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Class Information
Number: 451/388
Name: Abrading > Work holder > Vacuum
Description: Work holder in which the workpiece is held in place by atmospheric pressure brought into play by exhaustion of air from one side of the workpiece.










Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8636561 Polishing head and polishing apparatus Jan. 28, 2014
8585467 Linear pressure feed grinding with voice coil Nov. 19, 2013
RE44491 Chemical mechanical polishing retaining ring Sep. 10, 2013
8506363 Substrate holder and substrate holding method Aug. 13, 2013
8449355 Glass polishing system May. 28, 2013
8439728 Reticle carrier May. 14, 2013
8371564 Suction apparatus, polishing apparatus, semiconductor device, and method of manufacturing a semiconductor device Feb. 12, 2013
8371904 Polishing with enhanced uniformity Feb. 12, 2013
8360820 Robotic manipulator Jan. 29, 2013
8303379 Systems for profiling sheet products Nov. 6, 2012
8282443 Automatic machine for grinding the perimetric edge of glass sheets Oct. 9, 2012
8268114 Workpiece holder for polishing, workpiece polishing apparatus and polishing method Sep. 18, 2012
8262437 Glass polishing system Sep. 11, 2012
8262436 Stone wall grinding and polishing system Sep. 11, 2012
8251779 Grinding device with cleaning assembly Aug. 28, 2012
8246421 Arc surface grinding device Aug. 21, 2012
8192251 Pressure control system of wafer polishing apparatus Jun. 5, 2012
8167687 Method of thinning wafer and support plate May. 1, 2012
8157615 Device and process for applying and/or detaching a wafer to/from a carrier Apr. 17, 2012
8113918 Substrate supporting unit and single type substrate polishing apparatus using the same Feb. 14, 2012
8070560 Polishing apparatus and method Dec. 6, 2011
8052505 Wafer processing method for processing wafer having bumps formed thereon Nov. 8, 2011
8008941 Polishing head testing with movable pedestal Aug. 30, 2011
7988537 Substrate holding apparatus and polishing apparatus Aug. 2, 2011
7942725 Polishing apparatus May. 17, 2011
7867063 Substrate holding apparatus and polishing apparatus Jan. 11, 2011
7850509 Substrate holding apparatus Dec. 14, 2010
7780505 Semiconductor manufacturing apparatus and semiconductor manufacturing method Aug. 24, 2010
7757363 Support system for semiconductor wafers Jul. 20, 2010
7750657 Polishing head testing with movable pedestal Jul. 6, 2010
7682224 Method of machining substrate Mar. 23, 2010
7654887 Vacuum chuck and suction board Feb. 2, 2010
7632173 Substrate holding apparatus and polishing apparatus Dec. 15, 2009
7491117 Substrate holding apparatus Feb. 17, 2009
7445543 Polishing apparatus Nov. 4, 2008
7402098 Carrier head for workpiece planarization/polishing Jul. 22, 2008
7396022 System and method for optimizing wafer flatness at high rotational speeds Jul. 8, 2008
7381116 Polishing media stabilizer Jun. 3, 2008
7381119 Fixture for grinding machines Jun. 3, 2008
7364496 Polishing head for polishing semiconductor wafers Apr. 29, 2008
7357699 Substrate holding apparatus and polishing apparatus Apr. 15, 2008
7335092 Carrier head for workpiece planarization/polishing Feb. 26, 2008
7326104 Apparatus for holding lenses and method for use thereof Feb. 5, 2008
7311585 Substrate holding apparatus and polishing apparatus Dec. 25, 2007
7294041 Moving head for semiconductor wafer polishing apparatus Nov. 13, 2007
7294040 Method and apparatus for supporting a microelectronic substrate relative to a planarization pad Nov. 13, 2007
7285037 Systems including differential pressure application apparatus Oct. 23, 2007
7258599 Polishing machine, workpiece supporting table pad, polishing method and manufacturing method of semiconductor device Aug. 21, 2007
7255634 Draining device and lens processing system having the same Aug. 14, 2007
7220175 Device for carrying thin wafers and method of carrying the thin wafers May. 22, 2007

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