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Class Information
Number: 55/DIG.15
Name: Gas separation > Cold traps
Description:










Patents under this class:

Patent Number Title Of Patent Date Issued
8512452 Hot-trap assembly for trapping unreacted gas by-products Aug. 20, 2013
8404028 Vacuum trap labyrinth Mar. 26, 2013
8092580 Condensation process and containment vessel Jan. 10, 2012
8016904 Oil fill cap with air/oil separator Sep. 13, 2011
7988755 Byproduct collecting apparatus of semiconductor apparatus Aug. 2, 2011
7914603 Particle trap for a plasma source Mar. 29, 2011
7867312 Trap device Jan. 11, 2011
7862638 Gas supply system for semiconductor manufacturing apparatus Jan. 4, 2011
7780767 Condensation process and condenser Aug. 24, 2010
7727296 Collecting unit for semiconductor process Jun. 1, 2010
7591985 Method for purifying germanium hydrides Sep. 22, 2009
7488374 Trapping device, processing system, and method removing impurities Feb. 10, 2009
7425224 High pressure chemical vapor trapping method Sep. 16, 2008
7329306 Process for safe membrane operation Feb. 12, 2008
7217306 Trap apparatus May. 15, 2007
7044997 Process byproduct trap, methods of use, and system including same May. 16, 2006
6966936 Processing system, evacuating system for processing system, low-pressure CVD system, and evacuating system and trapping device for low-pressure CVD system Nov. 22, 2005
6908499 Cold trap for CVD furnace Jun. 21, 2005
6830600 Cold traps for vapor lubrication processes Dec. 14, 2004
6758883 Apparatus and method for decreasing water vapor in compressed gas Jul. 6, 2004
6638345 Method for collecting reversely subliming substance and apparatus therefor Oct. 28, 2003
6572686 Apparatus for condensing and collecting hot gases Jun. 3, 2003
6547844 Exhaust gas filtration device, auxiliary filtration device and trap device Apr. 15, 2003
6517592 Cold trap assembly Feb. 11, 2003
6488745 Trap apparatus and method for condensable by-products of deposition reactions Dec. 3, 2002
6319299 Adjustable cold trap with different stages Nov. 20, 2001
6258153 Device for the deposition of substances Jul. 10, 2001
6241793 Cold trap equipped with curvilinear cooling plate Jun. 5, 2001
6206971 Integrated temperature controlled exhaust and cold trap assembly Mar. 27, 2001
5885313 Temperature-gradient type multistage condenser Mar. 23, 1999
5820641 Fluid cooled trap Oct. 13, 1998
5676886 Low lying fog simulator and method Oct. 14, 1997
5149493 Installation to regenerate cold traps loaded with the hydride and oxide of a liquid metal Sep. 22, 1992
4982050 Natural gas treating system including mercury trap Jan. 1, 1991
4906263 Adsorption filter with high air permeability Mar. 6, 1990
4702755 Drip trap Oct. 27, 1987
4488887 Cold trap Dec. 18, 1984
4177717 Baffle system for fume hood Dec. 11, 1979
4177718 Fume hood Dec. 11, 1979
4168741 Apparatus for ammonia feed in copying equipment Sep. 25, 1979
4150549 Cryopumping method and apparatus Apr. 24, 1979
4148196 Multiple stage cryogenic pump and method of pumping Apr. 10, 1979
4117694 Rotatable refrigerated valve Oct. 3, 1978
4072025 Regeneration-type cryopump Feb. 7, 1978











 
 
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