| |
 |
|
Class Information
Number: 700/121
Name: Data processing: generic control systems or specific applications > Specific application, apparatus or process > Product assembly or manufacturing > Particular manufactured product or operation > Integrated circuit production or semiconductor fabrication
Description: Subject matter wherein the particular manufactured product or operation is related to the production or design of electronic circuitry mounted on a substrate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7363107 |
Substrate transfer system |
Apr. 22, 2008 |
| 7363099 |
Integrated circuit metrology |
Apr. 22, 2008 |
| 7363098 |
Method to identify machines causing excursion in semiconductor manufacturing |
Apr. 22, 2008 |
| 7363097 |
Automatic design apparatus, automatic design method, and automatic design program of digital circuit |
Apr. 22, 2008 |
| 7360179 |
Use of models in integrated circuit fabrication |
Apr. 15, 2008 |
| 7359840 |
Remote order acceptance design system and elevator remote order acceptance method |
Apr. 15, 2008 |
| 7359759 |
Method and system for virtual metrology in semiconductor manufacturing |
Apr. 15, 2008 |
| 7356380 |
Process control method |
Apr. 8, 2008 |
| 7356377 |
System, method, and medium for monitoring performance of an advanced process control system |
Apr. 8, 2008 |
| 7355728 |
Optical metrology model optimization for repetitive structures |
Apr. 8, 2008 |
| 7353594 |
Component mounting method |
Apr. 8, 2008 |
| 7353078 |
Semiconductor wafer processing apparatus and method for processing batch of wafers having variable number of wafer lots |
Apr. 1, 2008 |
| 7353077 |
Methods for optimizing die placement |
Apr. 1, 2008 |
| 7353076 |
Vacuum processing method and vacuum processing apparatus |
Apr. 1, 2008 |
| 7352478 |
Assessment and optimization for metrology instrument |
Apr. 1, 2008 |
| 7349752 |
Dynamically coupled metrology and lithography |
Mar. 25, 2008 |
| 7349750 |
Method for optimizing an industrial product, system for optimizing an industrial product and method for manufacturing an industrial product |
Mar. 25, 2008 |
| 7347900 |
Chemical vapor deposition apparatus and method |
Mar. 25, 2008 |
| 7346883 |
System and method for integrated data transfer, archiving and purging of semiconductor wafer data |
Mar. 18, 2008 |
| 7346876 |
ASIC having dense mask-programmable portion and related system development method |
Mar. 18, 2008 |
| 7346420 |
Component feeder exchange diagnostic tool |
Mar. 18, 2008 |
| 7346419 |
Component feeder exchange diagnostic tool |
Mar. 18, 2008 |
| 7346414 |
Moving mechanism and stage system in exposure apparatus |
Mar. 18, 2008 |
| 7346412 |
Manufacturing method of semiconductor integrated circuit device |
Mar. 18, 2008 |
| 7343698 |
Reduced pressure drying apparatus and reduced pressure drying method |
Mar. 18, 2008 |
| 7343583 |
System and method for searching for patterns of semiconductor wafer features in semiconductor wafer data |
Mar. 11, 2008 |
| 7343217 |
System for monitoring and controlling a semiconductor manufacturing apparatus using prediction model equation |
Mar. 11, 2008 |
| 7343214 |
Die-level traceability mechanism for semiconductor assembly and test facility |
Mar. 11, 2008 |
| 7341822 |
Time-optimal setpoint generator in a lithographic apparatus |
Mar. 11, 2008 |
| 7340359 |
Augmenting semiconductor's devices quality and reliability |
Mar. 4, 2008 |
| 7340320 |
Method of recipe control operation |
Mar. 4, 2008 |
| 7340318 |
Method and apparatus for assessing controller performance |
Mar. 4, 2008 |
| 7337149 |
System and methodology for calculating the cost of future semiconductor products using regression analysis of historical cost data |
Feb. 26, 2008 |
| 7337034 |
Method and apparatus for determining a root cause of a statistical process control failure |
Feb. 26, 2008 |
| 7337019 |
Integration of fault detection with run-to-run control |
Feb. 26, 2008 |
| 7335266 |
Method of forming a controlled and uniform lightly phosphorous doped silicon film |
Feb. 26, 2008 |
| 7334205 |
Optimization of die placement on wafers |
Feb. 19, 2008 |
| 7333875 |
Method of predicting CMP removal rate for CMP process in a CMP process tool in order to determine a required polishing time |
Feb. 19, 2008 |
| 7333871 |
Automated design and execution of experiments with integrated model creation for semiconductor manufacturing tools |
Feb. 19, 2008 |
| 7333867 |
Substrate processing system managing apparatus information of substrate processing apparatus |
Feb. 19, 2008 |
| 7332037 |
Numerical jet machine for the application of a coating onto a substrate |
Feb. 19, 2008 |
| 7330502 |
Input/output circuit and semiconductor integrated circuit |
Feb. 12, 2008 |
| 7329168 |
Extended Kalman filter incorporating offline metrology |
Feb. 12, 2008 |
| 7327475 |
Measuring a process parameter of a semiconductor fabrication process using optical metrology |
Feb. 5, 2008 |
| 7324866 |
Method for manufacturing semiconductor device |
Jan. 29, 2008 |
| 7324865 |
Run-to-run control method for automated control of metal deposition processes |
Jan. 29, 2008 |
| 7324863 |
Automatically selecting wafers for review |
Jan. 29, 2008 |
| 7324193 |
Measuring a damaged structure formed on a wafer using optical metrology |
Jan. 29, 2008 |
| 7321805 |
Production managing system of semiconductor device |
Jan. 22, 2008 |
| 7319938 |
Method and system for processing commonality of semiconductor devices |
Jan. 15, 2008 |
|
|
|
