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Class Information
Number: 700/121
Name: Data processing: generic control systems or specific applications > Specific application, apparatus or process > Product assembly or manufacturing > Particular manufactured product or operation > Integrated circuit production or semiconductor fabrication
Description: Subject matter wherein the particular manufactured product or operation is related to the production or design of electronic circuitry mounted on a substrate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7620511 |
Method for determining plasma characteristics |
Nov. 17, 2009 |
| 7620470 |
Method and apparatus for impasse detection and resolution |
Nov. 17, 2009 |
| 7620459 |
Controlling and operating technical processes |
Nov. 17, 2009 |
| 7618832 |
Semiconductor substrate having reference semiconductor chip and method of assembling semiconductor chip using the same |
Nov. 17, 2009 |
| 7618203 |
Substrate processing method, substrate processing apparatus, and computer readable storage medium |
Nov. 17, 2009 |
| 7613598 |
Global shape definition method for scatterometry |
Nov. 3, 2009 |
| 7613535 |
Independent, self-contained, risk isolated, sectional CIM design for extremely large scale factory operation |
Nov. 3, 2009 |
| 7613534 |
Web based semiconductor ordering architecture |
Nov. 3, 2009 |
| 7610111 |
Method and system for wafer lot order |
Oct. 27, 2009 |
| 7603196 |
Methods and apparatus for material control system interface |
Oct. 13, 2009 |
| 7603195 |
Methods and apparatus for integrating large and small lot electronic device fabrication facilities |
Oct. 13, 2009 |
| 7603194 |
Fabrication system and fabrication method |
Oct. 13, 2009 |
| 7599757 |
System and methods for automatic generation of component data |
Oct. 6, 2009 |
| 7597492 |
Coating and developing system, coating and developing method and storage medium |
Oct. 6, 2009 |
| 7596423 |
Method and apparatus for verifying a site-dependent procedure |
Sep. 29, 2009 |
| 7596422 |
Determining one or more profile parameters of a structure using optical metrology and a correlation between profile models and key profile shape variables |
Sep. 29, 2009 |
| 7596421 |
Process control system, process control method, and method of manufacturing electronic apparatus |
Sep. 29, 2009 |
| 7596420 |
Device manufacturing method and computer program product |
Sep. 29, 2009 |
| 7592611 |
Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beam |
Sep. 22, 2009 |
| 7590966 |
Data path for high performance pattern generator |
Sep. 15, 2009 |
| 7588949 |
Optical metrology model optimization based on goals |
Sep. 15, 2009 |
| 7587700 |
Process monitoring system and method for processing a large number of sub-micron measurement targets |
Sep. 8, 2009 |
| 7587300 |
Parts management system and method and parts management program and storage medium |
Sep. 8, 2009 |
| 7585202 |
Computer-implemented method for process control in chemical mechanical polishing |
Sep. 8, 2009 |
| 7584012 |
Automatic defect review and classification system |
Sep. 1, 2009 |
| 7583833 |
Method and apparatus for manufacturing data indexing |
Sep. 1, 2009 |
| 7577493 |
Temperature regulating method, thermal processing system and semiconductor device manufacturing method |
Aug. 18, 2009 |
| 7577487 |
Methods and apparatus for a band to band transfer module |
Aug. 18, 2009 |
| 7576832 |
Lithographic apparatus and device manufacturing method |
Aug. 18, 2009 |
| 7575382 |
Coating/developing apparatus and operation method thereof |
Aug. 18, 2009 |
| 7574280 |
Automatic material handling system, production system for semiconductor device, and production management method for semiconductor device |
Aug. 11, 2009 |
| 7574278 |
Scheduling system and method |
Aug. 11, 2009 |
| 7571021 |
Method and system for improving critical dimension uniformity |
Aug. 4, 2009 |
| 7571020 |
Method and system for controlling process tools by interrupting process jobs depending on job priority |
Aug. 4, 2009 |
| 7571019 |
Integrated configuration, flow and execution system for semiconductor device experimental flows and production flows |
Aug. 4, 2009 |
| 7571017 |
Intelligent data multiplexer |
Aug. 4, 2009 |
| 7569402 |
Chip data providing system and chip data providing server used therefore |
Aug. 4, 2009 |
| 7567851 |
Method and system for dynamically changing the transport sequencing in a cluster tool |
Jul. 28, 2009 |
| 7565220 |
Targeted data collection architecture |
Jul. 21, 2009 |
| 7565219 |
Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby |
Jul. 21, 2009 |
| 7563043 |
Coating/developing apparatus and substrate transfer method |
Jul. 21, 2009 |
| 7562337 |
OPC verification using auto-windowed regions |
Jul. 14, 2009 |
| 7561938 |
Method for using data regarding manufacturing procedures integrated circuits (ICS) have undergone, such as repairs, to select procedures the ICs will undergo, such as additional repairs |
Jul. 14, 2009 |
| 7560946 |
Method of acceptance for semiconductor devices |
Jul. 14, 2009 |
| 7560376 |
Method for adjoining adjacent coatings on a processing element |
Jul. 14, 2009 |
| 7559138 |
Method for replacing defective PCB from PCB panel |
Jul. 14, 2009 |
| 7558643 |
Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby |
Jul. 7, 2009 |
| 7558641 |
Recipe report card framework and methods thereof |
Jul. 7, 2009 |
| 7556899 |
System for controlling an overlay, method for controlling overlay, and method for manufacturing a semiconductor device |
Jul. 7, 2009 |
| 7556246 |
Unloading method of object, program storage medium, and mounting mechanism |
Jul. 7, 2009 |
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