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Class Information
Number: 501/98.4
Name: Compositions: ceramic > Ceramic compositions > Refractory > Boride, silicide, nitride, oxynitride, carbonitride, or oxycarbonitride containing > Aluminum nitride containing (ain)
Description: Subject matter in which aluminum nitride (AlN) is found.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7605102 |
Aluminum nitride ceramic and semiconductor manufacturing member |
Oct. 20, 2009 |
| 7592280 |
Aluminum nitride sintered body, method of manufacturing aluminum nitride sintered body, and member |
Sep. 22, 2009 |
| 7553469 |
Aluminum nitride powder and aluminum nitride sintered compact |
Jun. 30, 2009 |
| 7553787 |
Aluminum nitride-based ceramic sintered body and member for semiconductor manufacturing device |
Jun. 30, 2009 |
| 7479467 |
High thermally conductive aluminum nitride sintered product |
Jan. 20, 2009 |
| 7473661 |
Method for preparing a sintered body of aluminum nitride |
Jan. 6, 2009 |
| 7459408 |
Al.sub.2O.sub.3 dispersion-strengthened Ti.sub.2AlN composites and a method for producing the same |
Dec. 2, 2008 |
| 7407903 |
Material for high temperatures |
Aug. 5, 2008 |
| 7341969 |
Aluminum nitride sintered body |
Mar. 11, 2008 |
| 7319080 |
Aluminum nitride sintered compact |
Jan. 15, 2008 |
| 7309672 |
Lightweight boron carbide materials with improved mechanical properties and process for their manufacture |
Dec. 18, 2007 |
| 7288496 |
Aluminum nitride sintered body and method of evaluation for the same |
Oct. 30, 2007 |
| 7267808 |
Aluminum nitride powder, method for producing the same and use thereof |
Sep. 11, 2007 |
| 7247589 |
Transparent polycrystalline sintered ceramic of cubic crystal structure |
Jul. 24, 2007 |
| 7247591 |
Translucent PCA ceramic, ceramic discharge vessel, and method of making |
Jul. 24, 2007 |
| 7211216 |
Aluminum nitride ceramic, semiconductor manufacturing member, and manufacturing method for aluminum nitride ceramic |
May. 1, 2007 |
| 7211153 |
Ceramic joined body, substrate holding structure and substrate processing apparatus |
May. 1, 2007 |
| 7148166 |
Aluminum nitride ceramics and a member used for the production of semiconductors |
Dec. 12, 2006 |
| 7122490 |
Aluminum nitride materials and members for use in the production of semiconductors |
Oct. 17, 2006 |
| 7098159 |
Articles for casting applications comprising ceramic composite and methods for making articles thereof |
Aug. 29, 2006 |
| 7087112 |
Nitride ceramics to mount aluminum nitride seed for sublimation growth |
Aug. 8, 2006 |
| 7081425 |
Aluminum nitride sintered body |
Jul. 25, 2006 |
| 7015166 |
Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor |
Mar. 21, 2006 |
| 6953761 |
Aluminum nitride sintered body and substrate for electronic devices |
Oct. 11, 2005 |
| 6919288 |
Hard film for cutting tools, cutting tool coated with hard film, process for forming hard film, and target used to form hard film |
Jul. 19, 2005 |
| 6919287 |
Aluminum nitride materials and members used for the production of semiconductors |
Jul. 19, 2005 |
| 6919286 |
Aluminum nitride ceramics, members for use in a system for producing semiconductors, and corrosion resistant members |
Jul. 19, 2005 |
| 6900149 |
Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor |
May. 31, 2005 |
| 6888236 |
Ceramic substrate for manufacture/inspection of semiconductor |
May. 3, 2005 |
| 6884742 |
Aluminum nitride ceramics, members for use in a system for producing semiconductors, corrosion resistant members and conductive members |
Apr. 26, 2005 |
| 6821919 |
Superior toughness and adhesive strength ceramic coating of titanium aluminum carbon nitride-amorphous carbon nanocomposite |
Nov. 23, 2004 |
| 6800576 |
Aluminum nitride sintered bodies and members for semiconductor-producing apparatuses |
Oct. 5, 2004 |
| 6607836 |
Material of low volume resistivity, an aluminum nitride sintered body and a member used for the production of semiconductors |
Aug. 19, 2003 |
| 6486085 |
Aluminum nitride sintered bodies and semiconductor-producing members including same |
Nov. 26, 2002 |
| 6458732 |
Lightweight dry refractory |
Oct. 1, 2002 |
| 6432855 |
Superabrasive boride and a method of preparing the same by mechanical alloying and hot pressing |
Aug. 13, 2002 |
| 6403510 |
Aluminum nitride sintered body and manufacturing method thereof |
Jun. 11, 2002 |
| 6383962 |
Aluminum nitride sintered product |
May. 7, 2002 |
| 6294275 |
Aluminum-nitride sintered body, method for fabricating the same, and semiconductor substrate comprising the same |
Sep. 25, 2001 |
| 6225249 |
Aluminum nitride sintered body, method of producing thereof, electrostatic chuck, susceptor, dummy wafer, clamp ring and particle catcher using the same |
May. 1, 2001 |
| 6174614 |
Sintered aluminum nitride body and metallized substrate prepared therefrom |
Jan. 16, 2001 |
| 6084221 |
Aluminum nitride heater |
Jul. 4, 2000 |
| 6051303 |
Semiconductor supporting device |
Apr. 18, 2000 |
| 6048813 |
Simulated diamond gemstones formed of aluminum nitride and aluminum nitride: silicon carbide alloys |
Apr. 11, 2000 |
| 6001760 |
Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck |
Dec. 14, 1999 |
| 5998321 |
Aluminum nitride sintered body, electronic functional material, and electrostatic chuck |
Dec. 7, 1999 |
| 5998320 |
Aluminum nitride sintered body, metal including member, electrostatic chuck, method of producing aluminum nitride sintered body, and method of producing metal including member |
Dec. 7, 1999 |
| 5993699 |
Aluminum nitride based composite body electronic functional material, electrostatic chuck and method of producing aluminum nitride based composite body |
Nov. 30, 1999 |
| 5981416 |
Titanium nitride aluminum based sintered material and its production method |
Nov. 9, 1999 |
| 5976398 |
Process for manufacturing semiconductor, apparatus for manufacturing semiconductor, and amorphous material |
Nov. 2, 1999 |
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