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Class Information
Number: 451/402
Name: Abrading > Work holder > Rotary
Description: Work holder in which gripping means support the workpiece in such a manner as to allow the workpiece to turn more than 360° during the abrading operation.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8597081 Chemical mechanical polishing apparatus having pad conditioning disk and pre-conditioner unit Dec. 3, 2013
8562390 Double-disc grinding apparatus and method for producing wafer Oct. 22, 2013
8479372 Ring engraving fixture Jul. 9, 2013
8454413 Multi-chamber carrier head with a textured membrane Jun. 4, 2013
8360820 Robotic manipulator Jan. 29, 2013
8298046 Retaining rings Oct. 30, 2012
8221198 Polishing apparatus for polishing a work having two surfaces Jul. 17, 2012
7946325 Device and method for blocking optical lens May. 24, 2011
7708623 Cylindrical grinding method for producing hard metal tools and cylindrical grinding machine for grinding cylindrical starting bodies during the production of hard metal tools May. 4, 2010
7666069 Wafer holder and wafer conveyor equipped with the same Feb. 23, 2010
7635292 Substrate holding device and polishing apparatus Dec. 22, 2009
7628681 Mechanism for suppressing grinding-cutting vibration Dec. 8, 2009
7591714 Wafer grinding and tape attaching apparatus and method Sep. 22, 2009
7507148 Polishing apparatus, polishing head and polishing method Mar. 24, 2009
7467990 Back pressure control system for CMP and wafer polishing Dec. 23, 2008
7303466 Carrier head of chemical mechanical polishing apparatus having barriers dividing pressure chamber into a plurality of pressure zones Dec. 4, 2007
7220173 Wafer holder and wafer conveyor system equipped with the same May. 22, 2007
7210990 Treatment apparatus for treating workpieces or groups of workpieces May. 1, 2007
7196009 Lapping carrier, apparatus for lapping a wafer and method of fabricating a lapping carrier Mar. 27, 2007
7175514 Polishing fixture assembly for a fiber optic cable connector polishing apparatus Feb. 13, 2007
7101271 Polishing head and chemical mechanical polishing apparatus Sep. 5, 2006
7063604 Independent edge control for CMP carriers Jun. 20, 2006
7048621 Retaining ring deflection control May. 23, 2006
7040971 Carrier head with a flexible membrane May. 9, 2006
7008309 Back pressure control system for CMP and wafer polishing Mar. 7, 2006
7008310 Wafer carrier wear indicator Mar. 7, 2006
6910949 Spherical cap-shaped polishing head in a chemical mechanical polishing apparatus for semiconductor wafers Jun. 28, 2005
6884154 Method for apparatus for polishing outer peripheral chamfered part of wafer Apr. 26, 2005
6827638 Polishing device and method Dec. 7, 2004
6824456 Configuration for polishing disk-shaped objects Nov. 30, 2004
6746318 Workpiece carrier with adjustable pressure zones and barriers Jun. 8, 2004
6645049 Polishing holder for silicon wafers and method of use thereof Nov. 11, 2003
6612905 Silicon wafer polishing holder and method of use thereof Sep. 2, 2003
6524174 Clamp for connecting/disconnecting a rotary head to/from a spindle in apparatus for manufacturing a semiconductor device Feb. 25, 2003
6517421 Polishing head of a chemical and mechanical polishing apparatus for polishing a wafer Feb. 11, 2003
6375542 Hydrostatic spindle unit with automatic self centering of the workpiece Apr. 23, 2002
6287183 Vacuum-hydrostatic shoe for centerless grinding Sep. 11, 2001
6257972 Steady rest having linear sliding clamping bars Jul. 10, 2001
6120360 Apparatus for processing a planar structure Sep. 19, 2000
6083092 Multi-piece lathe chuck for silicon ingots Jul. 4, 2000
6030280 Apparatus for holding workpieces during lapping, honing, and polishing Feb. 29, 2000
6010392 Die thinning apparatus Jan. 4, 2000
5797605 Workholding apparatus Aug. 25, 1998
5664993 Air bearing for a spin index fixture Sep. 9, 1997
5361548 Multi-station abrading apparatus Nov. 8, 1994
5349787 Disposable lap blank Sep. 27, 1994
5307595 Method of sharpening tweezers May. 3, 1994
5218788 Valve stem polishing method and apparatus Jun. 15, 1993
5197271 Method and apparatus for back side damage of silicon wafers Mar. 30, 1993
5083403 Workpiece supporting fixture for use with an abrasion tool to form circular workpieces Jan. 28, 1992

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