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Class Information
Number: 505/475
Name: Superconductor technology: apparatus, material, process > Processes of producing or treating high temperature (tc greater than 30 k) superconductor material or superconductor containing products or precursors thereof > Coating > Vapor deposition > Sputtering
Description: Process wherein a target is bombarded by ions in a vacuum to remove material from the target by momentum transfer and to deposit the material as a coating on a substrate.

Sub-classes under this class:

Class Number Class Name Patents
505/476 Rf sputtering (e.g., 13.56 mhz, etc.) 53

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8026197 Method and apparatus for manufacturing superconducting tape through integrated process Sep. 27, 2011
8022012 Device and method for fabricating thin films by reactive evaporation Sep. 20, 2011
7491678 Superconducting thin film having columnar pin retaining center using nano-dots Feb. 17, 2009
7439208 Growth of in-situ thin films by reactive evaporation Oct. 21, 2008
7087113 Textured substrate tape and devices thereof Aug. 8, 2006
7074744 Apparatus for consecutive deposition of high-temperature superconducting (HTS) buffer layers Jul. 11, 2006
6906008 Apparatus for consecutive deposition of high-temperature superconducting (HTS) buffer layers Jun. 14, 2005
6835696 Method of forming a superconductor film Dec. 28, 2004
6809066 Ion texturing methods and articles Oct. 26, 2004
6690957 High temperature superconductor film, method for forming the same and superconductor element Feb. 10, 2004
6632539 Polycrystalline thin film and method for preparing thereof, and superconducting oxide and method for preparation thereof Oct. 14, 2003
6280580 Method for manufacturing a double-sided high-temperature superconducting oxide thin film having large area Aug. 28, 2001
6218341 Process for the preparation of a high temperature superconductor Apr. 17, 2001
6214772 Process for preparing polycrystalline thin film, process for preparing oxide superconductor, and apparatus therefor Apr. 10, 2001
6174783 Semiconductor device having a improved trench structure manufacturing method thereof, and semiconductor device manufacturing apparatus Jan. 16, 2001
6172009 Controlled conversion of metal oxyfluorides into superconducting oxides Jan. 9, 2001
6156707 Method of manufacturing superconducting microwave component substrate Dec. 5, 2000
6106615 Method of forming biaxially textured alloy substrates and devices thereon Aug. 22, 2000
6060433 Method of making a microwave device having a polycrystalline ferrite substrate May. 9, 2000
6057271 Method of making a superconducting microwave component by off-axis sputtering May. 2, 2000
6037313 Method and apparatus for depositing superconducting layer onto the substrate surface via off-axis laser ablation Mar. 14, 2000
5939361 Method of fabricating Tl or Hg-containing oxide superconductor film Aug. 17, 1999
5922651 Method for forming high tc superconductive thin films Jul. 13, 1999
5900391 High temperature superconducting thin film deposition method May. 4, 1999
5885939 Process for forming a-axis-on-c-axis double-layer oxide superconductor films Mar. 23, 1999
5811375 Superconducting multilayer interconnection formed of oxide superconductor material and method for manufacturing the same Sep. 22, 1998
5747427 Process for forming a semiconductive thin film containing a junction May. 5, 1998
5716908 Process for controlling crystalline orientation of oxide superconductive film Feb. 10, 1998
5691280 Method of producing a high T.sub.c superconducting film free of second phase defects Nov. 25, 1997
5679625 Method of making an oxide superconducting thin film Oct. 21, 1997
5667650 High flow gas manifold for high rate, off-axis sputter deposition Sep. 16, 1997
5650378 Method of making polycrystalline thin film and superconducting oxide body Jul. 22, 1997
5648321 Process for manufacturing thin films by multi-layer deposition Jul. 15, 1997
5635454 Method for making low density ceramic composites Jun. 3, 1997
5629268 Process for preparing a layered superconducting structure May. 13, 1997
5595959 Method of forming a high-TC microbridge superconductor device Jan. 21, 1997
5585332 Process for preparing a perovskite Bi-containing superconductor film Dec. 17, 1996
5567674 Process of forming oxide superconductor possessing locally different crystal orientations Oct. 22, 1996
5567673 Process of forming multilayered Tl-containing superconducting composites Oct. 22, 1996
5565415 Method for manufacturing tunnel junction type josephson device composed of compound oxide superconductor material Oct. 15, 1996
5552375 Method for forming high T.sub.c superconducting devices Sep. 3, 1996
5545613 Preparation of superconducting oxides and oxide-metal composites Aug. 13, 1996
5508255 Epitaxial thallium high temperature superconducting films formed via a nucleation layer Apr. 16, 1996
5488031 Process for making high temperature superconducting oxide films Jan. 30, 1996
5478800 Process for preparing a superconducting thin film Dec. 26, 1995
5476838 Process for producing thin layers by means of reactive cathode sputtering and apparatus for implementing the process Dec. 19, 1995
5468806 Method of manufacturing an oxide superconductor thin film Nov. 21, 1995
5466664 Method for manufacturing a superconducting device having a thin superconducting channel formed of oxide superconductor material Nov. 14, 1995
5466665 Method of manufacturing Y-Ba-Cu-O superconducting thin film Nov. 14, 1995
5466665 Method of manufacturing Y-Ba-Cu-O superconducting thin film Nov. 14, 1995

1 2 3

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