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Class Information
Number: 700/121
Name: Data processing: generic control systems or specific applications > Specific application, apparatus or process > Product assembly or manufacturing > Particular manufactured product or operation > Integrated circuit production or semiconductor fabrication
Description: Subject matter wherein the particular manufactured product or operation is related to the production or design of electronic circuitry mounted on a substrate.

Patents under this class:

Patent Number Title Of Patent Date Issued
8713489 Simulation parameter correction technique Apr. 29, 2014
8712572 Electronic component mounting machine and operating instruction method for the same Apr. 29, 2014
8712571 Method and apparatus for wireless transmission of diagnostic information Apr. 29, 2014
8712568 Substrate processing apparatus and display method of substrate processing apparatus Apr. 29, 2014
8707231 Method and system for derived layer checking for semiconductor device design Apr. 22, 2014
8707222 Lithography mask functional optimization and spatial frequency analysis Apr. 22, 2014
8707221 Circuit assembly yield prediction with respect to manufacturing process Apr. 22, 2014
8694929 Method and apparatus for the position determination of structures on a mask for microlithography Apr. 8, 2014
8694927 Method of designing pattern layouts Apr. 8, 2014
8694148 Tracking and marking specimens having defects formed during laser via drilling Apr. 8, 2014
8694145 Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles Apr. 8, 2014
8694144 Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing Apr. 8, 2014
8694131 System and method for controlling operations of vapor compression system Apr. 8, 2014
8691336 Coating treatment method, non-transitory computer storage medium and coating treatment apparatus Apr. 8, 2014
8689434 Integrated circuit manufacturing system Apr. 8, 2014
8689157 Extracting capacitance and resistance from FinFET devices Apr. 1, 2014
8688256 Advanced process control system and method utilizing virtual metrology with reliance index Apr. 1, 2014
8685265 Manufacturing method of semiconductor device and semiconductor manufacturing apparatus Apr. 1, 2014
8682466 Automatic virtual metrology for semiconductor wafer result prediction Mar. 25, 2014
8676538 Adjusting weighting of a parameter relating to fault detection based on a detected fault Mar. 18, 2014
8676537 Portable wireless sensor Mar. 18, 2014
8670857 Flexible process condition monitoring Mar. 11, 2014
8670854 Method for monitoring sequencing of a control recipe for a batch process Mar. 11, 2014
8667430 Methods for directed self-assembly process/proximity correction Mar. 4, 2014
8667428 Methods for directed self-assembly process/proximity correction Mar. 4, 2014
8666703 Method for automated determination of an optimally parameterized scatterometry model Mar. 4, 2014
8666532 Method and system for controlling a manufacturing process Mar. 4, 2014
8664060 Semiconductor structure and method of fabricating the same Mar. 4, 2014
8664013 Continuous processing system, continuous processing method, and program Mar. 4, 2014
8656320 Method for creating a photolithography mask Feb. 18, 2014
8655472 Scheduler, substrate processing apparatus, and method of transferring substrates in substrate processing apparatus Feb. 18, 2014
8655471 Impurity amount control system for manufacturing single crystal and impurity amount control method for manufacturing single crystal Feb. 18, 2014
8655469 Advanced process control optimization Feb. 18, 2014
8649896 Manufacturing method of semiconductor device Feb. 11, 2014
8649893 Semiconductor manufacturing device, semiconductor device manufacturing method, simulation device, and simulation program Feb. 11, 2014
8639379 Detecting device and detecting method Jan. 28, 2014
8639377 Metrology for GST film thickness and phase Jan. 28, 2014
8639367 Substrate processing system Jan. 28, 2014
8627949 Transmission mechanism and surface mount device using the same Jan. 14, 2014
8627243 Methods for optimizing conductor patterns for ECP and CMP in semiconductor processing Jan. 7, 2014
8626330 Atomic layer deposition apparatus Jan. 7, 2014
8626328 Discrete sampling based nonlinear control system Jan. 7, 2014
8623672 Prediction and scheduling server Jan. 7, 2014
8621410 Multiprocessor computer system and method having at least one processor with a dynamically reconfigurable instruction set Dec. 31, 2013
8620776 Self healing andon system and method Dec. 31, 2013
8620468 Method and apparatus for developing, improving and verifying virtual metrology models in a manufacturing system Dec. 31, 2013
8612045 Optimization method and a lithographic cell Dec. 17, 2013
8612043 Yield prediction feedback for controlling an equipment engineering system Dec. 17, 2013
8606394 Robot and conveying system Dec. 10, 2013
8600543 Apparatus and method for controlling temperature of semiconductor wafers Dec. 3, 2013

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