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Class Information
Number: 451/7
Name: Abrading > Precision device or process - or with condition responsive control > Controlling temperature
Description: Subject matter using or having means which regulate the thermal level of the abrading machine or of the workpiece.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7419420 |
Substrate holding mechanism, substrate polishing apparatus and substrate polishing method |
Sep. 2, 2008 |
| 7390240 |
Method of shaping and forming work materials |
Jun. 24, 2008 |
| 7364494 |
Eyeglass lens processing apparatus and method of processing eyeglass lens |
Apr. 29, 2008 |
| 7341502 |
Methods and systems for planarizing workpieces, e.g., microelectronic workpieces |
Mar. 11, 2008 |
| 7335088 |
CMP system with temperature-controlled polishing head |
Feb. 26, 2008 |
| 7306508 |
Multi-wire saw |
Dec. 11, 2007 |
| 7297286 |
Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants |
Nov. 20, 2007 |
| 7238084 |
Chemical mechanical polishing apparatus and chemical mechanical polishing method using the same |
Jul. 3, 2007 |
| 7214123 |
Retainer ring, Polishing head, and chemical mechanical polishing apparatus |
May. 8, 2007 |
| 7201634 |
Polishing methods and apparatus |
Apr. 10, 2007 |
| 7201642 |
Process for producing improved membranes |
Apr. 10, 2007 |
| 7198544 |
Polishing pad with window |
Apr. 3, 2007 |
| RE39547 |
Method and apparatus for endpointing mechanical and chemical-mechanical polishing of substrates |
Apr. 3, 2007 |
| 7182669 |
Methods and systems for planarizing workpieces, e.g., microelectronic workpieces |
Feb. 27, 2007 |
| 7182674 |
Coolant delivery apparatus for machine tool |
Feb. 27, 2007 |
| 7156720 |
Substrate holding apparatus |
Jan. 2, 2007 |
| 7153188 |
Temperature control in a chemical mechanical polishing system |
Dec. 26, 2006 |
| 7153189 |
Coolant supply method and apparatus for grinding machine |
Dec. 26, 2006 |
| 7121922 |
Method and apparatus for polishing a workpiece surface |
Oct. 17, 2006 |
| 7101258 |
Double sided polishing machine |
Sep. 5, 2006 |
| 7086930 |
Coherent jet nozzles for grinding application |
Aug. 8, 2006 |
| 7086931 |
Magnetic head bar holding unit, lapping device, and method of lapping medium-opposing surface of thin-film magnetic head |
Aug. 8, 2006 |
| 7048610 |
Conditioning polishing pad for chemical-mechanical polishing |
May. 23, 2006 |
| 7033249 |
Dry ice blasting cleaning apparatus |
Apr. 25, 2006 |
| 7029368 |
Apparatus for controlling wafer temperature in chemical mechanical polishing |
Apr. 18, 2006 |
| 7029369 |
End-point detection apparatus |
Apr. 18, 2006 |
| 7014528 |
Grinding machine and grinding fluid supply-nozzle therefor |
Mar. 21, 2006 |
| 7014529 |
Substrate processing method and substrate processing apparatus |
Mar. 21, 2006 |
| 6984162 |
Apparatus methods for controlling wafer temperature in chemical mechanical polishing |
Jan. 10, 2006 |
| 6976902 |
Chemical mechanical polishing apparatus |
Dec. 20, 2005 |
| 6966819 |
Injecting an air stream with sublimable particles |
Nov. 22, 2005 |
| 6966816 |
Integrated endpoint detection system with optical and eddy current monitoring |
Nov. 22, 2005 |
| 6953750 |
Methods and systems for controlling belt surface temperature and slurry temperature in linear chemical mechanical planarization |
Oct. 11, 2005 |
| 6945847 |
Method of lapping medium-opposing surface in thin-film magnetic head |
Sep. 20, 2005 |
| 6942544 |
Method of achieving very high crown-to-camber ratios on magnetic sliders |
Sep. 13, 2005 |
| 6937915 |
Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control |
Aug. 30, 2005 |
| 6932673 |
Grinding method and device for the same |
Aug. 23, 2005 |
| 6926592 |
Surface treatment of mechanically abraded glass |
Aug. 9, 2005 |
| 6913515 |
System and apparatus for achieving very high crown-to-camber ratios on magnetic sliders |
Jul. 5, 2005 |
| 6910945 |
Honing method and honing apparatus |
Jun. 28, 2005 |
| 6905397 |
Apparatus for enhanced rate chemical mechanical polishing with adjustable selectivity |
Jun. 14, 2005 |
| 6902470 |
Apparatuses for conditioning surfaces of polishing pads |
Jun. 7, 2005 |
| 6896586 |
Method and apparatus for heating polishing pad |
May. 24, 2005 |
| 6887128 |
Method of reducing thermal distortion in grinding machines |
May. 3, 2005 |
| 6881131 |
Method and apparatus for diamond wire cutting of metal structures |
Apr. 19, 2005 |
| 6875079 |
Methods of working, especially polishing, inhomogeneous materials |
Apr. 5, 2005 |
| 6866567 |
Activated slurry CMP system and methods for implementing the same |
Mar. 15, 2005 |
| 6837773 |
Method and apparatus for controlling a temperature of a polishing pad used in planarizing substrates |
Jan. 4, 2005 |
| 6832950 |
Polishing pad with window |
Dec. 21, 2004 |
| 6832948 |
Thermal preconditioning fixed abrasive articles |
Dec. 21, 2004 |
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