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Class Information
Number: 700/121
Name: Data processing: generic control systems or specific applications > Specific application, apparatus or process > Product assembly or manufacturing > Particular manufactured product or operation > Integrated circuit production or semiconductor fabrication
Description: Subject matter wherein the particular manufactured product or operation is related to the production or design of electronic circuitry mounted on a substrate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7433751 |
Sorting a group of integrated circuit devices for those devices requiring special testing |
Oct. 7, 2008 |
| 7433750 |
Data tracking method and system applied in semiconductor manufacturing |
Oct. 7, 2008 |
| 7433749 |
Adhesive system configuration tool |
Oct. 7, 2008 |
| 7430731 |
Method for electrochemically fabricating three-dimensional structures including pseudo-rasterization of data |
Sep. 30, 2008 |
| 7428044 |
Drift compensation for an optical metrology tool |
Sep. 23, 2008 |
| 7426421 |
Methods and systems for transport system (TS) integration |
Sep. 16, 2008 |
| 7426419 |
Scheduling system and method |
Sep. 16, 2008 |
| 7425172 |
Customized polish pads for chemical mechanical planarization |
Sep. 16, 2008 |
| 7424339 |
Method and system for acquiring delivery position data of carrying apparatus |
Sep. 9, 2008 |
| 7423288 |
Technique for evaluating a fabrication of a die and wafer |
Sep. 9, 2008 |
| 7418694 |
Method for generating test patterns utilized in manufacturing semiconductor device |
Aug. 26, 2008 |
| 7418305 |
Method of generating a component of a component-based automation system |
Aug. 26, 2008 |
| 7415319 |
Lithographic apparatus and device manufacturing method |
Aug. 19, 2008 |
| 7415318 |
Method and apparatus for manufacturing semiconductor device |
Aug. 19, 2008 |
| 7415317 |
Method and system for correlating and combining production and non-production data for analysis |
Aug. 19, 2008 |
| 7415316 |
Method and system for modeling a stream of products in a manufacturing environment by process and tool categorization |
Aug. 19, 2008 |
| 7415312 |
Process module tuning |
Aug. 19, 2008 |
| 7412299 |
Process for determining the temperature of a semiconductor wafer in a rapid heating unit |
Aug. 12, 2008 |
| 7409306 |
System and method for estimating reliability of components for testing and quality optimization |
Aug. 5, 2008 |
| 7409260 |
Substrate thickness measuring during polishing |
Aug. 5, 2008 |
| 7409253 |
System and method for processing a substrate and program therefor |
Aug. 5, 2008 |
| 7409249 |
Error display system |
Aug. 5, 2008 |
| 7406360 |
Method for detecting transfer shift of transfer mechanism and semiconductor processing equipment |
Jul. 29, 2008 |
| 7404167 |
Method for improving design window |
Jul. 22, 2008 |
| 7403882 |
Material handling system enabling enhanced data consistency and method thereof |
Jul. 22, 2008 |
| 7403834 |
Methods of and apparatuses for controlling process profiles |
Jul. 22, 2008 |
| 7403832 |
Method and system for advanced process control including tool dependent machine constants |
Jul. 22, 2008 |
| 7403831 |
Manufacturing apparatus, processing method and device manufacturing method |
Jul. 22, 2008 |
| 7403259 |
Lithographic processing cell, lithographic apparatus, track and device manufacturing method |
Jul. 22, 2008 |
| 7401319 |
Method and system for reticle-wide hierarchy management for representational and computational reuse in integrated circuit layout design |
Jul. 15, 2008 |
| 7400934 |
Methods and apparatus for polishing control |
Jul. 15, 2008 |
| 7399364 |
Hermetic cap layers formed on low-.kappa. films by plasma enhanced chemical vapor deposition |
Jul. 15, 2008 |
| 7395518 |
Back end of line clone test vehicle |
Jul. 1, 2008 |
| 7395131 |
Method for processing data based on the data context |
Jul. 1, 2008 |
| 7395130 |
Method and system for aggregating and combining manufacturing data for analysis |
Jul. 1, 2008 |
| 7395129 |
Method for optimization of an order of component mounting, apparatus using the same, and mounter |
Jul. 1, 2008 |
| 7392106 |
Fabrication system and fabrication method |
Jun. 24, 2008 |
| 7392104 |
Material reservation distribution system and method |
Jun. 24, 2008 |
| 7389155 |
Method and system for improved trajectory planning and execution |
Jun. 17, 2008 |
| 7388979 |
Method and apparatus for inspecting pattern defects |
Jun. 17, 2008 |
| 7387866 |
Photolithography process using multiple anti-reflective coatings |
Jun. 17, 2008 |
| 7386420 |
Data analysis method for integrated circuit process and semiconductor process |
Jun. 10, 2008 |
| 7383095 |
Integration system and the method for operating the same |
Jun. 3, 2008 |
| 7383093 |
Substrate processing apparatus and substrate processing method |
Jun. 3, 2008 |
| 7379785 |
Substrate processing system, coating/developing apparatus, and substrate processing apparatus |
May. 27, 2008 |
| 7376481 |
Methods and control systems for controlling semiconductor device manufacturing processes |
May. 20, 2008 |
| 7376260 |
Method for post-OPC multi layer overlay quality inspection |
May. 20, 2008 |
| 7375035 |
Host and ancillary tool interface methodology for distributed processing |
May. 20, 2008 |
| 7373216 |
Method and apparatus for verifying a site-dependent wafer |
May. 13, 2008 |
| 7373215 |
Transistor gate shape metrology using multiple data sources |
May. 13, 2008 |
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