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Class Information
Number: 73/514.32
Name: Measuring and testing > Speed, velocity, or acceleration > Acceleration determination utilizing inertial element > Specific type of electric sensor or specific type of magnetic sensor > Capacitive sensor
Description: Subject matter wherein the sensing means comprises spaced electrodes whose capacitance varies by the change in the property of the inertial member due to an acceleration of the body.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7617729 |
Accelerometer |
Nov. 17, 2009 |
| 7614300 |
System and method for mitigating errors in electrostatic force balanced instrument |
Nov. 10, 2009 |
| 7610809 |
Differential capacitive sensor and method of making same |
Nov. 3, 2009 |
| 7600428 |
Triaxial membrane accelerometer |
Oct. 13, 2009 |
| 7584662 |
Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith |
Sep. 8, 2009 |
| 7578190 |
Symmetrical differential capacitive sensor and method of making same |
Aug. 25, 2009 |
| 7578186 |
Inertial sensor and fabrication method of inertial sensor |
Aug. 25, 2009 |
| 7578189 |
Three-axis accelerometers |
Aug. 25, 2009 |
| 7562573 |
Integrated sensor and circuitry and process therefor |
Jul. 21, 2009 |
| 7555950 |
Capacitive sensor and a method for manufacturing the capacitive sensor |
Jul. 7, 2009 |
| 7552638 |
Accelerometer with reduced extraneous vibrations owing to improved return movement |
Jun. 30, 2009 |
| 7554340 |
Capacitive sensor |
Jun. 30, 2009 |
| 7540192 |
Physical quantity sensor having optical part and method for manufacturing the same |
Jun. 2, 2009 |
| 7533570 |
Electrostatic-capacitance-type acceleration sensor |
May. 19, 2009 |
| 7523665 |
Angular velocity sensor and method for operating the same |
Apr. 28, 2009 |
| 7525322 |
Capacitive physical quantity sensor and diagnosis method |
Apr. 28, 2009 |
| 7520171 |
Micro-electromechanical structure with self-compensation of the thermal drifts caused by thermomechanical stress |
Apr. 21, 2009 |
| 7516661 |
Z offset MEMS device |
Apr. 14, 2009 |
| 7501835 |
Displacement sensor |
Mar. 10, 2009 |
| 7487661 |
Sensor having free fall self-test capability and method therefor |
Feb. 10, 2009 |
| 7484411 |
Three phase capacitance-based sensing and actuation |
Feb. 3, 2009 |
| 7469588 |
MEMS vertical comb drive with improved vibration performance |
Dec. 30, 2008 |
| 7461553 |
Self-calibrating oversampling electromechanical modulator and self-calibration method |
Dec. 9, 2008 |
| 7456731 |
Capacitive-type physical quantity sensor |
Nov. 25, 2008 |
| 7444873 |
Micromachined comb capacitive accelerometer |
Nov. 4, 2008 |
| RE40561 |
Acceleration sensor and process for the production thereof |
Nov. 4, 2008 |
| 7432724 |
Capacitive physical quantity sensor and method of diagnosing the same |
Oct. 7, 2008 |
| 7430915 |
Vibration sensor |
Oct. 7, 2008 |
| 7426861 |
Tuning fork gyroscopes, accelerometers, and other sensors with improved scale factor |
Sep. 23, 2008 |
| 7426863 |
Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor |
Sep. 23, 2008 |
| 7418864 |
Acceleration sensor and method for manufacturing the same |
Sep. 2, 2008 |
| 7412887 |
Multiple axis acceleration sensor |
Aug. 19, 2008 |
| 7412888 |
Accelerometer |
Aug. 19, 2008 |
| 7409862 |
Systems and methods for isolation of torque and sense capacitors of an accelerometer |
Aug. 12, 2008 |
| 7400153 |
Detector with capacitance sensor for detecting object being caught by door |
Jul. 15, 2008 |
| 7398683 |
Capacitive acceleration sensor |
Jul. 15, 2008 |
| RE40347 |
Acceleration sensor and process for the production thereof |
Jun. 3, 2008 |
| 7363816 |
Inertial sensor |
Apr. 29, 2008 |
| 7360425 |
Compensated composite structure |
Apr. 22, 2008 |
| 7355782 |
Systems and methods of controlling micro-electromechanical devices |
Apr. 8, 2008 |
| 7350415 |
Closed-loop comb drive sensor |
Apr. 1, 2008 |
| 7343801 |
Micromechanical capacitive acceleration sensor |
Mar. 18, 2008 |
| 7340955 |
Capacitive acceleration sensor arrangement |
Mar. 11, 2008 |
| 7340956 |
Built-in self test of MEMS |
Mar. 11, 2008 |
| 7337671 |
Capacitive microaccelerometers and fabrication methods |
Mar. 4, 2008 |
| 7334474 |
Force balanced instrument system and method for mitigating errors |
Feb. 26, 2008 |
| 7331229 |
Magnetic null accelerometer |
Feb. 19, 2008 |
| 7322240 |
Micromachined comb capacitive accelerometer |
Jan. 29, 2008 |
| 7296470 |
Extended accuracy flexured plate dual capacitance accelerometer |
Nov. 20, 2007 |
| 7293460 |
Multiple-axis linear accelerometer |
Nov. 13, 2007 |
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