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Browse by Category: Main > Tools & Hardware
Class Information
Number: 451/72
Name: Abrading > Machine > Combined > With nonabrading means > Having means to refurbish abrading tool
Description: Abrading machine provided with means which dresses or trues the grinding tool.










Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8702474 Method of regenerating a polishing pad using a polishing pad sub plate Apr. 22, 2014
8647174 Semiconductor wafer polishing method and polishing pad shaping jig Feb. 11, 2014
8641480 Polishing apparatus and polishing method Feb. 4, 2014
8597081 Chemical mechanical polishing apparatus having pad conditioning disk and pre-conditioner unit Dec. 3, 2013
8590523 Machine for truing abrasive wheels Nov. 26, 2013
8591285 Ultrasonic trimming apparatus Nov. 26, 2013
8579680 Centerless grinding machine Nov. 12, 2013
8517800 Polishing pad and fabricating method thereof Aug. 27, 2013
8496511 Cathodically-protected pad conditioner and method of use Jul. 30, 2013
8410390 Grinding machine with a device for conditioning a grinding wheel and a method of conditioning a grinding wheel Apr. 2, 2013
8342911 Truing apparatus of grinding wheel Jan. 1, 2013
8298048 CMP pad dresser with oriented particles and associated methods Oct. 30, 2012
8298043 Pad conditioner dresser Oct. 30, 2012
8277284 Ice skate blade sharpening machines and associated method of dressing a grinding wheel Oct. 2, 2012
8277282 Ultrasonic trimming apparatus and ultrasonic trimming method Oct. 2, 2012
8257150 Pad dresser, polishing device, and pad dressing method Sep. 4, 2012
8221193 Closed loop control of pad profile based on metrology feedback Jul. 17, 2012
8202140 Wafer polishing carrier apparatus and chemical mechanical polishing equipment using the same Jun. 19, 2012
8182315 Chemical mechanical polishing pad and dresser May. 22, 2012
8162723 Method of polishing a tungsten carbide surface Apr. 24, 2012
8142261 Methods for enhancing chemical mechanical polishing pad processes Mar. 27, 2012
8096852 In-situ performance prediction of pad conditioning disk by closed loop torque monitoring Jan. 17, 2012
8096858 Polishing pad conditioner Jan. 17, 2012
8043145 CMP pad dresser with oriented particles and associated methods Oct. 25, 2011
8025555 System for measuring and controlling the level of vacuum applied to a conditioning holder within a CMP system Sep. 27, 2011
7934978 Ice skate blade sharpening machine May. 3, 2011
7846007 System and method for dressing a wafer polishing pad Dec. 7, 2010
7775853 Configurable polishing apparatus Aug. 17, 2010
7740521 Polishing head, polishing apparatus and polishing method for semiconductor wafer Jun. 22, 2010
7722437 Manufacturing method of semiconductor integrated circuit device May. 25, 2010
7674156 Cleaning device for chemical mechanical polishing equipment Mar. 9, 2010
7670209 Pad conditioner, pad conditioning method, and polishing apparatus Mar. 2, 2010
7632172 Hard finishing machine Dec. 15, 2009
7597606 Fabrication process of semiconductor device and polishing method Oct. 6, 2009
7578727 Conditioner device for conditioning polishing pad and chemical mechanical polishing apparatus including the same Aug. 25, 2009
7575503 Vacuum-assisted pad conditioning system Aug. 18, 2009
7544113 Apparatus for controlling the forces applied to a vacuum-assisted pad conditioning system Jun. 9, 2009
7491116 CMP pad dresser with oriented particles and associated methods Feb. 17, 2009
7473159 Detection of diamond contamination in polishing pad and reconditioning system therefor Jan. 6, 2009
7458879 Dressing apparatus and substrate holding apparatus Dec. 2, 2008
7452264 Pad cleaning method Nov. 18, 2008
7367872 Conditioner disk for use in chemical mechanical polishing May. 6, 2008
7300338 CMP diamond conditioning disk Nov. 27, 2007
7288165 Pad conditioning head for CMP process Oct. 30, 2007
7258600 Vacuum-assisted pad conditioning system Aug. 21, 2007
7217172 Enhanced end effector arm arrangement for CMP pad conditioning May. 15, 2007
7210981 Smart conditioner rinse station May. 1, 2007
7195543 Machine tool with 5 machining axes with a continuous grinding tool profilling system Mar. 27, 2007
7125312 Rotor-grinding machine comprising a rotary head with two grinding wheels Oct. 24, 2006
7118448 Truing method for grinding wheel, its truing device and grinding machine Oct. 10, 2006

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