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Class Information
Number: 451/444
Name: Abrading > Accessory > Tool cleaner
Description: Accessory for removing the products of abrading from the abrading tool.

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8647174 Semiconductor wafer polishing method and polishing pad shaping jig Feb. 11, 2014
8641480 Polishing apparatus and polishing method Feb. 4, 2014
8622787 CMP pad dressers with hybridized abrasive surface and related methods Jan. 7, 2014
8562392 Polishing apparatus and polishing method Oct. 22, 2013
8557132 Inline monitoring of pad loading for CuCMP and developing an endpoint technique for cleaning Oct. 15, 2013
8545634 System and method for cleaning a conditioning device Oct. 1, 2013
8528913 Dressing roll mounting device Sep. 10, 2013
8480458 Grinding wheel dressing system Jul. 9, 2013
8465347 Retractable water dispenser arm for grinder/polisher Jun. 18, 2013
8317575 Power toilet bowl cleaning attachment Nov. 27, 2012
8313359 Chemical mechanical polishing apparatus Nov. 20, 2012
8096858 Polishing pad conditioner Jan. 17, 2012
8002610 Double side polishing method and apparatus Aug. 23, 2011
7815495 Pad conditioner Oct. 19, 2010
7674156 Cleaning device for chemical mechanical polishing equipment Mar. 9, 2010
7641538 Conditioning disk Jan. 5, 2010
7572172 Polishing machine, workpiece supporting table pad, polishing method and manufacturing method of semiconductor device Aug. 11, 2009
7563157 Apparatus for conditioning chemical-mechanical polishing pads Jul. 21, 2009
7530886 Non-glazing dressing wheel May. 12, 2009
7459056 Pad conditioning head for CMP process Dec. 2, 2008
7455575 Polishing pad cleaner and chemical mechanical polishing apparatus comprising the same Nov. 25, 2008
7438632 Method and apparatus for cleaning a web-based chemical mechanical planarization system Oct. 21, 2008
7367873 Substrate processing apparatus May. 6, 2008
7288165 Pad conditioning head for CMP process Oct. 30, 2007
7270597 Method and system for chemical mechanical polishing pad cleaning Sep. 18, 2007
7267608 Method and apparatus for conditioning a chemical-mechanical polishing pad Sep. 11, 2007
7258600 Vacuum-assisted pad conditioning system Aug. 21, 2007
7258708 Chemical mechanical polishing pad dresser Aug. 21, 2007
7198554 Method of making valve guide having textured external surface Apr. 3, 2007
7189139 Polishing apparatus Mar. 13, 2007
7179158 Belt sander eraser attachment Feb. 20, 2007
7175509 Grinder and method of and apparatus for non-contact conditioning of tool Feb. 13, 2007
7175515 Static pad conditioner Feb. 13, 2007
7166015 Apparatus and method for controlling fluid material composition on a polishing pad Jan. 23, 2007
7163447 Apparatus and method for conditioning a contact surface of a processing pad used in processing microelectronic workpieces Jan. 16, 2007
7150677 CMP conditioner Dec. 19, 2006
7134944 Apparatus and method for conditioning a contact surface of a processing pad used in processing microelectronic workpieces Nov. 14, 2006
7125324 Insulated pad conditioner and method of using same Oct. 24, 2006
7108579 Method and device for polishing Sep. 19, 2006
7101254 System and method for in-line metal profile measurement Sep. 5, 2006
7097542 Method and apparatus for conditioning a polishing pad Aug. 29, 2006
7090566 Grinding apparatus and method for manufacturing magnetic recording medium using the same Aug. 15, 2006
7083506 Polishing apparatus Aug. 1, 2006
7077730 Method and apparatus for polishing a workpiece Jul. 18, 2006
7077722 Systems and methods for actuating end effectors to condition polishing pads used for polishing microfeature workpieces Jul. 18, 2006
RE39195 Polishing pad refurbisher for in situ, real-time conditioning and cleaning of a polishing pad used in chemical-mechanical polishing of microelectronic substrates Jul. 18, 2006
7066795 Polishing pad conditioner with shaped abrasive patterns and channels Jun. 27, 2006
7063603 Method and apparatus for cleaning a web-based chemical mechanical planarization system Jun. 20, 2006
7052371 Vacuum-assisted pad conditioning system and method utilizing an apertured conditioning disk May. 30, 2006
7052376 Wafer carrier gap washer May. 30, 2006

1 2 3 4 5 6

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