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Class Information
Number: 501/98.5
Name: Compositions: ceramic > Ceramic compositions > Refractory > Boride, silicide, nitride, oxynitride, carbonitride, or oxycarbonitride containing > Aluminum nitride containing (ain) > With alkaline earth metal compound
Description: Subject matter additionally containing an alkaline earth metal compound.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8597743 Aluminum nitride sintered body Dec. 3, 2013
8597776 Ceramic material, laminate, member for use in semiconductor manufacturing equipment, and sputtering target member Dec. 3, 2013
8541328 Ceramic material, member for semiconductor manufacturing equipment, sputtering target member and method for producing ceramic material Sep. 24, 2013
8231985 Aluminum-nitride-based composite material, method for manufacturing the same, and member for a semiconductor manufacturing apparatus Jul. 31, 2012
8226865 Aluminum-nitride-based composite material, method for manufacturing the same, and member for a semiconductor manufacturing apparatus Jul. 24, 2012
8148283 Aluminum nitride sintered body Apr. 3, 2012
7737065 Process for producing aluminum nitride sintered compacts Jun. 15, 2010
7632768 Ceramics sintered and exothermic body for metal vapor deposition Dec. 15, 2009
7629282 Aluminum nitride sintered body, semiconductor manufacturing device and method of manufacturing Dec. 8, 2009
7605102 Aluminum nitride ceramic and semiconductor manufacturing member Oct. 20, 2009
7592280 Aluminum nitride sintered body, method of manufacturing aluminum nitride sintered body, and member Sep. 22, 2009
7553469 Aluminum nitride powder and aluminum nitride sintered compact Jun. 30, 2009
7553788 Process for producing an aluminum nitride sintered body Jun. 30, 2009
7473661 Method for preparing a sintered body of aluminum nitride Jan. 6, 2009
7422992 Aluminum nitride sintered body, semiconductor manufacturing member, and method of manufacturing aluminum nitride sintered body Sep. 9, 2008
7375045 High dense sintered body of aluminum nitride, method for preparing the same and member for manufacturing semiconductor using the sintered body May. 20, 2008
7319080 Aluminum nitride sintered compact Jan. 15, 2008
7211216 Aluminum nitride ceramic, semiconductor manufacturing member, and manufacturing method for aluminum nitride ceramic May. 1, 2007
7122490 Aluminum nitride materials and members for use in the production of semiconductors Oct. 17, 2006
7015166 Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor Mar. 21, 2006
6982125 ALN material and electrostatic chuck incorporating same Jan. 3, 2006
6900149 Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor May. 31, 2005
6458732 Lightweight dry refractory Oct. 1, 2002
6432855 Superabrasive boride and a method of preparing the same by mechanical alloying and hot pressing Aug. 13, 2002
6428741 Aluminum nitride sintered body and method of preparing the same Aug. 6, 2002
6403510 Aluminum nitride sintered body and manufacturing method thereof Jun. 11, 2002
6306528 Method for the controlling of certain second phases in aluminum nitride Oct. 23, 2001
6271163 Aluminum nitride sintered body and method of preparing the same Aug. 7, 2001
6200373 Method for controlling of certain second phases in aluminum nitride Mar. 13, 2001
6174614 Sintered aluminum nitride body and metallized substrate prepared therefrom Jan. 16, 2001
5874378 Sintered aluminum nitride Feb. 23, 1999
5773377 Low temperature sintered, resistive aluminum nitride ceramics Jun. 30, 1998
5767027 Aluminum nitride sintered body and its production method Jun. 16, 1998
5767028 Aluminum nitride sintered body and method for manufacturing the same Jun. 16, 1998
5763344 Aluminum nitride sintered body and method of manufacturing the same Jun. 9, 1998
5760532 Sintered ceramic body for a spark plug Jun. 2, 1998
5744411 Aluminum nitride sintered body with high thermal conductivity and its preparation Apr. 28, 1998
5710382 Aluminum nitride, aluminum nitride containing solid solutions and aluminum nitride composites prepared by combustion synthesis and sintered bodies prepared therefrom Jan. 20, 1998
5702998 Sintered ceramic body for a spark plug insulator and method of sintering the same Dec. 30, 1997
5677253 Wafer holding member Oct. 14, 1997
5604164 Refractory boat and method of manufacture Feb. 18, 1997
5540884 Method of making co-fired, multilayer substrates Jul. 30, 1996
5541145 Low temperature sintering route for aluminum nitride ceramics Jul. 30, 1996
5529962 Aluminum nitride sintered body and method of producing the same Jun. 25, 1996
5516734 Aluminum nitride refractory materials and methods for making the same May. 14, 1996
5508240 Aluminum nitride sintered body and method for manufacturing the same Apr. 16, 1996
5482903 Aluminum nitride body utilizing a vitreous sintering additive Jan. 9, 1996
5459113 Aluminum nitride powder capable of forming colored sintered body and process for preparing same Oct. 17, 1995
5424261 Low temperature sintering route for aluminum nitride ceramics Jun. 13, 1995
5312786 Aluminum nitride sintered body and process for producing the same May. 17, 1994

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