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Class Information
Number: 451/6
Name: Abrading > Precision device or process - or with condition responsive control > By optical sensor
Description: Subject matter in which a light responsive means regulates the abrading operation.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7621798 |
Reducing polishing pad deformation |
Nov. 24, 2009 |
| 7614932 |
Method and system for endpoint detection |
Nov. 10, 2009 |
| 7614933 |
Polishing pad assembly with glass or crystalline window |
Nov. 10, 2009 |
| 7614934 |
Double-side polishing apparatus |
Nov. 10, 2009 |
| 7614936 |
Spectrum based endpointing for chemical mechanical polishing |
Nov. 10, 2009 |
| 7603762 |
Optical lapping guide for use in the manufacture of perpendicular magnetic write heads |
Oct. 20, 2009 |
| 7604527 |
Methods and systems for planarizing workpieces, e.g., microelectronic workpieces |
Oct. 20, 2009 |
| 7585204 |
Substrate polishing apparatus |
Sep. 8, 2009 |
| 7585202 |
Computer-implemented method for process control in chemical mechanical polishing |
Sep. 8, 2009 |
| 7581305 |
Method of manufacturing an optical component |
Sep. 1, 2009 |
| 7556554 |
Apparatus and method for manufacturing optical objects |
Jul. 7, 2009 |
| 7553214 |
Polishing article with integrated window stripe |
Jun. 30, 2009 |
| 7549909 |
Methods for optical endpoint detection during semiconductor wafer polishing |
Jun. 23, 2009 |
| 7547242 |
Substrate polishing apparatus |
Jun. 16, 2009 |
| 7547243 |
Method of making and apparatus having polishing pad with window |
Jun. 16, 2009 |
| 7537511 |
Embedded fiber acoustic sensor for CMP process endpoint |
May. 26, 2009 |
| 7530878 |
Grinding machine with a concentricity correction system |
May. 12, 2009 |
| 7527545 |
Methods and tools for controlling the removal of material from microfeature workpieces |
May. 5, 2009 |
| 7528922 |
Apparatus and method for measuring ground amounts of liquid crystal display panel |
May. 5, 2009 |
| 7510460 |
Substrate polishing apparatus |
Mar. 31, 2009 |
| 7510459 |
Eyeglass lens processing apparatus |
Mar. 31, 2009 |
| 7510458 |
Bit sharpening apparatus and method of using |
Mar. 31, 2009 |
| 7507144 |
Substrate polishing apparatus |
Mar. 24, 2009 |
| 7507145 |
Automated sectioning tomographic measurement system |
Mar. 24, 2009 |
| 7500901 |
Data processing for monitoring chemical mechanical polishing |
Mar. 10, 2009 |
| 7497763 |
Polishing pad, a polishing apparatus, and a process for using the polishing pad |
Mar. 3, 2009 |
| 7497762 |
Apparatus and method for correcting grinding amount of liquid crystal display panel |
Mar. 3, 2009 |
| 7495759 |
Damage and wear detection for rotary cutting blades |
Feb. 24, 2009 |
| 7489856 |
Electrical device for automatically adjusting operating speed of a tool |
Feb. 10, 2009 |
| 7481945 |
Polishing progress monitoring method and device thereof, polishing device, semiconductor device production method, and semiconductor device |
Jan. 27, 2009 |
| 7479056 |
Automated drill bit re-sharpening and verification system |
Jan. 20, 2009 |
| 7479206 |
Apparatus for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies |
Jan. 20, 2009 |
| 7473159 |
Detection of diamond contamination in polishing pad and reconditioning system therefor |
Jan. 6, 2009 |
| 7473161 |
Lapping machine and head device manufacturing method |
Jan. 6, 2009 |
| 7452262 |
Knife sharpeners with improved knife guides |
Nov. 18, 2008 |
| 7442111 |
Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting |
Oct. 28, 2008 |
| 7438627 |
Polishing state monitoring method |
Oct. 21, 2008 |
| 7416472 |
Systems for planarizing workpieces, e.g., microelectronic workpieces |
Aug. 26, 2008 |
| 7416474 |
Planarization apparatus |
Aug. 26, 2008 |
| 7413500 |
Methods for planarizing workpieces, e.g., microelectronic workpieces |
Aug. 19, 2008 |
| 7407433 |
Pad characterization tool |
Aug. 5, 2008 |
| 7409260 |
Substrate thickness measuring during polishing |
Aug. 5, 2008 |
| 7404754 |
CNC tungsten steel cutting machine |
Jul. 29, 2008 |
| 7384326 |
Facetting area setting device and eyeglass lens processing apparatus |
Jun. 10, 2008 |
| 7377837 |
Grinding or polishing arrangement |
May. 27, 2008 |
| 7367873 |
Substrate processing apparatus |
May. 6, 2008 |
| 7361601 |
Chemical mechanical polish process and method for improving accuracy of determining polish endpoint thereof |
Apr. 22, 2008 |
| 7357694 |
Jet singulation |
Apr. 15, 2008 |
| 7354334 |
Reducing polishing pad deformation |
Apr. 8, 2008 |
| 7354332 |
Technique for process-qualifying a semiconductor manufacturing tool using metrology data |
Apr. 8, 2008 |
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