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Class Information
Number: 73/514.36
Name: Measuring and testing > Speed, velocity, or acceleration > Acceleration determination utilizing inertial element > Pendulum or beam
Description: Apparatus wherein the inertial member either (A) comprises or (B) is supported by: either (a) an object suspended from a fixed support so that it is free to swing back and forth or (b) an elongated flexible element.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7594438 |
Inertial sensor having a flexing element supporting a movable mass |
Sep. 29, 2009 |
| 7574914 |
Acceleration sensor |
Aug. 18, 2009 |
| 7464591 |
Semiconductor acceleration sensor |
Dec. 16, 2008 |
| RE40561 |
Acceleration sensor and process for the production thereof |
Nov. 4, 2008 |
| 7406868 |
Compensating accelerometer with optical angle sensing |
Aug. 5, 2008 |
| 7389691 |
Acceleration sensor |
Jun. 24, 2008 |
| RE40347 |
Acceleration sensor and process for the production thereof |
Jun. 3, 2008 |
| 7371601 |
Piezoresistive sensing structure |
May. 13, 2008 |
| 7353706 |
Weighted released-beam sensor |
Apr. 8, 2008 |
| 7296471 |
Acceleration sensor |
Nov. 20, 2007 |
| 7288873 |
Device for emission of high frequency signals |
Oct. 30, 2007 |
| 7225675 |
Capacitance type dynamic quantity sensor |
Jun. 5, 2007 |
| 7223624 |
Micromechanical device with thinned cantilever structure and related methods |
May. 29, 2007 |
| 7159442 |
MEMS multi-directional shock sensor |
Jan. 9, 2007 |
| 7146856 |
Dynamically balanced capacitive pick-off accelerometer |
Dec. 12, 2006 |
| 7137300 |
Parylene capacitive accelerometer utilizing electrical fringing field sensing and method of making |
Nov. 21, 2006 |
| 7100447 |
Super Invar magnetic return path for high performance accelerometers |
Sep. 5, 2006 |
| 7024933 |
Internally shock caged serpentine flexure for micro-machined accelerometer |
Apr. 11, 2006 |
| 7021141 |
Beam-type accelerometer |
Apr. 4, 2006 |
| 7019231 |
Inertial sensor |
Mar. 28, 2006 |
| 7013730 |
Internally shock caged serpentine flexure for micro-machined accelerometer |
Mar. 21, 2006 |
| 7005193 |
Method of adding mass to MEMS structures |
Feb. 28, 2006 |
| 6938487 |
Inertia sensor |
Sep. 6, 2005 |
| 6912902 |
Bending beam accelerometer with differential capacitive pickoff |
Jul. 5, 2005 |
| 6874363 |
Trapped charge field bias vibrating beam accelerometer |
Apr. 5, 2005 |
| 6868725 |
Hinge position location that causes pendulous axis to be substantially parallel with drive component direction |
Mar. 22, 2005 |
| 6862795 |
Method of manufacturing of a monolithic silicon acceleration sensor |
Mar. 8, 2005 |
| 6750775 |
Integrated sensor having plurality of released beams for sensing acceleration and associated methods |
Jun. 15, 2004 |
| 6701779 |
Perpendicular torsion micro-electromechanical switch |
Mar. 9, 2004 |
| 6662658 |
Whiffletree accelerometer |
Dec. 16, 2003 |
| 6619123 |
Micromachined shock sensor |
Sep. 16, 2003 |
| 6615465 |
Method for producing an acceleration sensor |
Sep. 9, 2003 |
| 6591678 |
Semiconductor dynamic quantity sensor for detecting dynamic quantity in two axes with X-shaped mass portion |
Jul. 15, 2003 |
| 6484579 |
Trim balancing of second-order non-linearity in double ended tuning fork resonators |
Nov. 26, 2002 |
| 6459193 |
Shadow mask, a method of forming the shadow mask, and a method of manufacturing a semiconductor device with using the shadow mask |
Oct. 1, 2002 |
| 6446507 |
Semiconductor sensor chip and method for producing the chip, and semiconductor sensor and package for assembling the sensor |
Sep. 10, 2002 |
| 6430999 |
Semiconductor physical quantity sensor including frame-shaped beam surrounded by groove |
Aug. 13, 2002 |
| 6423564 |
Force-sensing transducers, accelerometers, rate sensors, methods of forming force-sensing transducers, and methods of forming vibrating-beam force transducers |
Jul. 23, 2002 |
| 6422077 |
Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor |
Jul. 23, 2002 |
| 6389898 |
Microsensor with a resonator structure |
May. 21, 2002 |
| 6389899 |
In-plane micromachined accelerometer and bridge circuit having same |
May. 21, 2002 |
| 6388300 |
Semiconductor physical quantity sensor and method of manufacturing the same |
May. 14, 2002 |
| 6355964 |
Microelectronic integrated sensor |
Mar. 12, 2002 |
| 6336366 |
Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film |
Jan. 8, 2002 |
| 6336658 |
Acceleration switch and the manufacturing method |
Jan. 8, 2002 |
| 6316796 |
Single crystal silicon sensor with high aspect ratio and curvilinear structures |
Nov. 13, 2001 |
| 6305223 |
Acceleration sensor |
Oct. 23, 2001 |
| 6285111 |
Axis alignment method |
Sep. 4, 2001 |
| 6273514 |
Axis alignment method |
Aug. 14, 2001 |
| 6263736 |
Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film |
Jul. 24, 2001 |
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