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Class Information
Number: 73/504.12
Name: Measuring and testing > Speed, velocity, or acceleration > Angular rate using gyroscopic or coriolis effect > Vibratory mass
Description: Subject matter wherein the inertial member is caused to rapidly reciprocate or oscillate about an axis of motion.


Sub-classes under this class:

Class Number Class Name Patents
73/504.15 Cantilever 56
73/504.14 Elongated element with spaced supports 198
73/504.13 Hollow circular-shaped inertial element 115


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12

Patent Number Title Of Patent Date Issued
7624494 Method of fabricating a mesoscaled resonator Dec. 1, 2009
7621183 X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging Nov. 24, 2009
7603903 Vibration-type angular rate sensor Oct. 20, 2009
7591179 Micromechanical motion sensor Sep. 22, 2009
7581443 Disc resonator gyroscopes Sep. 1, 2009
7578187 Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor Aug. 25, 2009
7578186 Inertial sensor and fabrication method of inertial sensor Aug. 25, 2009
7571648 Piezoelectric vibration angular velocity sensor Aug. 11, 2009
7565839 Bias and quadrature reduction in class II coriolis vibratory gyros Jul. 28, 2009
7555949 Angular velocity measuring device Jul. 7, 2009
7549334 Small angle bias measurement mechanism for MEMS instruments Jun. 23, 2009
7546768 Mounting structure of angular rate sensor Jun. 16, 2009
7543496 Capacitive bulk acoustic wave disk gyroscopes Jun. 9, 2009
7536910 Vibration acceleration sensor May. 26, 2009
7523663 Micromechanical rotation rate sensor having error suppression Apr. 28, 2009
7520169 Angular rate sensor featuring mechanically decoupled oscillation modes Apr. 21, 2009
7514286 Method for forming individual semi-conductor devices Apr. 7, 2009
7513155 Inertial sensor Apr. 7, 2009
7513140 Sensing circuit for vibration type of angular rate sensor Apr. 7, 2009
7497117 Angular velocity mount arrangement Mar. 3, 2009
7493814 Vibratory gyroscope with parasitic mode damping Feb. 24, 2009
7484410 Gyro sensor and sensor apparatus using same Feb. 3, 2009
7481111 Micro-electro-mechanical sensor with force feedback loop Jan. 27, 2009
7481110 Method for quadrature-bias compensation in a Coriolis gyro, as well as a Coriolis gyro which is suitable for this purpose Jan. 27, 2009
7481112 Silicon inertial sensors formed using MEMS Jan. 27, 2009
7478557 Common centroid micromachine driver Jan. 20, 2009
7464590 Digitally programmable bandwidth for vibratory rate gyroscope Dec. 16, 2008
7461552 Dual axis rate sensor Dec. 9, 2008
7458263 Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging Dec. 2, 2008
7454971 Oscillating micro-mechanical sensor of angular velocity Nov. 25, 2008
7444870 Angular velocity sensor having one amplifying circuit for amplifying plural detection signals Nov. 4, 2008
7444869 Force rebalancing and parametric amplification of MEMS inertial sensors Nov. 4, 2008
7444868 Force rebalancing for MEMS inertial sensors using time-varying voltages Nov. 4, 2008
7441458 Systems for measuring physical quantities Oct. 28, 2008
7441459 Tuning-fork type transducer for angular-speed sensor, angular-speed sensor using the same transducer, and automotive vehicle using the same angular-speed sensor Oct. 28, 2008
7437933 Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereof Oct. 21, 2008
7437932 Gyro vibration piece and gyro sensor Oct. 21, 2008
7421897 Cross-quad and vertically coupled inertial sensors Sep. 9, 2008
7421898 Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object Sep. 9, 2008
7415879 Angular velocity sensor and angular velocity detector Aug. 26, 2008
7412885 Vibrating gyro element, support structure of vibrating gyro element, and gyro sensor Aug. 19, 2008
7411465 AGC circuit for the reduction of harmonics in the drive signal Aug. 12, 2008
7406866 Micromachined devices Aug. 5, 2008
7406867 G2-Gyroscope: MEMS gyroscope with output oscillation about the normal to the plane Aug. 5, 2008
7401517 Dual-axis yaw rate sensing unit having a tuning fork gyroscope arrangement Jul. 22, 2008
7401516 Vibration gyro sensor element with cantilever vibrator extending from substrate and positioned within opening in substrate Jul. 22, 2008
7401397 Method of producing an inertial sensor Jul. 22, 2008
7401515 Adaptive circuits and methods for reducing vibration or shock induced errors in inertial sensors Jul. 22, 2008
7392702 Method for modifying the location of nodal points of a vibrating beam Jul. 1, 2008
7394326 Quartz oscillator manufacturing method and quartz oscillator Jul. 1, 2008

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