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Class Information
Number: 73/204.26
Name: Measuring and testing > Volume or rate of flow > Thermal type > Having particular electrical heating, cooling, or thermal sensing element > Resistive element > With substrate carrier (e.g., thin film)
Description: Subject matter in which the resistive element is formed as a thin layer which is mounted upon a side of a solid element.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7621180 |
Flow sensor with metal film resistor |
Nov. 24, 2009 |
| 7617723 |
Thermal type flow rate measuring apparatus having decrease in coupling capacitance between wiring portions of detection element |
Nov. 17, 2009 |
| 7610803 |
Robust MEMS flow die with integrated protective flow channel |
Nov. 3, 2009 |
| 7603898 |
MEMS structure for flow sensor |
Oct. 20, 2009 |
| 7574910 |
Non-contact condensation detecting method and non-contact condensation detecting apparatus |
Aug. 18, 2009 |
| 7568399 |
Microfluidic device |
Aug. 4, 2009 |
| 7555944 |
Physical quantity sensor |
Jul. 7, 2009 |
| 7536908 |
Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methods |
May. 26, 2009 |
| 7533564 |
Micro sample heating apparatus and method of making the same |
May. 19, 2009 |
| 7526955 |
Flow meter and exhaust gas recirculation system using the same |
May. 5, 2009 |
| 7520051 |
Packaging methods and systems for measuring multiple measurands including bi-directional flow |
Apr. 21, 2009 |
| 7513149 |
Robust MEMS flow die with integrated protective flow channel |
Apr. 7, 2009 |
| 7500392 |
Solid state microanemometer device and method of fabrication |
Mar. 10, 2009 |
| 7490512 |
Detector of low levels of gas pressure and flow |
Feb. 17, 2009 |
| 7487675 |
Micro-heater and sensor |
Feb. 10, 2009 |
| 7478556 |
Apparatus for the rapid measurement of temperatures in a hot gas flow |
Jan. 20, 2009 |
| 7472592 |
Airflow meter |
Jan. 6, 2009 |
| 7472591 |
Thermal gas flow and control device for internal-combustion engine using the same |
Jan. 6, 2009 |
| 7469583 |
Flow sensor |
Dec. 30, 2008 |
| 7451537 |
Method for fabricating a microscale anemometer |
Nov. 18, 2008 |
| 7435614 |
Method for treating a structure to obtain an internal space and structure having an internal space |
Oct. 14, 2008 |
| 7426857 |
Flow detector element of thermosensible flow sensor |
Sep. 23, 2008 |
| 7409859 |
Thermal type flow measuring apparatus |
Aug. 12, 2008 |
| 7404320 |
Flow sensor using a heat element and a resistance temperature detector formed of a metal film |
Jul. 29, 2008 |
| 7404321 |
Sensor device having a buffer element between the molding and the sensing element |
Jul. 29, 2008 |
| 7401399 |
Method of manufacturing a substrate heating device |
Jul. 22, 2008 |
| 7395707 |
Thermal type flow rate measuring apparatus |
Jul. 8, 2008 |
| 7395706 |
Micro sample heating apparatus and method of making the same |
Jul. 8, 2008 |
| 7373816 |
Printed-circuit board having a plastic part for accommodating a measuring device |
May. 20, 2008 |
| 7363810 |
Corrosion resistant metal made thermal type mass flow rate sensor and a fluid supply device using the same |
Apr. 29, 2008 |
| 7360416 |
Non-contact condensation detecting apparatus |
Apr. 22, 2008 |
| 7360415 |
Thermal type air flow meter having semiconductor sensor elements with similar diaphragm sizes |
Apr. 22, 2008 |
| 7337661 |
Thermal fluid flow meter having heat-generating resistor and temperature adjuster therefor |
Mar. 4, 2008 |
| 7331224 |
Tilt-insensitive flow sensor |
Feb. 19, 2008 |
| 7305878 |
Sensor equipment having sensing portion and method for manufacturing the same |
Dec. 11, 2007 |
| 7302838 |
System and method for closed loop control of boundary layer shear stress |
Dec. 4, 2007 |
| 7302845 |
Method for measurement of gas flow velocity, method for energy conversion using gas flow over solid material, and device therefor |
Dec. 4, 2007 |
| 7287424 |
Thermal type flow measurement apparatus having asymmetrical passage for flow rate measurement |
Oct. 30, 2007 |
| 7284424 |
Thermal air flow rate measuring apparatus and its flowmeter and internal combustion engine and thermal air flow rate measuring method using it |
Oct. 23, 2007 |
| 7278308 |
Thermal isolation between heating and sensing for flow sensors |
Oct. 9, 2007 |
| 7278309 |
Interdigitated, full wheatstone bridge flow sensor transducer |
Oct. 9, 2007 |
| 7270000 |
Fluid flow sensor and fluid flow measurement device |
Sep. 18, 2007 |
| 7263882 |
Fluid system and method of assessing a property of a fluid flowing therein |
Sep. 4, 2007 |
| 7258003 |
Flow sensor with self-aligned flow channel |
Aug. 21, 2007 |
| 7255001 |
Thermal fluid flow sensor and method of forming same technical field |
Aug. 14, 2007 |
| 7251995 |
Fluid flow sensor |
Aug. 7, 2007 |
| 7248942 |
Airflow detection system having an airflow indicating device |
Jul. 24, 2007 |
| 7234237 |
Method for producing a protective cover for a device |
Jun. 26, 2007 |
| 7228735 |
Fluid sensing device with integrated bypass and process therefor |
Jun. 12, 2007 |
| 7219544 |
Thermal-type flow rate sensor and manufacturing method thereof |
May. 22, 2007 |
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