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Class Information
Number: 451/446
Name: Abrading > Accessory > Abradant supplying
Description: Accessory intended to provide abrading material to the tool under the class definition.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7607967 |
Substrate processing method and substrate processing apparatus |
Oct. 27, 2009 |
| 7585205 |
Substrate polishing apparatus and method |
Sep. 8, 2009 |
| 7582004 |
Coolant nozzle |
Sep. 1, 2009 |
| 7572175 |
Coolant supply apparatus for grinding machine |
Aug. 11, 2009 |
| 7559825 |
Method of polishing a semiconductor wafer |
Jul. 14, 2009 |
| 7540800 |
Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer |
Jun. 2, 2009 |
| 7485029 |
Double face polishing apparatus |
Feb. 3, 2009 |
| 7465216 |
Polishing apparatus |
Dec. 16, 2008 |
| 7465221 |
Polishing apparatus |
Dec. 16, 2008 |
| 7455575 |
Polishing pad cleaner and chemical mechanical polishing apparatus comprising the same |
Nov. 25, 2008 |
| 7419419 |
Slurry supply unit for CMP apparatus |
Sep. 2, 2008 |
| 7413497 |
Chemical mechanical polishing slurry pump monitoring system and method |
Aug. 19, 2008 |
| 7390240 |
Method of shaping and forming work materials |
Jun. 24, 2008 |
| 7338352 |
Slurry delivery system, chemical mechanical polishing apparatus and method for using the same |
Mar. 4, 2008 |
| 7314402 |
Method and apparatus for controlling slurry distribution |
Jan. 1, 2008 |
| 7306508 |
Multi-wire saw |
Dec. 11, 2007 |
| 7297047 |
Bubble suppressing flow controller with ultrasonic flow meter |
Nov. 20, 2007 |
| 7267608 |
Method and apparatus for conditioning a chemical-mechanical polishing pad |
Sep. 11, 2007 |
| 7258598 |
Polishing solution supply system, method of supplying polishing solution, apparatus for and method of polishing semiconductor substrate and method of manufacturing semiconductor device |
Aug. 21, 2007 |
| 7232363 |
Polishing solution retainer |
Jun. 19, 2007 |
| 7163438 |
Zone polishing using variable slurry solid content |
Jan. 16, 2007 |
| 7144312 |
Scratch removal tool and system |
Dec. 5, 2006 |
| 7137873 |
Grinding method for workpiece, jet guide means and jet regulation means used for the method |
Nov. 21, 2006 |
| 7122475 |
Methods for using bi-modal abrasive slurries for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies |
Oct. 17, 2006 |
| 7121926 |
Methods for planarization of group VIII metal-containing surfaces using a fixed abrasive article |
Oct. 17, 2006 |
| 7108588 |
System, method, and apparatus for wetting slurry delivery tubes in a chemical mechanical polishing process to prevent clogging thereof |
Sep. 19, 2006 |
| 7108589 |
Polishing apparatus and method |
Sep. 19, 2006 |
| 7108579 |
Method and device for polishing |
Sep. 19, 2006 |
| 7097546 |
System and method for reducing surface defects in integrated circuits |
Aug. 29, 2006 |
| 7066790 |
Chemical-mechanical polishing methods |
Jun. 27, 2006 |
| 7044836 |
Coated metal oxide particles for CMP |
May. 16, 2006 |
| 7040965 |
Methods for removing doped silicon material from microfeature workpieces |
May. 9, 2006 |
| 7021999 |
Rinse apparatus and method for wafer polisher |
Apr. 4, 2006 |
| 7014539 |
Method and apparatus for minimizing agglomerate particle size in a polishing fluid |
Mar. 21, 2006 |
| 7004824 |
Method and apparatus for detecting and dispersing agglomerates in CMP slurry |
Feb. 28, 2006 |
| 6991520 |
Abrasive machine and method of abrading work piece |
Jan. 31, 2006 |
| 6979252 |
Low defectivity product slurry for CMP and associated production method |
Dec. 27, 2005 |
| 6979251 |
Method and apparatus to add slurry to a polishing system |
Dec. 27, 2005 |
| 6976904 |
Chemical mechanical polishing slurry |
Dec. 20, 2005 |
| 6969307 |
Polishing pad conditioning and polishing liquid dispersal system |
Nov. 29, 2005 |
| 6958005 |
Polishing pad conditioning system |
Oct. 25, 2005 |
| 6953391 |
Methods for reducing slurry usage in a linear chemical mechanical planarization system |
Oct. 11, 2005 |
| 6949011 |
Method and apparatus for cleaning a web-based chemical mechanical planarization system |
Sep. 27, 2005 |
| 6945859 |
Apparatus for fluid jet formation |
Sep. 20, 2005 |
| 6942548 |
Polishing method using an abrading plate |
Sep. 13, 2005 |
| 6939210 |
Slurry delivery arm |
Sep. 6, 2005 |
| 6939211 |
Planarizing solutions including abrasive elements, and methods for manufacturing and using such planarizing solutions |
Sep. 6, 2005 |
| 6929537 |
Slurry recycling method |
Aug. 16, 2005 |
| 6929533 |
Methods for enhancing within-wafer CMP uniformity |
Aug. 16, 2005 |
| 6926589 |
Chemical mechanical polishing apparatus and methods using a flexible pad and variable fluid flow for variable polishing |
Aug. 9, 2005 |
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