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Class Information
Number: 73/504.15
Name: Measuring and testing > Speed, velocity, or acceleration > Angular rate using gyroscopic or coriolis effect > Vibratory mass > Cantilever
Description: Subject matter wherein the inertial member comprises an elongated member having two ends and wherein only one of the ends is fixed.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7578186 |
Inertial sensor and fabrication method of inertial sensor |
Aug. 25, 2009 |
| 7578187 |
Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor |
Aug. 25, 2009 |
| 7570061 |
Cantilever control device |
Aug. 4, 2009 |
| 7536910 |
Vibration acceleration sensor |
May. 26, 2009 |
| 7514680 |
Apparatus for modifying and measuring diamond and other workpiece surfaces with nanoscale precision |
Apr. 7, 2009 |
| 7437933 |
Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereof |
Oct. 21, 2008 |
| 7401516 |
Vibration gyro sensor element with cantilever vibrator extending from substrate and positioned within opening in substrate |
Jul. 22, 2008 |
| 7325452 |
Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor |
Feb. 5, 2008 |
| 7266998 |
Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
Sep. 11, 2007 |
| 7263884 |
Vibration type gyrosensor device |
Sep. 4, 2007 |
| 7246520 |
Transducer, electronic equipment, and method of adjusting frequency of transducer |
Jul. 24, 2007 |
| 7225101 |
Electronic device, signal compensation device and signal compensation method |
May. 29, 2007 |
| 7197930 |
Gyro sensor |
Apr. 3, 2007 |
| 7107842 |
Angular rate sensor using micro electromechanical haltere |
Sep. 19, 2006 |
| 6918297 |
Miniature 3-dimensional package for MEMS sensors |
Jul. 19, 2005 |
| 6834247 |
Off-set elimination system for a vibrating gyroscope |
Dec. 21, 2004 |
| 6813937 |
Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
Nov. 9, 2004 |
| 6739192 |
Angular velocity sensor |
May. 25, 2004 |
| 6613601 |
Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor |
Sep. 2, 2003 |
| 6561028 |
Mechanical resonator for a rotation sensor |
May. 13, 2003 |
| 6550331 |
Semiconductor mechanical sensor |
Apr. 22, 2003 |
| 6457360 |
High-precision integrated semiconductor peizoresistive detector devices and methods using the same |
Oct. 1, 2002 |
| 6427518 |
Apparatus for ascertaining a rotation rate and for performing a self-test |
Aug. 6, 2002 |
| 6391674 |
Process for fabricating single crystal resonant devices that are compatible with integrated circuit processing |
May. 21, 2002 |
| 6227050 |
Semiconductor mechanical sensor and method of manufacture |
May. 8, 2001 |
| 6199429 |
Vibrating gyroscope with elastic vibration isolator |
Mar. 13, 2001 |
| 6161440 |
Low metalization creep sensor |
Dec. 19, 2000 |
| 6158280 |
Detector for detecting angular velocities about perpendicular axes |
Dec. 12, 2000 |
| 6109105 |
Tunneling-based rate gyros with simple drive and sense axis coupling |
Aug. 29, 2000 |
| 6092417 |
Gyrosensor |
Jul. 25, 2000 |
| 6089087 |
Method for adjusting the temperature characteristic of a vibrating gyroscope |
Jul. 18, 2000 |
| 6053044 |
Vibratory gyroscope |
Apr. 25, 2000 |
| 6049115 |
Scanning probe microscope, and semiconductor distortion sensor for use therein |
Apr. 11, 2000 |
| 6044708 |
Oscillation type gyroscope |
Apr. 4, 2000 |
| 6023974 |
Angular velocity sensor device |
Feb. 15, 2000 |
| 6003372 |
Semiconductor angular velocity determining device |
Dec. 21, 1999 |
| 5952573 |
Micro-beam motion sensor |
Sep. 14, 1999 |
| 5905202 |
Tunneling rotation sensor |
May. 18, 1999 |
| 5859368 |
Tunneling-based rotation rate sensor |
Jan. 12, 1999 |
| 5847487 |
Vibration gyroscope and image blur prevention apparatus using the same |
Dec. 8, 1998 |
| 5796152 |
Cantilevered microstructure |
Aug. 18, 1998 |
| 5796000 |
Vibration angular-velocity sensor and process for producing it |
Aug. 18, 1998 |
| 5756895 |
Tunneling-based rate gyros with simple drive and sense axis coupling |
May. 26, 1998 |
| 5691471 |
Acceleration and angular velocity detector |
Nov. 25, 1997 |
| 5627314 |
Micromachined rate and acceleration sensor |
May. 6, 1997 |
| 5461916 |
Mechanical force sensing semiconductor device |
Oct. 31, 1995 |
| 5445025 |
Angular velocity sensor having a balanced tuning fork structure and the method of manufacture |
Aug. 29, 1995 |
| 5285686 |
Coliolis rate sensor using tunnel-effect displacement sensor |
Feb. 15, 1994 |
| 5284059 |
Rotation sensor |
Feb. 8, 1994 |
| 5193391 |
Controlled vibration angular rate sensor |
Mar. 16, 1993 |
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