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Class Information
Number: 73/504.14
Name: Measuring and testing > Speed, velocity, or acceleration > Angular rate using gyroscopic or coriolis effect > Vibratory mass > Elongated element with spaced supports
Description: Subject matter wherein the inertial member comprises an extended member supported at at least two points along its extent by means for bearing weight.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7546768 |
Mounting structure of angular rate sensor |
Jun. 16, 2009 |
| 7520169 |
Angular rate sensor featuring mechanically decoupled oscillation modes |
Apr. 21, 2009 |
| 7481110 |
Method for quadrature-bias compensation in a Coriolis gyro, as well as a Coriolis gyro which is suitable for this purpose |
Jan. 27, 2009 |
| 7478557 |
Common centroid micromachine driver |
Jan. 20, 2009 |
| 7461552 |
Dual axis rate sensor |
Dec. 9, 2008 |
| 7444868 |
Force rebalancing for MEMS inertial sensors using time-varying voltages |
Nov. 4, 2008 |
| 7444869 |
Force rebalancing and parametric amplification of MEMS inertial sensors |
Nov. 4, 2008 |
| 7421897 |
Cross-quad and vertically coupled inertial sensors |
Sep. 9, 2008 |
| 7421898 |
Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object |
Sep. 9, 2008 |
| 7401397 |
Method of producing an inertial sensor |
Jul. 22, 2008 |
| 7394326 |
Quartz oscillator manufacturing method and quartz oscillator |
Jul. 1, 2008 |
| 7392702 |
Method for modifying the location of nodal points of a vibrating beam |
Jul. 1, 2008 |
| 7389690 |
Micro-gyrometer with frequency detection |
Jun. 24, 2008 |
| 7383729 |
Tuning fork gyro with sense plate read-out |
Jun. 10, 2008 |
| 7377167 |
Nonresonant micromachined gyroscopes with structural mode-decoupling |
May. 27, 2008 |
| 7357025 |
Micromachined apparatus with co-linear drive arrays |
Apr. 15, 2008 |
| 7350415 |
Closed-loop comb drive sensor |
Apr. 1, 2008 |
| 7347094 |
Coupling apparatus for inertial sensors |
Mar. 25, 2008 |
| 7340954 |
Method for measurement of rotation rates/accelerations using a rotation rate coriolis gyro, as well as a coriolis gyro which is suitable for this purpose |
Mar. 11, 2008 |
| 7340956 |
Built-in self test of MEMS |
Mar. 11, 2008 |
| 7322238 |
Support of vibrating beam near nodal point |
Jan. 29, 2008 |
| 7318348 |
Angular rate sensor and mounting structure of angular rate sensor |
Jan. 15, 2008 |
| 7302847 |
Physical quantity sensor having movable portion |
Dec. 4, 2007 |
| 7296467 |
Angular velocity sensor |
Nov. 20, 2007 |
| 7287428 |
Inertial sensor with a linear array of sensor elements |
Oct. 30, 2007 |
| 7284430 |
Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator |
Oct. 23, 2007 |
| 7276834 |
Electrostatically oscillated device |
Oct. 2, 2007 |
| 7270003 |
BMEMS-type high-sensitivity inertial sensor and manufacturing process thereof |
Sep. 18, 2007 |
| 7267005 |
SOI-MEMS gyroscope having three-fold symmetry |
Sep. 11, 2007 |
| 7267004 |
Inertial micromechanical tuning-fork gyrometer |
Sep. 11, 2007 |
| 7258010 |
MEMS device with thinned comb fingers |
Aug. 21, 2007 |
| 7258008 |
Micro-electro-mechanical gyroscope having electrically insulated regions |
Aug. 21, 2007 |
| 7240552 |
Torsional rate sensor with momentum balance and mode decoupling |
Jul. 10, 2007 |
| 7232700 |
Integrated all-Si capacitive microgyro with vertical differential sense and control and process for preparing an integrated all-Si capacitive microgyro with vertical differential sense |
Jun. 19, 2007 |
| 7228738 |
Torsional rate sensor with momentum balance and mode decoupling |
Jun. 12, 2007 |
| 7222533 |
Torsional rate sensor with momentum balance and mode decoupling |
May. 29, 2007 |
| 7225101 |
Electronic device, signal compensation device and signal compensation method |
May. 29, 2007 |
| 7216539 |
Micromachined apparatus with split vibratory masses |
May. 15, 2007 |
| 7210348 |
Semiconductor dynamic quantity sensor |
May. 1, 2007 |
| 7210349 |
Drive circuit of oscillation gyro |
May. 1, 2007 |
| 7204144 |
Micromachined apparatus with drive/sensing fingers in coupling levers |
Apr. 17, 2007 |
| 7201053 |
Capacitance type physical quantity sensor |
Apr. 10, 2007 |
| 7202100 |
Method of manufacturing a cloverleaf microgyroscope and cloverleaf microgyroscope |
Apr. 10, 2007 |
| 7197929 |
Motion-responsive coupled masses |
Apr. 3, 2007 |
| 7194905 |
Acceleration sensor |
Mar. 27, 2007 |
| 7191653 |
Tuning fork vibratory MEMS gyroscope |
Mar. 20, 2007 |
| 7174785 |
Oscillation of vibrating beam in a first direction for a first time period and a second direction for a second time period to sense angular rate of the vibrating beam |
Feb. 13, 2007 |
| 7159460 |
Micromachined gyroscopic sensor with detection in the plane of the machined wafer |
Jan. 9, 2007 |
| 7155976 |
Rotation sensing apparatus and method for manufacturing the same |
Jan. 2, 2007 |
| 7155977 |
Semiconductor dynamic quantity sensor |
Jan. 2, 2007 |
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