 |
| 7509858 |
Acceleration sensor manufacturable by simplified method |
Mar. 31, 2009 |
| 7493858 |
MEMS inertial delay device |
Feb. 24, 2009 |
| 7481113 |
Semiconductor sensor with projection for preventing proof mass from sticking to cover plate |
Jan. 27, 2009 |
| 7469588 |
MEMS vertical comb drive with improved vibration performance |
Dec. 30, 2008 |
| 7464591 |
Semiconductor acceleration sensor |
Dec. 16, 2008 |
| 7430909 |
Tri-axis accelerometer |
Oct. 7, 2008 |
| 7418864 |
Acceleration sensor and method for manufacturing the same |
Sep. 2, 2008 |
| 7406870 |
Semiconductor sensor |
Aug. 5, 2008 |
| 7398684 |
Semiconductor sensor having weight of material different than that of weight arranging part |
Jul. 15, 2008 |
| 7357026 |
Acceleration sensor |
Apr. 15, 2008 |
| 7334475 |
MEMS actuator having supporting substrate asserting physical influence on oscillating body |
Feb. 26, 2008 |
| 7334476 |
Acceleration sensor chip package |
Feb. 26, 2008 |
| 7322239 |
Semiconductor device and manufacturing method thereof |
Jan. 29, 2008 |
| 7322242 |
Micro-electromechanical structure with improved insensitivity to thermomechanical stresses induced by the package |
Jan. 29, 2008 |
| 7318349 |
Three-axis integrated MEMS accelerometer |
Jan. 15, 2008 |
| 7270003 |
BMEMS-type high-sensitivity inertial sensor and manufacturing process thereof |
Sep. 18, 2007 |
| 7267007 |
Acceleration sensing device |
Sep. 11, 2007 |
| 7267006 |
Accelerometer |
Sep. 11, 2007 |
| 7258011 |
Multiple axis accelerometer |
Aug. 21, 2007 |
| 7243545 |
Physical quantity sensor having spring |
Jul. 17, 2007 |
| 7243546 |
Acceleration sensor chip |
Jul. 17, 2007 |
| 7234364 |
Angular rate sensor having circuit board and package |
Jun. 26, 2007 |
| 7228739 |
Precision flexure plate |
Jun. 12, 2007 |
| 7210348 |
Semiconductor dynamic quantity sensor |
May. 1, 2007 |
| 7210352 |
MEMS teeter-totter apparatus with curved beam and method of manufacture |
May. 1, 2007 |
| 7194903 |
Suspension mechanism for high performance accelerometers |
Mar. 27, 2007 |
| 7159442 |
MEMS multi-directional shock sensor |
Jan. 9, 2007 |
| 7140250 |
MEMS teeter-totter accelerometer having reduced non-linearty |
Nov. 28, 2006 |
| 7124633 |
Vibrating beam accelerometer |
Oct. 24, 2006 |
| 7111514 |
Acceleration sensor |
Sep. 26, 2006 |
| 7107847 |
Semiconductor acceleration sensor and method of manufacturing the same |
Sep. 19, 2006 |
| 7104128 |
Multiaxial micromachined differential accelerometer |
Sep. 12, 2006 |
| 7100448 |
Accelerometer |
Sep. 5, 2006 |
| 7089792 |
Micromachined apparatus utilizing box suspensions |
Aug. 15, 2006 |
| 7010976 |
Acceleration sensor and manufacturing method thereof |
Mar. 14, 2006 |
| 7005193 |
Method of adding mass to MEMS structures |
Feb. 28, 2006 |
| 7004030 |
Acceleration sensor |
Feb. 28, 2006 |
| 7000473 |
MEM structure having reduced spring stiction |
Feb. 21, 2006 |
| 6931928 |
Microstructure with movable mass |
Aug. 23, 2005 |
| 6925875 |
Packaged accelerometer |
Aug. 9, 2005 |
| 6923062 |
Sensor |
Aug. 2, 2005 |
| 6920788 |
Acceleration sensor |
Jul. 26, 2005 |
| 6904805 |
Accelerometer |
Jun. 14, 2005 |
| 6904803 |
Compact inertial sensor |
Jun. 14, 2005 |
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