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Browse by Category: Main > Tools & Hardware
Class Information
Number: 451/6
Name: Abrading > Precision device or process - or with condition responsive control > By optical sensor
Description: Subject matter in which a light responsive means regulates the abrading operation.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8687197 Method of monitoring progress of substrate polishing and polishing apparatus Apr. 1, 2014
8662957 Leak proof pad for CMP endpoint detection Mar. 4, 2014
8657645 Methods for testing the polishability of materials Feb. 25, 2014
8657646 Endpoint detection using spectrum feature trajectories Feb. 25, 2014
8647170 Laser alignment apparatus for rotary spindles Feb. 11, 2014
8641476 Coplanar alignment apparatus for rotary spindles Feb. 4, 2014
8628384 Polishing pad for eddy current end-point detection Jan. 14, 2014
8602840 Grinding machine comprising two spindle sets Dec. 10, 2013
8597073 Method and device for machining the leading edge of a turbine engine blade Dec. 3, 2013
8597074 Methods and systems for imaging and cutting semiconductor wafers and other semiconductor workpieces Dec. 3, 2013
8585460 Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method and apparatus for selecting wavelength of light for polishing endpoint detection, Nov. 19, 2013
8579675 Methods of using optical metrology for feed back and feed forward process control Nov. 12, 2013
8582122 Polishing monitoring method, polishing method, and polishing monitoring apparatus Nov. 12, 2013
8568199 Polishing endpoint detection apparatus Oct. 29, 2013
8562389 Thin polishing pad with window and molding process Oct. 22, 2013
8556679 Substrate polishing metrology using interference signals Oct. 15, 2013
8554351 Spectrographic monitoring of a substrate during processing using index values Oct. 8, 2013
8554356 Processing end point detection method, polishing method, and polishing apparatus Oct. 8, 2013
8535115 Gathering spectra from multiple optical heads Sep. 17, 2013
8523636 Working object grinding method Sep. 3, 2013
8506354 Cup attaching apparatus Aug. 13, 2013
8506355 System and method for in-situ inspection during metallurgical cross-sectioning Aug. 13, 2013
8506356 Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations Aug. 13, 2013
8475228 Polishing pad with partially recessed window Jul. 2, 2013
8465342 Method of making and apparatus having windowless polishing pad and protected fiber Jun. 18, 2013
8460057 Computer-implemented process control in chemical mechanical polishing Jun. 11, 2013
8454407 Polishing method and apparatus Jun. 4, 2013
8431489 Chemical mechanical polishing pad having a low defect window Apr. 30, 2013
8414355 Substrate processing apparatus Apr. 9, 2013
8408966 Glass manufacturing device Apr. 2, 2013
8403725 Method and device for machining workpieces Mar. 26, 2013
8398456 Polishing method, polishing apparatus and method of monitoring a substrate Mar. 19, 2013
8398454 Apparatus for testing the polishability of materials Mar. 19, 2013
8393933 Polishing pad and system with window support Mar. 12, 2013
8393940 Molding windows in thin pads Mar. 12, 2013
8388408 Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method for selecting wavelength of light for polishing endpoint detection, and polishing Mar. 5, 2013
8387221 Device and method for finishworking of a forming tool for an auto body sheet metal part Mar. 5, 2013
8392012 Multiple libraries for spectrographic monitoring of zones of a substrate during processing Mar. 5, 2013
8369978 Adjusting polishing rates by using spectrographic monitoring of a substrate during processing Feb. 5, 2013
8342907 Polishing state monitoring method Jan. 1, 2013
8337277 Polishing pad and polishing apparatus Dec. 25, 2012
8292693 Using optical metrology for wafer to wafer feed back process control Oct. 23, 2012
8287330 Reducing polishing pad deformation Oct. 16, 2012
8284560 Eddy current sensor with enhanced edge resolution Oct. 9, 2012
8277281 Method and system for endpoint detection Oct. 2, 2012
8260446 Spectrographic monitoring of a substrate during processing using index values Sep. 4, 2012
8257545 Chemical mechanical polishing pad with light stable polymeric endpoint detection window and method of polishing therewith Sep. 4, 2012
8251774 Structured abrasive article, method of making the same, and use in wafer planarization Aug. 28, 2012
8246417 Polishing apparatus and polishing method Aug. 21, 2012
8231429 Slow speed spindle for micropunch grinding Jul. 31, 2012

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