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Class Information
Number: 451/7
Name: Abrading > Precision device or process - or with condition responsive control > Controlling temperature
Description: Subject matter using or having means which regulate the thermal level of the abrading machine or of the workpiece.

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8690636 Compound semiconductor substrate production method Apr. 8, 2014
8616935 Control of overpolishing of multiple substrates on the same platen in chemical mechanical polishing Dec. 31, 2013
8602845 Strengthening by machining Dec. 10, 2013
8591286 Apparatus and method for temperature control during polishing Nov. 26, 2013
8567384 Slicing method and wire saw apparatus Oct. 29, 2013
8568198 Active coolant flow control for machining processes Oct. 29, 2013
8568200 Ultra-low temperature magnetic polishing machine Oct. 29, 2013
8563012 Compositions and methods for administering compartmentalized frozen particles Oct. 22, 2013
8551505 Compositions and methods for therapeutic delivery with frozen particles Oct. 8, 2013
8529312 Nozzle for cooling lubricant Sep. 10, 2013
8485861 Systems, devices, and methods for making or administering frozen particles Jul. 16, 2013
8439723 Chemical mechanical polisher with heater and method May. 14, 2013
8435096 Dust-proof structure for machine tools May. 7, 2013
8409364 Process for removing a composite coating present on the surface of a gas cartridge Apr. 2, 2013
8353739 Method for detecting and/or preventing grind burn Jan. 15, 2013
8348719 Polisher for chemical mechanical planarization Jan. 8, 2013
8342908 Thermal mechanical skive for composite machining Jan. 1, 2013
8342905 Optical disk restoration method and apparatus Jan. 1, 2013
8292691 Use of pad conditioning in temperature controlled CMP Oct. 23, 2012
8292694 Substrate holding mechanism, substrate polishing apparatus and substrate polishing method Oct. 23, 2012
8267742 Slicing method and a wire saw apparatus Sep. 18, 2012
8246418 Working surface, and system and method for production thereof Aug. 21, 2012
8240235 Method of minimal quantity lubrication cutting/grinding processing and oil composition used therefor Aug. 14, 2012
8235767 Cryogenic treatment processes for diamond abrasive tools Aug. 7, 2012
8226454 Heat dissipating architecture for machine tools Jul. 24, 2012
8221190 Polishing apparatus cofigured to simultaneously polish two surfaces of a work Jul. 17, 2012
8210906 Slicing method and method for manufacturing epitaxial wafer Jul. 3, 2012
8182709 CMP system and method using individually controlled temperature zones May. 22, 2012
8182311 Device for abrasive machining May. 22, 2012
8177913 Cleaning apparatus and method utilizing sublimation of nanofabricated particles May. 15, 2012
8172641 CMP by controlling polish temperature May. 8, 2012
8167681 Slicing method May. 1, 2012
8157615 Device and process for applying and/or detaching a wafer to/from a carrier Apr. 17, 2012
8123592 Heatless slurry system Feb. 28, 2012
8118642 Method and machine tool for machining an optical object Feb. 21, 2012
8113913 Method for the simultaneous grinding of a plurality of semiconductor wafers Feb. 14, 2012
8092275 Abrasive air blast system with air cooler for blast nozzle and air dryer for storage tank Jan. 10, 2012
7988530 Slicing method Aug. 2, 2011
7980922 Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet Jul. 19, 2011
7959491 Method for slicing workpiece by using wire saw and wire saw Jun. 14, 2011
7934976 Apparatus and method for scribing substrate May. 3, 2011
7905764 Polishing head using zone control Mar. 15, 2011
7883394 Substrate holding mechanism, substrate polishing apparatus and substrate polishing method Feb. 8, 2011
7883393 System and method for removing particles from a polishing pad Feb. 8, 2011
7878883 Wire saw ingot slicing system and method with ingot preheating, web preheating, slurry temperature control and/or slurry flow rate control Feb. 1, 2011
7837534 Apparatus for heating or cooling a polishing surface of a polishing apparatus Nov. 23, 2010
7837535 Superfinishing stone and superfinishing process using the same Nov. 23, 2010
7815489 Method for the simultaneous double-side grinding of a plurality of semiconductor wafers Oct. 19, 2010
7815490 Flash vaporizing water jet and piercing with flash vaporization Oct. 19, 2010
7794305 Electric portable grinder with air cooling system Sep. 14, 2010

1 2 3 4 5

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