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Class Information
Number: 505/816
Name: Superconductor technology: apparatus, material, process > Material, per se, process of making same > Process of making, per se > Sputtering, including coating, forming, or etching (class 204/192.24)
Description: Subject matter consisting of the process of sputtering which may include coating, forming, or etching.

Sub-classes under this class:

Class Number Class Name Patents
505/817 Forming josephson element 26

Patents under this class:

Patent Number Title Of Patent Date Issued
8148300 Superconducting film and method of manufacturing the same Apr. 3, 2012
7772157 Superconducting film and method of manufacturing the same Aug. 10, 2010
6994775 Multilayer composites and manufacture of same Feb. 7, 2006
6218341 Process for the preparation of a high temperature superconductor Apr. 17, 2001
5545613 Preparation of superconducting oxides and oxide-metal composites Aug. 13, 1996
5476838 Process for producing thin layers by means of reactive cathode sputtering and apparatus for implementing the process Dec. 19, 1995
5317006 Cylindrical magnetron sputtering system May. 31, 1994
5306406 Method and apparatus for sputtering superconducting thin films of niobium on quarter-wave resonant cavities of copper for accelerating heavy ions Apr. 26, 1994
5306405 Sputtering target and method of manufacture Apr. 26, 1994
5236894 Process for producing a superconducting thin film at relatively low temperature Aug. 17, 1993
5225397 Method for preparing superconducting thin film Jul. 6, 1993
5196399 Apparatus for producing oxide superconductor cable Mar. 23, 1993
5180708 Process and apparatus for preparing superconducting thin films Jan. 19, 1993
5158933 Phase separated composite materials Oct. 27, 1992
5145713 Stoichiometric growth of compounds with volatile components Sep. 8, 1992
5126320 Method for manufacturing an oxide superconducting thin-film Jun. 30, 1992
5100863 Superconducting ceramics manufacturing method Mar. 31, 1992
5094880 Thin superconducting film and manufacturing method for the same Mar. 10, 1992
5057201 Process for depositing a superconducting thin film Oct. 15, 1991
5053833 Device made of oxide superconductive material covered with ion conductive means for adjusting the doping level and T.sub.c thereof Oct. 1, 1991
5047394 Sputtering method Sep. 10, 1991
4956337 Nb-Si-Al-O superconductors with high transition temperatures and process for manufacturing the same Sep. 11, 1990
4929595 Superconducting thin film fabrication May. 29, 1990
4913769 Process for preparing superconductive wiring board Apr. 3, 1990
4904341 Selective silicon dioxide etchant for superconductor integrated circuits Feb. 27, 1990
4902671 Manufacturing method of conductive or superconductive thin film Feb. 20, 1990
4891355 Method for producing superconducting circuit Jan. 2, 1990
4866032 Method and apparatus for producing thin film of high to superconductor compound having large area Sep. 12, 1989
4842704 Magnetron deposition of ceramic oxide-superconductor thin films Jun. 27, 1989
4834856 Method and apparatus for sputtering a superconductor onto a substrate May. 30, 1989
4828664 Process for the production of a niobium oxycarbonitride superconducting fiber bundle May. 9, 1989
H39 Multilayer super-conducting shield and method of manufacturing same Mar. 4, 1986
4536414 Superconductive tunnel junction device with enhanced characteristics and method of manufacture Aug. 20, 1985
4426268 Method for forming high superconducting T.sub.c niobium nitride film at ambient temperatures Jan. 17, 1984
4325795 Process for forming ambient temperature superconducting filaments Apr. 20, 1982
4316785 Oxide superconductor Josephson junction and fabrication method therefor Feb. 23, 1982
4299679 Method of producing Josephson elements of the tunneling junction type Nov. 10, 1981
4279969 Method of forming thin niobium carbonitride superconducting films of exceptional purity Jul. 21, 1981
4176029 Subminiature bore and conductor formation Nov. 27, 1979
4151325 Titanium nitride thin films for minimizing multipactoring Apr. 24, 1979
4064029 Method of making an improved superconducting quantum interference device Dec. 20, 1977
4043888 Superconductive thin films having transition temperature substantially above the bulk materials Aug. 23, 1977
3988178 Method for preparing superconductors Oct. 26, 1976

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