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Class Information
Number: 73/514.18
Name: Measuring and testing > Speed, velocity, or acceleration > Acceleration determination utilizing inertial element > Specific type of electric sensor or specific type of magnetic sensor > Rebalance > Electrostatic restoring means
Description: Subject matter wherein the electrical output signal generates an electrostatic force which returns the inertial member to the null position.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7624638 |
Electrostatic capacitance type acceleration sensor |
Dec. 1, 2009 |
| 7614300 |
System and method for mitigating errors in electrostatic force balanced instrument |
Nov. 10, 2009 |
| 7597002 |
Diamagnetic levitation system |
Oct. 6, 2009 |
| 7578189 |
Three-axis accelerometers |
Aug. 25, 2009 |
| 7562573 |
Integrated sensor and circuitry and process therefor |
Jul. 21, 2009 |
| 7552637 |
Torque driving circuit |
Jun. 30, 2009 |
| 7552638 |
Accelerometer with reduced extraneous vibrations owing to improved return movement |
Jun. 30, 2009 |
| 7481111 |
Micro-electro-mechanical sensor with force feedback loop |
Jan. 27, 2009 |
| 7461553 |
Self-calibrating oversampling electromechanical modulator and self-calibration method |
Dec. 9, 2008 |
| 7451647 |
MEMS sensor driving device, MEMS sensor driving method, and active sensor using MEMS |
Nov. 18, 2008 |
| RE40561 |
Acceleration sensor and process for the production thereof |
Nov. 4, 2008 |
| RE40347 |
Acceleration sensor and process for the production thereof |
Jun. 3, 2008 |
| 7355782 |
Systems and methods of controlling micro-electromechanical devices |
Apr. 8, 2008 |
| 7355318 |
Micromachined device utilizing electrostatic comb drives to filter mechanical vibrations |
Apr. 8, 2008 |
| 7347096 |
Digital accelerometer |
Mar. 25, 2008 |
| 7334474 |
Force balanced instrument system and method for mitigating errors |
Feb. 26, 2008 |
| 7279761 |
Post-release capacitance enhancement in micromachined devices and a method of performing the same |
Oct. 9, 2007 |
| 7243542 |
Closed loop analog gyro rate sensor |
Jul. 17, 2007 |
| 7225674 |
Self-stabilizing, floating microelectromechanical device |
Jun. 5, 2007 |
| 7155979 |
Self-calibrating oversampling electromechanical modulator and self-calibration method |
Jan. 2, 2007 |
| 7134338 |
Sensor with symmetrical limiting of a signal |
Nov. 14, 2006 |
| 7055387 |
Apparatus for and method of sensing a measured input |
Jun. 6, 2006 |
| 6966225 |
Capacitive accelerometer with liquid dielectric |
Nov. 22, 2005 |
| 6962081 |
Semiconductor physical quantity sensor with improved noise resistance |
Nov. 8, 2005 |
| 6895818 |
Differential in-plane tunneling current sensor |
May. 24, 2005 |
| 6871544 |
Sensor design and process |
Mar. 29, 2005 |
| 6848317 |
Method and apparatus for uniformizing output signal levels of micro-electro mechanical systems (MEMS) capacitive sensors |
Feb. 1, 2005 |
| 6792804 |
Sensor for measuring out-of-plane acceleration |
Sep. 21, 2004 |
| 6782748 |
High-G acceleration protection by caging |
Aug. 31, 2004 |
| 6761069 |
Feedback circuit for micromachined accelerometer |
Jul. 13, 2004 |
| 6744264 |
Testing circuit and method for MEMS sensor packaged with an integrated circuit |
Jun. 1, 2004 |
| 6718605 |
Single-side microelectromechanical capacitive accelerometer and method of making same |
Apr. 13, 2004 |
| 6705165 |
High voltage drive circuitry aligned with MEMS array |
Mar. 16, 2004 |
| 6701786 |
Closed loop analog gyro rate sensor |
Mar. 9, 2004 |
| 6691572 |
Acceleration measuring device with pulse width modulation resetting |
Feb. 17, 2004 |
| 6679118 |
Accelerometer and spherical sensor type measuring instrument |
Jan. 20, 2004 |
| 6543286 |
High frequency pulse width modulation driver, particularly useful for electrostatically actuated MEMS array |
Apr. 8, 2003 |
| 6536280 |
Thin film MEMS sensors employing electrical sensing and force feedback |
Mar. 25, 2003 |
| 6530275 |
Feedback circuit for micromachined accelerometer |
Mar. 11, 2003 |
| 6504385 |
Three-axis motion sensor |
Jan. 7, 2003 |
| 6463803 |
Semiconductor mechanical sensor |
Oct. 15, 2002 |
| 6450029 |
Capacitive physical quantity detection device |
Sep. 17, 2002 |
| 6430998 |
Resonant element |
Aug. 13, 2002 |
| 6386032 |
Micro-machined accelerometer with improved transfer characteristics |
May. 14, 2002 |
| 6360602 |
Method and apparatus reducing output noise in a digitally rebalanced accelerometer |
Mar. 26, 2002 |
| 6324910 |
Method and device for measuring a physical variable |
Dec. 4, 2001 |
| 6301965 |
Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state |
Oct. 16, 2001 |
| 6286369 |
Single-side microelectromechanical capacitive acclerometer and method of making same |
Sep. 11, 2001 |
| 6257061 |
Capacitive physical-quantity detection apparatus |
Jul. 10, 2001 |
| 6244112 |
Acceleration sensor and process for the production thereof |
Jun. 12, 2001 |
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